JPH0335U - - Google Patents
Info
- Publication number
- JPH0335U JPH0335U JP5723789U JP5723789U JPH0335U JP H0335 U JPH0335 U JP H0335U JP 5723789 U JP5723789 U JP 5723789U JP 5723789 U JP5723789 U JP 5723789U JP H0335 U JPH0335 U JP H0335U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafers
- holder
- cleaning
- cleaning tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000007921 spray Substances 0.000 claims 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案の実施例１を示す断面図、第２
図は本考案の実施例２を示す断面図である。 １…給液口、２…ホルダ、３…超音波発振板、
４…槽、５…キヤリア、６…ウエハ、７…配管、
８…吐出口、９…給液板、１０…給液口、１１…
排液口。
図は本考案の実施例２を示す断面図である。 １…給液口、２…ホルダ、３…超音波発振板、
４…槽、５…キヤリア、６…ウエハ、７…配管、
８…吐出口、９…給液板、１０…給液口、１１…
排液口。
Claims (1)
- 超音波振動板を備えた洗浄槽と、ウエハ収納用
キヤリアを保持し該キヤリア内のウエハを洗浄槽
内に浸漬させるホルダと、前記ホルダに取付けら
れキヤリア内のウエハに向けて洗浄液を噴出する
給液口とを有することを特徴とするメガソニツク
洗浄装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5723789U JPH0335U (ja) | 1989-05-18 | 1989-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5723789U JPH0335U (ja) | 1989-05-18 | 1989-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0335U true JPH0335U (ja) | 1991-01-07 |
Family
ID=31581768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5723789U Pending JPH0335U (ja) | 1989-05-18 | 1989-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0335U (ja) |
-
1989
- 1989-05-18 JP JP5723789U patent/JPH0335U/ja active Pending