JPH0335932U - - Google Patents
Info
- Publication number
- JPH0335932U JPH0335932U JP9597589U JP9597589U JPH0335932U JP H0335932 U JPH0335932 U JP H0335932U JP 9597589 U JP9597589 U JP 9597589U JP 9597589 U JP9597589 U JP 9597589U JP H0335932 U JPH0335932 U JP H0335932U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transports
- floats
- large number
- injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 230000032258 transport Effects 0.000 claims 4
- 239000012530 fluid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図及び第２図は、この考案の一実施例を示
すウエーハ搬送装置の原理図、第３図は、従来の
ウエーハ搬送装置を説明する一部断面視側面図で
ある。
１０……搬送路、１１ａ，１１ｂ……噴射ノズ
ル、１２ａ，１２ｂ……開閉バルブ、１４１，…
…１４４……センサ、Ａ……ウエーハ。
1 and 2 are principle diagrams of a wafer transfer device showing an embodiment of this invention, and FIG. 3 is a partially sectional side view illustrating a conventional wafer transfer device. 10...Conveyance path, 11a, 11b...Injection nozzle, 12a, 12b...Opening/closing valve, 14 1 ,...
...14 4 ...Sensor, A...Wafer.
Claims (1)
ノズルより流体を順次噴射させてウエーハを浮上
搬送する装置において、 ウエーハを正方向へ浮上搬送させる噴射ノズル
と、ウエーハを逆方向に浮上搬送させる噴射ノズ
ルとを、各々ウエーハ搬送路に沿つて多数設ける
とともに、 浮上させているウエーハの位置を検知して、正
逆いずれかの方向に沿つて浮上位置から前の噴射
ノズルのバルブを開成して、順次噴射させ、かつ
浮上位置から後の噴射ノズルのバルブを閉成させ
る信号を発生するセンサを複数個設けたことを特
徴とするウエーハ搬送位置。[Claims for Utility Model Registration] In a device that floats and transports a wafer by sequentially jetting fluid from a large number of fluid jet nozzles arranged along a wafer transport path, there is a jet nozzle that floats and transports the wafer in the forward direction, and a jet nozzle that transports the wafer in the reverse direction. A large number of injection nozzles are installed along the wafer transfer path, and the position of the wafer being levitated is detected, and the injection nozzle from the previous injection nozzle moves from the floating position in either the forward or reverse direction. A wafer transfer position characterized in that a plurality of sensors are provided for generating signals for opening valves and sequentially injecting and closing valves of injection nozzles after the floating position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9597589U JPH0335932U (en) | 1989-08-16 | 1989-08-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9597589U JPH0335932U (en) | 1989-08-16 | 1989-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0335932U true JPH0335932U (en) | 1991-04-08 |
Family
ID=31645204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9597589U Pending JPH0335932U (en) | 1989-08-16 | 1989-08-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0335932U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014010862A (en) * | 2012-06-29 | 2014-01-20 | Fujitsu Ltd | Library device |
-
1989
- 1989-08-16 JP JP9597589U patent/JPH0335932U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014010862A (en) * | 2012-06-29 | 2014-01-20 | Fujitsu Ltd | Library device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH07228342A (en) | Airflow carrier and control method thereof | |
| JPH0335932U (en) | ||
| JP2521445B2 (en) | Transfer method in gas levitation transfer equipment | |
| JPH01160200U (en) | ||
| JPH0629085B2 (en) | Air supply control system for underfloor air supply type air pallet | |
| JPH0419521U (en) | ||
| JPH03128592U (en) | ||
| JPH0195928U (en) | ||
| JPS6312092Y2 (en) | ||
| JPH0477526U (en) | ||
| JPH06193746A (en) | Gate valve | |
| JPH01172171U (en) | ||
| JPH0214055U (en) | ||
| JPS6135984U (en) | Nozzle structure of human body private parts cleaning device | |
| JPS62149963U (en) | ||
| JPH01141878U (en) | ||
| JPS6390123U (en) | ||
| JPS6424831U (en) | ||
| JPH037126U (en) | ||
| JPH0327290U (en) | ||
| JPS6365622U (en) | ||
| JPH0261851U (en) | ||
| JPS6424830U (en) | ||
| JPH0247200U (en) | ||
| JPH0188787U (en) |