JPH0323093A - Head of laser beam machine - Google Patents

Head of laser beam machine

Info

Publication number
JPH0323093A
JPH0323093A JP1156715A JP15671589A JPH0323093A JP H0323093 A JPH0323093 A JP H0323093A JP 1156715 A JP1156715 A JP 1156715A JP 15671589 A JP15671589 A JP 15671589A JP H0323093 A JPH0323093 A JP H0323093A
Authority
JP
Japan
Prior art keywords
link
optical
arm
optical joint
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1156715A
Other languages
Japanese (ja)
Inventor
Tadashi Munakata
正 宗像
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1156715A priority Critical patent/JPH0323093A/en
Publication of JPH0323093A publication Critical patent/JPH0323093A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To obtain a working head whose focal position does not move irrespective of change of the irradiating direction by providing the working head having two optical joints at the lower end of an arm of a moving mechanism and connecting the rear end of the working head to the lower end of a link moving vertically along the arm through parallel holding mechanisms. CONSTITUTION:At the lower end of an arm 2 of an axis Z hung and rotated by a moving mechanism having three freedoms X, Y, Z are provided a 1st and a 2nd optical joints 14, 22 composed of a pair of mirrors 11A, B and 19A, B having 45 deg. to a laser optical axis L transmitted in the arm 2 horizontally and in parallel and in series through a manifold 18. Then, there is provided a driving part 17 to drive the 1st optical joint 14 on the 1st optical joint 14, the lower end of a link 31 connected to a moving part 33 whose upper end moves vertically along the arm 2 and the rear end of a condensing part set to the 2nd optical joint 22 are connected and a mechanism holding the link 31 and the manifold 18 in parallel is provided between the lower end of the link 31 and the 2nd optical joint 22, consequently, the head of the laser beam machine obtained can keep a fixed focal position irrespective of change of an irradiation direction and is easy of instruction.

Description

【発明の詳細な説明】 [発明の目的] (産業゛上の利用分野) 本発明は、レーザ加工機のヘッドに関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a head for a laser processing machine.

(従来の技術) 三次元の加工をするレーザ加工機のなかには、第5図の
ようにX,Y,Zの3自由度を備えた移動機構のアーム
2の先端に、回転αと振りβなどの自由度のヘッド3を
設けたものがあり、ワーク4に対するレーザ光の位置と
方向を変えて溶接・切断などを行なっている。
(Prior art) Some laser processing machines that perform three-dimensional machining include rotation α, swing β, etc. at the tip of the arm 2 of the moving mechanism that has three degrees of freedom: Some laser beams are equipped with a head 3 with a degree of freedom of 30 degrees, and the position and direction of the laser beam relative to the workpiece 4 are changed to perform welding, cutting, etc.

(発明が解決しようとする課題) ところが、このような構或のレーザ加工機では、第6図
のように、ワークの照射点Pに対して照射方向だけを変
えるときには、アーム2の位置をA,B,Cと変えねば
ならず、各軸の動作速度が制約され、突き出た角部など
での急峻な姿勢変化が困難で、移171機構1の重さで
大きな動力が要るだけでなく、系が振動する。
(Problem to be Solved by the Invention) However, in a laser processing machine having such a structure, when changing only the irradiation direction with respect to the irradiation point P of the workpiece, as shown in FIG. , B, and C, the operating speed of each axis is restricted, it is difficult to make sudden posture changes at protruding corners, etc., and the weight of the transfer mechanism 1 not only requires a large amount of power. , the system vibrates.

そこで、アームを移動させないで照剣方向だけを変える
ために、第7図のようなヘッドがある。
Therefore, in order to change only the direction of the sword without moving the arm, there is a head like the one shown in Figure 7.

これは、図示しない移動機構に設けられたアーム2の下
端でレーザ光Lを直角に曲げる第1の光学系5を旋回さ
せるα軸と、その先端でレーザ光Lを斜めに曲げる第2
の光学系6と、このレーザ光Lを更に直角に曲げる第3
の光学系7およびこの第3の光学系7を先のレーザ光軸
回りに回動させるT軸と、その先端でレーザ光軸を斜め
に曲げる第4の光学系8およびその先端に設けられた集
光系9などからなり、α軸,T軸の動作で、ヘッド3の
向きを変えて照躬方向を変えるものである。
This consists of an α axis that rotates the first optical system 5 that bends the laser beam L at right angles at the lower end of an arm 2 provided in a moving mechanism (not shown), and a second axis that bends the laser beam L diagonally at its tip.
optical system 6, and a third optical system that bends this laser beam L at a right angle.
A T-axis for rotating the optical system 7 and this third optical system 7 around the previous laser optical axis, a fourth optical system 8 for obliquely bending the laser optical axis at its tip, and a fourth optical system 8 provided at its tip. It consists of a condensing system 9 and the like, and the direction of illumination is changed by changing the orientation of the head 3 by movement of the α-axis and T-axis.

ところが、このヘッド3は、鉛直に対する姿勢角動作範
囲が約90゜に限られ、アーム下端でレーザ光しを一旦
直角に曲げたT軸の駆動系10と、第3,第4の光学系
7,8、集光系9の可動空間で大形となるだけでなく、
α軸,T軸の回動の合或で鉛直に対する姿勢角が決まる
ので、ヘッド3とワークの干渉の有無を直観的に判断で
きず、教示やプログラミングが難しい。
However, this head 3 has a posture angle operating range with respect to the vertical that is limited to about 90 degrees, and has a T-axis drive system 10 that once bends the laser beam at a right angle at the lower end of the arm, and third and fourth optical systems 7. , 8. Not only is the movable space of the condensing system 9 large,
Since the attitude angle with respect to the vertical is determined by the rotation of the α-axis and the T-axis, it is not possible to intuitively determine whether there is interference between the head 3 and the workpiece, and teaching and programming are difficult.

そこで、本発明の目的は、レーザ光の照射方向の変化に
伴なうヘッド位置の変化が少なく、小形で、教示の容易
なレーザ加工機のヘッドを得ることである゛。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a head for a laser processing machine that is small in size and easy to teach, with little change in head position due to changes in the direction of laser beam irradiation.

[発明の構或] (課題を解決するための手段) 本発明は、X,Y,Zの3自由度の移a機構に懸下され
回転するZ軸のアーム下端に、アーム内に伝送されたレ
ーザ光軸と45゜の一対のミラーで構或ざれる第1,第
2の光学関節を連結管を介して水平かつ平行に直列に設
け、第1の光学関節に第1の光学関節を駆動する駆動部
を設け、上端がアームに沿って上下動する移動部に連結
された1)ンクの下端と第2の光学関節に取付けられた
集光部の後端を連結し、リンクの下端と第2の光学関節
又は第ゴの光学関節とリンク間にリンクと連結管を平行
に保持する機構を設けたレーザ加工機のヘッドである。
[Structure of the Invention] (Means for Solving the Problems) The present invention provides a mechanism for transmitting a signal to the lower end of a Z-axis arm that is suspended from a movement mechanism with three degrees of freedom (X, Y, and Z) and rotates. First and second optical joints each consisting of a pair of mirrors at an angle of 45 degrees to the laser optical axis are provided horizontally and in parallel in series through a connecting tube, and the first optical joint is connected to the first optical joint. 1) The lower end of the link is connected to the rear end of the condensing part attached to the second optical joint, and the lower end of the link is connected to the moving part that moves up and down along the arm. This head of a laser processing machine is provided with a mechanism for holding the link and the connecting pipe in parallel between the link and the second optical joint or the third optical joint and the link.

(作 用) この結果、駆動部でアーム下端の第1の光学関節を駆動
すると、第1の光学関節の出力側とリンクは、平行を保
持機構で連動し常に平行に揺動する。このとき、集光部
の焦点Pから第2光学関節軸心までと同じく焦点Pから
集光部後端のリンク支点までとの比と、第1の光学関節
と第2の光学関節の軸間とリンクの長さとの比を等しく
設定することで、焦点P,第1の光学関節の軸,第2の
光学関節の軸の3点で囲まれた三角形と、同じく焦点P
とリンクの両端の連結軸心の3点で囲まれた三角形は相
似となり、しかも、リンクの上端と第1の光学関節の軸
がアーム軸心上になるので、焦点Pも常にアーム軸心の
延長上にあり、駆動部で第1の光学関節を揺動すると、
焦点Pの鉛直方向の位置と鉛直に対するレーザ光の照射
角度が変化する。
(Function) As a result, when the first optical joint at the lower end of the arm is driven by the drive unit, the output side of the first optical joint and the link are always oscillated in parallel by the parallel holding mechanism. At this time, the ratio from the focal point P of the condensing section to the axis of the second optical joint, as well as the ratio from the focal point P to the link fulcrum at the rear end of the condensing section, and the ratio between the axes of the first optical joint and the second optical joint. By setting the ratio between the length of the link and the length of the link to be equal, a triangle surrounded by three points, the focal point P, the axis of the first optical joint, and the axis of the second optical joint, and the focal point P
The triangles surrounded by the three points of the connecting axes at both ends of the link are similar, and since the upper end of the link and the axis of the first optical joint are on the arm axis, the focal point P is always on the arm axis. It is on the extension, and when the first optical joint is rocked by the drive part,
The vertical position of the focal point P and the irradiation angle of the laser beam with respect to the vertical change.

(実施例) 以下、本発明のレーザカ0工機のヘッドの一実施例を図
面を参照して説明する。
(Example) Hereinafter, an example of the head of a laser cutter machine of the present invention will be described with reference to the drawings.

第1図は、本発明のレーザ加工機のヘッドの要部を示す
縦断面図、第2図は第1図の右側面図である。
FIG. 1 is a longitudinal cross-sectional view showing a main part of a head of a laser processing machine according to the present invention, and FIG. 2 is a right side view of FIG. 1.

第1〜2図において、X,Y.Zの3自由度の図示しな
い移動機構に懸下され、図示しない駆動手段で軸回りに
回動する中空のアーム2の下端には、レーザ光軸Lと4
5゜で対向する一対のミラー11A, 11B、軸受1
2、ハウジング13などでなる第1の光学関節14が設
けられ、軸受12にはアーム2に固定された平歯車15
と噛み合う平歯車16が出力軸16に固定され、モータ
と減速機などで構戒された駆動部17が設けられている
。又、第1の光学関節14の出力側には、伝送管18の
E端が固定ざれ、この伝送管18の下端には同じくミラ
ー19A, 19B、軸受20、ハウジング21などで
なる第2の光学関節22が設けられ、ハウジング21に
固定された中空軸23の基部外周は醗車23aとなって
いる。
In FIGS. 1 and 2, X, Y. The lower end of the hollow arm 2, which is suspended from a moving mechanism (not shown) with three degrees of freedom in Z and rotates about an axis by a driving means (not shown), has laser optical axes L and 4.
A pair of mirrors 11A, 11B facing each other at 5 degrees, bearing 1
2. A first optical joint 14 consisting of a housing 13 and the like is provided, and a spur gear 15 fixed to the arm 2 is provided on the bearing 12.
A spur gear 16 meshing with the output shaft 16 is fixed to the output shaft 16, and a driving section 17 is provided, which is constituted by a motor, a speed reducer, and the like. Furthermore, the E end of a transmission pipe 18 is fixed to the output side of the first optical joint 14, and the second optical joint 18, which also includes mirrors 19A, 19B, a bearing 20, a housing 21, etc., is fixed to the lower end of the transmission pipe 18. A joint 22 is provided, and the outer periphery of the base of a hollow shaft 23 fixed to the housing 21 forms a hammer wheel 23a.

次に、第2の光学関節22の先端の集光系ハウジング2
5の先端には、レンズマウント26とノズル27が設け
られ、後端の突出部25aには、軸28,軸受29で平
歯車24と同一歯数の平歯車30が固定されたリンク3
1の下端が揺勤自在に連結され、リンク31の上端は、
アーム2の表面に設けられた軌通32に上下に直勤自在
のガイド軸受32aに支持された移動台33に軸受34
,軸35で揺動自在に連結ざれている(注;鋸切状は防
塵用ジャバラ)。更に、集光系ハウジング25の後端に
は、両側にアイドラ歯車36A,36Bが取付けられた
軸37が軸受38で回動自在に支持ざれている。
Next, the condensing system housing 2 at the tip of the second optical joint 22
A lens mount 26 and a nozzle 27 are provided at the tip of the link 3 , and a link 3 is provided on the protrusion 25 a at the rear end to which a spur gear 30 having the same number of teeth as the spur gear 24 is fixed by a shaft 28 and a bearing 29 .
The lower end of the link 31 is connected in a swingable manner, and the upper end of the link 31 is
A bearing 34 is mounted on a movable table 33 supported by a guide bearing 32a that can be moved up and down on a track 32 provided on the surface of the arm 2.
, are connected to each other so as to be able to swing freely by a shaft 35 (note: the saw-cut shape is a dust-proof bellows). Further, at the rear end of the condensing system housing 25, a shaft 37, to which idler gears 36A and 36B are attached on both sides, is rotatably supported by a bearing 38.

次に、本発明のレーザ710工機のヘッドの作用を第1
〜3図で説明する。
Next, the operation of the head of the laser 710 machine tool of the present invention will be explained first.
This will be explained in Figure 3.

まず、駆動部17で第1の光学関節14を揺動すると、
リンク31は第2の光学関節22の歯車23a,アイド
ラ歯車36A, 36Bと平歯車30で軸35を支点と
して第1の光学関節14の出力側(即ち伝送パイプ18
)と平行に揺動する。
First, when the first optical joint 14 is swung by the drive unit 17,
The link 31 is made up of the gear 23a of the second optical joint 22, idler gears 36A and 36B, and a spur gear 30, and is connected to the output side of the first optical joint 14 (i.e., the transmission pipe 18) with a shaft 35 as a fulcrum.
).

このとき、焦点Pから第2の光学関節22の軸心Qまで
の距離l2と焦点Pから連結軸28の軸心Rまでの距離
PRとの比と、第1の光学関節14,第2光学関節22
間の軸間距離l1 とリンク31の長さlとの比が等し
くなるようにリンク31の長さを設定して軸35の軸心
をSとすると、三角形OPQと三角形SPRは相似とな
って、焦点Pは常にアーム2の軸心の延長線上にある。
At this time, the ratio of the distance l2 from the focal point P to the axis Q of the second optical joint 22 and the distance PR from the focal point P to the axis R of the connecting shaft 28, and the ratio of the distance l2 from the focal point P to the axis Q of the second optical joint 22, joint 22
If the length of the link 31 is set so that the ratio of the distance l1 between the axes and the length l of the link 31 is equal, and the axis of the shaft 35 is set to S, then the triangle OPQ and the triangle SPR are similar. , the focal point P is always on the extension of the axis of the arm 2.

更にこのとき、レーザ光照躬方向アーム2の軸心でなす
挟角ψは、第1の光学関節14の動作角度をθとすると
、となる。
Furthermore, at this time, the included angle ψ formed by the axis of the laser beam illumination direction arm 2 is as follows, where θ is the operating angle of the first optical joint 14.

またこのとき、伝送管18と第2の光学関節22が伸び
切った状態(即ち、θ−0゜の状態)の焦点PのZ方向
の変位jZは、 Ilz−(1−cosθ) !!1+(1− cos 
( Sin−1 ’2i Si’θ)}む となる。
At this time, the displacement jZ of the focal point P in the Z direction when the transmission tube 18 and the second optical joint 22 are fully extended (that is, θ-0° state) is Ilz-(1-cosθ)! ! 1+(1- cos
(Sin-1 '2i Si'θ)}.

したがって、このZ方向の変位jzを計鋒し、Z軸駆動
系で逐次補正して角度θを制御すれば、焦点Pの位置を
変えなくてレーザ光の照射方向を変えることができる。
Therefore, by measuring this Z-direction displacement jz and sequentially correcting it using the Z-axis drive system to control the angle θ, it is possible to change the irradiation direction of the laser beam without changing the position of the focal point P.

一般にZ軸は、第6図の構成で比較的軽いので、この補
正の動力も小さい。
Generally, the Z axis is relatively light in the configuration shown in FIG. 6, so the power required for this correction is also small.

更に動作はX軸,Y軸と異なり軸方向のため、振動しな
い。
Furthermore, unlike the X and Y axes, the movement is in the axial direction, so there is no vibration.

更に、この第1,第2の光学関節14. 22でなるヘ
ッドは、曲げないときには第1,第2の光学関節14.
 22の幅の空間を占めるだけで、曲げたときでも照躬
方向に突き出る部分がないので、従来の回転α,曲げβ
の自由度のものと同程度の空間で、ワークとの干渉の有
無が直感的に判る。
Furthermore, the first and second optical joints 14. When the head 22 is not bent, the first and second optical joints 14.
It only occupies a space with a width of 22 mm, and there is no part that protrudes in the direction of illumination even when bent, so it is difficult to use the conventional rotation α and bending β
With the same degree of freedom as , you can intuitively see if there is interference with the workpiece.

尚、本実施例では、第1の光学関節14に対し第2の光
学関節22を連動させる手段を、リンク31の平歯車3
0と第1の光学関節14の出力側の同一歯数の平歯車2
3aで構或したが、第4図(a)のように、伝送パイプ
18の上端を延長したアーム21Aと、このアーム41
Aと連結し軸35間にQRと平行なリンク4113を設
け、或いは第4図(b)のようにQRと平行に出力軸1
6の軸心Oとリンク31間を連結するリンク41Cを設
けて平行四辺形リンクを用いて行ってもよい。
In this embodiment, the means for interlocking the second optical joint 22 with the first optical joint 14 is provided by the spur gear 3 of the link 31.
0 and the spur gear 2 with the same number of teeth on the output side of the first optical joint 14
3a, but as shown in FIG. 4(a), an arm 21A extending from the upper end of the transmission pipe 18 and this arm 41
A link 4113 is provided between the shafts 35 and parallel to the QR, or the output shaft 1 is connected parallel to the QR as shown in FIG. 4(b).
A parallelogram link may be used by providing a link 41C that connects the axis O of No. 6 and the link 31.

[発明の効果] 以上、本発明によれば、X,Y.Zの3自由度の移動機
構に懸下され回転するZ軸のアーム下端に、アーム内に
伝送されたレーザ光の光軸と45゜の一対のミラーで構
戊する第1,第2の光学関節を連結管を介して横に平行
に直列に設け、第1の光学関節に第1の光学関節の駆動
部を設け、上端がアームに沿って上下動する移動部に取
付けられたリンクの下端と第2の光学関節に取付(ブら
れた集光部の後端を連結し、リンクの下端と第2の光学
関節間又は第1の光学関節とリンク間にリンクと連結管
の平行保持機構を設けたので、照躬方向を変えても焦点
位置が変らず教示の容易なレーザ加工機のヘッドを得る
ことができる。
[Effects of the Invention] As described above, according to the present invention, X, Y. At the lower end of the Z-axis arm that rotates and is suspended from a Z-3 degree of freedom movement mechanism, there are first and second optics consisting of a pair of mirrors at an angle of 45 degrees to the optical axis of the laser beam transmitted within the arm. The lower end of the link is attached to a movable part whose upper end moves up and down along the arm. and the second optical joint (connecting the rear end of the cut light condensing part, and a parallel holding mechanism for the link and the connecting pipe between the lower end of the link and the second optical joint or between the first optical joint and the link. As a result, it is possible to obtain a head for a laser processing machine that can be easily taught without changing the focal position even if the illumination direction is changed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のレーザ加工機のヘッドの一実施例を示
す縦断面図、第2図は第1図の側面図、第3図は本発明
のレーザ加工機のヘッドの作用を示す説明図、第4図(
aL(b)は本発明のレーザ加工機のヘッドの他の実施
例を示す機構説明図、第5図は従来のレーザ加工機の一
例を示す斜視図、第6図は第5図の作用を示す図、第7
図は従来のレーザ加工機のヘッドを示す正面図である。 2・・・アーム 14・・・第1の光学関節 17・・・駆動部 18・・・伝送パイプ 22・・・第2の光学関節 25・・・集光系ハウジング 27・・・ノズル 28, 35. 37・・・軸 31・・・リンク 33・・・移動台 (8733)代理人 弁理士 猪 股 祥 晃(ばか 
1名〉 第 5 図 茅 Z 図 箒 7 阿
FIG. 1 is a longitudinal sectional view showing an embodiment of the head of the laser processing machine of the present invention, FIG. 2 is a side view of FIG. 1, and FIG. 3 is an explanation showing the operation of the head of the laser processing machine of the present invention. Figure, Figure 4 (
aL(b) is a mechanism explanatory diagram showing another embodiment of the head of the laser processing machine of the present invention, FIG. 5 is a perspective view showing an example of a conventional laser processing machine, and FIG. 6 shows the function of FIG. 5. Figure shown, 7th
The figure is a front view showing the head of a conventional laser processing machine. 2... Arm 14... First optical joint 17... Drive section 18... Transmission pipe 22... Second optical joint 25... Condensing system housing 27... Nozzle 28, 35. 37...Axis 31...Link 33...Moving table (8733) Agent Patent attorney Yoshiaki Inomata (Idiot)
1 person〉 Figure 5 Kaya Z Figure Broom 7 A

Claims (1)

【特許請求の範囲】[Claims] X、Y、Zの3自由度の移動機構に取付けられて回動す
るZ軸のアーム下端に集光部が設けられたレーザ加工機
のヘッドにおいて、前記アーム下端に前記アーム内に伝
送されたレーザ光を45゜に折り曲げる一対のミラーで
なる第1と第2の光学関節を連結管を介して平行に設け
、前記第1の光学関節にこの第1の光学関節の駆動部を
設け、上端が前記アームに沿つて上下動する移動部に連
結されたリンクの下端と前記第2の光学関節に取付けら
れた前記集光部の後端を連結し、前記リンクの下端と前
記第2の光学関節間又は前記第1の光学関節と前記リン
ク間に前記リンクと前記連結管の平行保持機構を設けた
ことを特徴とするレーザ加工機のヘッド。
In the head of a laser processing machine, in which a light condensing section is provided at the lower end of a rotating Z-axis arm that is attached to a moving mechanism with three degrees of freedom (X, Y, and Z), a beam transmitted into the arm is attached to the lower end of the arm. First and second optical joints each consisting of a pair of mirrors that bend a laser beam at 45 degrees are provided in parallel via a connecting tube, a drive section for the first optical joint is provided in the first optical joint, and the upper end connects the lower end of the link connected to the movable part that moves up and down along the arm and the rear end of the light condensing part attached to the second optical joint, and the lower end of the link and the second optical joint are connected to each other. A head of a laser processing machine, characterized in that a parallel holding mechanism for the link and the connecting pipe is provided between the joints or between the first optical joint and the link.
JP1156715A 1989-06-21 1989-06-21 Head of laser beam machine Pending JPH0323093A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1156715A JPH0323093A (en) 1989-06-21 1989-06-21 Head of laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1156715A JPH0323093A (en) 1989-06-21 1989-06-21 Head of laser beam machine

Publications (1)

Publication Number Publication Date
JPH0323093A true JPH0323093A (en) 1991-01-31

Family

ID=15633756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1156715A Pending JPH0323093A (en) 1989-06-21 1989-06-21 Head of laser beam machine

Country Status (1)

Country Link
JP (1) JPH0323093A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6747241B2 (en) 2000-12-25 2004-06-08 Kawasaki Jukogyo Kabushiki Kaisha Laser beam projector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6747241B2 (en) 2000-12-25 2004-06-08 Kawasaki Jukogyo Kabushiki Kaisha Laser beam projector

Similar Documents

Publication Publication Date Title
JP2591968B2 (en) Industrial robot wrist
KR880701161A (en) Workhead device
JPS59134682A (en) Manipulator device
EP0823303A1 (en) Laser processing device
JPH02108489A (en) Wrist mechanism for articulated laser robot
JPH0583354B2 (en)
JPH0352791A (en) Articulated arm type industrial laser robot
JPH0378227B2 (en)
JPS61293795A (en) Joint section for industrial robot and robot with said jointsection
JPH0323093A (en) Head of laser beam machine
JP5930523B2 (en) Laser light processing equipment for resin molded products
JPH02133188A (en) Laser beam machining robot
JPS59107785A (en) Multijoint arm type robot for laser working
JP2012192499A (en) Parallel link robot
JP2606011B2 (en) Articulated robot
JPH06328285A (en) Vertical articulated industrial robot wrist device
US4597642A (en) Articulate joint in laser processing machines
JP2680101B2 (en) Laser processing head
JPH02229689A (en) Laser beam machining robot
GB2141515A (en) Automatic welding device
JPH0216872Y2 (en)
JPH0310475B2 (en)
JPS6326291A (en) Laser beam machine
JPS6224986A (en) Industrial robot device
JP3705626B2 (en) Trajectory generator