JPH0330256U - - Google Patents
Info
- Publication number
- JPH0330256U JPH0330256U JP8941389U JP8941389U JPH0330256U JP H0330256 U JPH0330256 U JP H0330256U JP 8941389 U JP8941389 U JP 8941389U JP 8941389 U JP8941389 U JP 8941389U JP H0330256 U JPH0330256 U JP H0330256U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- vacuum chamber
- slit
- slit hole
- generating means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の全体を示す一実施態様の図で
ある。第２図は本考案の効果を示す図である。
１……レーザ光発生手段、２……反射鏡Ａ、３
……反射鏡Ｂ、４……窓ガラス、５……スリツト
板、６……スリツト孔、７……真空チヤンバー、
８……基板又はターゲツト、９……レーザ光束通
過跡。
FIG. 1 is a diagram of one embodiment showing the entirety of the present invention. FIG. 2 is a diagram showing the effect of the present invention. 1... Laser beam generating means, 2... Reflecting mirror A, 3
... Reflector B, 4 ... Window glass, 5 ... Slit plate, 6 ... Slit hole, 7 ... Vacuum chamber,
8...Substrate or target, 9...Laser beam passage trace.
Claims (1)
ザ光導入口、スリツト孔を有するスリツト板をこ
の順序で有し、真空チヤンバー内にレーザ光束を
導入して真空蒸着する装置において、前記スリツ
ト板のスリツト孔を移動可能に設けるとともに、
前記レーザ光発生手段と真空チヤンバー内へのレ
ーザ光束導入口との間に、前記スリツト孔の移動
に合わせてレーザ光束を移動するためのレーザ光
束移動手段を設けたことを特徴とするレーザ光導
入装置。 In an apparatus for vacuum evaporation by introducing a laser beam into a vacuum chamber, the apparatus comprises a laser beam generating means, a laser beam introduction port into a vacuum chamber, and a slit plate having a slit hole in this order, and the slit hole of the slit plate In addition to making it movable,
Laser beam introduction characterized in that a laser beam moving means for moving the laser beam in accordance with the movement of the slit hole is provided between the laser beam generating means and the laser beam introduction port into the vacuum chamber. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8941389U JPH0330256U (en) | 1989-07-28 | 1989-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8941389U JPH0330256U (en) | 1989-07-28 | 1989-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0330256U true JPH0330256U (en) | 1991-03-25 |
Family
ID=31638992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8941389U Pending JPH0330256U (en) | 1989-07-28 | 1989-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330256U (en) |
-
1989
- 1989-07-28 JP JP8941389U patent/JPH0330256U/ja active Pending
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