JPH03354B2 - - Google Patents

Info

Publication number
JPH03354B2
JPH03354B2 JP60131493A JP13149385A JPH03354B2 JP H03354 B2 JPH03354 B2 JP H03354B2 JP 60131493 A JP60131493 A JP 60131493A JP 13149385 A JP13149385 A JP 13149385A JP H03354 B2 JPH03354 B2 JP H03354B2
Authority
JP
Japan
Prior art keywords
silicon carbide
methylchlorodisilane
reaction
carbide whiskers
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60131493A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61291498A (ja
Inventor
Motoyuki Yamada
Minoru Takamizawa
Yasushi Kobayashi
Nobuaki Urasato
Hiromi Oosaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP60131493A priority Critical patent/JPS61291498A/ja
Publication of JPS61291498A publication Critical patent/JPS61291498A/ja
Publication of JPH03354B2 publication Critical patent/JPH03354B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/005—Growth of whiskers or needles
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP60131493A 1985-06-17 1985-06-17 炭化けい素ウイスカ−の製造方法 Granted JPS61291498A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60131493A JPS61291498A (ja) 1985-06-17 1985-06-17 炭化けい素ウイスカ−の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60131493A JPS61291498A (ja) 1985-06-17 1985-06-17 炭化けい素ウイスカ−の製造方法

Publications (2)

Publication Number Publication Date
JPS61291498A JPS61291498A (ja) 1986-12-22
JPH03354B2 true JPH03354B2 (cs) 1991-01-07

Family

ID=15059284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60131493A Granted JPS61291498A (ja) 1985-06-17 1985-06-17 炭化けい素ウイスカ−の製造方法

Country Status (1)

Country Link
JP (1) JPS61291498A (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1275088A (en) * 1985-12-30 1990-10-09 Peter D. Shalek Prealloyed catalyst for growing silicon carbide whiskers
JPS63270400A (ja) * 1987-04-28 1988-11-08 Nippon Sheet Glass Co Ltd 炭化珪素ウイスカ−の製造方法
US5405654A (en) * 1989-07-21 1995-04-11 Minnesota Mining And Manufacturing Company Self-cleaning chemical vapor deposition apparatus and method
US5322711A (en) * 1989-07-21 1994-06-21 Minnesota Mining And Manufacturing Company Continuous method of covering inorganic fibrous material with particulates
US5364660A (en) * 1989-07-21 1994-11-15 Minnesota Mining And Manufacturing Company Continuous atmospheric pressure CVD coating of fibers

Also Published As

Publication number Publication date
JPS61291498A (ja) 1986-12-22

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