Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Nippon Steel Corp
Original Assignee
Shin-Etsu Chemical Co Ltd
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd, Nippon Steel CorpfiledCriticalShin-Etsu Chemical Co Ltd
Priority to EP87105719ApriorityCriticalpatent/EP0242818B1/en
Priority to DE8787105719Tprioritypatent/DE3780341D1/de
Priority to US07/041,249prioritypatent/US4794159A/en
Publication of JPS6399231ApublicationCriticalpatent/JPS6399231A/ja
Publication of JPH0331730B2publicationCriticalpatent/JPH0331730B2/ja