JPH03272017A - Magnetic recording medium and production thereof - Google Patents

Abstract

PURPOSE:To intensify the film quality of a CSS zone and to make improvement in durability by constituting a protective film of a data zone where graphite and diamond coexist and the CSS zone mainly consisting of the diamond. CONSTITUTION:This recording medium has a magnetic film on which data is written and the protective film of carbon to protect this magnetic film. The protective film has the data zone 2 where the graphite and the diamond coexist and the CSS zone 3 mainly consisting of the diamond. The graphite and the diamond coexist in the data zone 2 and the CSS zone 3 consists of the heavy load diamond in such a manner; therefore, the magnetic recording medium which has the high film quality of only the CSS zone and the improved durabil ity is obtd.

Description

[Detailed Description of the Invention] [Summary Regarding a magnetic recording medium that has a magnetic film on which data is written on a substrate and a carbon protective film that protects this magnetic film, only the film quality in the CSS zone is strong and durable. In order to provide an improved magnetic recording medium, the protective film is configured to have a data zone in which graphite and diamond are mixed, and a CSS zone which is mainly composed of diamond.

[Industrial Application Field] The present invention relates to a magnetic recording medium having a magnetic film on which data is written on a substrate and a carbon protective film that protects the magnetic film, and a method for manufacturing the same.

In recent years, with the increase in magnetic recording density, there is a tendency for the flying height of the head to become extremely low. Therefore, in magnetic recording media, it is particularly necessary to increase the strength of the protective film.

[Prior Art] Next, a conventional example will be explained using the drawings. FIG. 9 is a flow diagram showing an outline of a conventional method for manufacturing a magnetic recording medium.

In the figure, first, an aluminum alloy or glass substrate is formed (step 1).

Next, a tape polishing process called texturing process is performed on the substrate (step 2). This processing is performed to adjust the surface roughness of the substrate.

Next, a magnetic film is formed on the substrate by sputtering (step 3).

Subsequently, a carbon protective film is formed on the magnetic film by sputtering (step 4).

In addition, during sputtering in these two steps,
In order to control the magnetic properties and film quality, the substrate is heated (300° C. or less) in advance.

Then, using a magnetic head whose flying height is set lower than the actually set flying height of the magnetic head, head vanishing is performed to remove minute protrusions (step 5).

Finally, a lubricant is applied to reduce friction (step 6).

[Problems to be Solved by the Invention] In the above manufacturing method, the preliminary heating during sputtering is relatively high and the entire substrate is heated, so there are the following problems.

(1) Because the preheating temperature is high, the carbon protective film becomes a mixture of diamond and graphite, and the quality of the protective film is not strong enough. Therefore, if the film is not scraped off in the CSS zone where the head comes into contact, there will be a problem in durability.

(2) If the preheating is lowered, the protective film becomes almost diamond-like and the film quality becomes stronger, but head burnishing cannot be performed.

The present invention has been made in view of the above problems, and its object is to provide a magnetic recording medium in which only the film quality of the CSS zone is strong and the durability of the CSS zone is improved, and a method for manufacturing the same.

[Means for Solving the Problem] FIG. 1 is a diagram showing the principle of the invention according to claim 1. In the figure,
Reference numeral 1 denotes a magnetic recording medium having a magnetic film on which data is written on a substrate, and a carbon protective film that protects the magnetic film.

The protective film consists of Data Zone 2, which is a mixture of graphite and diamond, and CS, which is mainly composed of diamond.
It has an S zone 3.

FIG. 2 is a diagram showing the principle of the invention according to claim 2.

In this principle diagram, after forming a magnetic layer on a substrate, a magnetic film is formed by sputtering at a heating temperature of 100°C or less (Step 11), and only the data zone is partially heated at 150°C to 300°C (Step 12). It consists of things.

[Function] In the magnetic recording medium according to claim 1 shown in FIG. 1, the data zone is a mixture of graphite and diamond,
Since the CSS zone mainly consists of diamonds,
Only the film quality in the CSS zone is strong.

In the method for manufacturing a magnetic recording medium according to claim 2 shown in FIG. 2, the entire protective film in step 11 is mainly made of diamond. Then, in step 12, only the data zone is partially heated at 150° C. to 300° C., so that the data zone becomes a state in which graphite and diamond are mixed, and only the film quality of the CSS zone becomes stronger.

[Example] Next, the present invention will be explained in detail using the drawings.

FIG. 3 is a schematic flow diagram illustrating an example of the method for manufacturing a magnetic recording medium of the present invention, FIG. 4 is a block diagram illustrating the unilaterality of partial heating in FIG. 3, and FIG. Figure 6 is a block diagram of a magnetic recording medium manufactured using a wide range of manufacturing methods, and the durability evaluation (d) of a magnetic recording medium manufactured using the manufacturing method shown in Figure 3 is
Figure 7 shows the measurement diagram of Ti Kuri gold, I)1 in the Raman spectrophotometer used in the durability evaluation results shown in Figure 6.
．． FIG. 8 is a diagram showing an example of polyethylene at Raman spectroscopic intensity=I used in the durability evaluation results shown in FIG. 6.

First, the manufacturing method of this example will be explained using FIGS. 3 and 4.

First, an aluminum alloy or glass substrate is formed (
Step 21).

Next, a polishing process called texturing process is performed on the substrate (step 22).

Next, a magnetic film is formed on the substrate by sputtering (step 23).

Subsequently, a carbon protective film is formed on the magnetic film by sputtering (step 24).

Note that the preheating temperature during sputtering in these two steps is 100° C. or lower.

Next, only the data zone is partially heated at 150°C to 300°C. In this embodiment, partial heating is performed using a ring-shaped heater 21 shaped to heat only the data zone of the magnetic recording medium 22 as shown in FIG. 4 (step 25).

Then, using a magnetic head whose flying height is set lower than the actually set flying height of the magnetic head, head vanishing is performed to remove minute protrusions (step 26).

Finally, a lubricant is applied to reduce friction (step 27).

A magnetic recording medium 22 manufactured by such a manufacturing method will be explained using FIG. 5.

In the figure, the preheating temperature in step 24 is 100°C.
Therefore, the protective film at this point is mainly in the shape of a diamond. However, since only the data zone 23 was partially heated at 150°C to 300°C in step 25,
The CSS zone 24 remains diamond-like, but the film quality of the data zone 23 changes and becomes graphite-like.

Next, the durability evaluation results of the magnetic recording medium manufactured by such a manufacturing method will be explained using FIG. 6.

This durability evaluation result is based on the magnetic recording medium 2 in a vacuum chamber.
This was done by sliding the head. In other words, since it is in a vacuum, no lifting force is generated on the head, and the head slides on the magnetic recording medium 22.

The conditions at this time are described below.

Head: AN 20s TiC Peripheral speed: 25.../S Degree of vacuum: 100 Torr Under these conditions, the preheating temperature in steps 23 and 24 was varied. The crystal structure at this time was measured using a Raman spectrophotometer.

DLC (D4amond) in this Raman spectrophotometer
-Like Carbon) and polyethylene are shown in FIGS. 7 and 8. In the figure, a indicates amorphous, and D indicates DLC.

As shown in the figure, the best result was no baking, and as the temperature was raised, scratches and crashes began to occur.

Therefore, according to the above-mentioned manufacturing method and the above-mentioned tM magnetic recording medium, only the CSS zone becomes diamond-shaped, a sufficiently strong film quality is obtained, and the durability is improved. on the other hand,
As before, the data zone has a carbon protective film that is a mixture of diamond and graphite, making it possible to perform head vanishing.

Note that the present invention is not limited to the above embodiments.

For example, in the above embodiment, partial heating was performed using the heater 21, but a laser may also be used.

Furthermore, although the substrate has been described as an aluminum alloy, it goes without saying that it may also be a glass substrate.

[Effects of the Invention] As explained above, it is possible to realize a magnetic recording medium in which only the cs5-1-layer film quality is strong and durability is improved, and a method for manufacturing the same.

[Brief explanation of drawings]

1 is a diagram of the principle of the invention of claim 1; FIG. 2 is a diagram of the principle of the invention of claim 2; FIG. 3 is a schematic flow diagram illustrating an example of the method for manufacturing a magnetic recording medium of the invention; The figure is a block diagram illustrating one method of partial heating in Figure 3, Figure 5 is a block diagram of a magnetic recording medium manufactured by the manufacturing method shown in Figure 3, and Figure 6 is the manufacturing method shown in Figure 3. Figure 7 is a diagram showing an example of DLC in a Raman spectrophotometer used in the durability evaluation results shown in Figure 6. Figure 8 is a diagram showing durability evaluation results of magnetic recording media manufactured by A diagram showing an example of polyethylene in a Raman spectrophotometer used in the durability evaluation results shown in the figure. FIG. 9 is a flow diagram showing an outline of the manufacturing method of a conventional magnetic recording medium. In FIGS. 1 to 8, 1.22 is a magnetic recording medium, 2.23 is a data zone, and 3.24 is a CSS zone. #1-J1 Section 1 ■ Invention a) Principle diagram Fig. 1

Claims (1)

[Claims] (1) A magnetic recording medium (1) having a magnetic film on which data is written on a substrate and a carbon protective film that protects the magnetic film, wherein the protective film is a mixture of graphite and diamond. A magnetic recording medium characterized in that it has a data zone (2) consisting of CSS, and a CSS zone (3) mainly consisting of diamond. (2) After forming the magnetic layer on the substrate, form a magnetic film by sputtering at a heating temperature of 100°C or less (Step 11), and partially heat only the data zone at 150°C to 300°C (Step 12). A method of manufacturing a magnetic recording medium characterized by: