JPH0199481U - - Google Patents
Info
- Publication number
- JPH0199481U JPH0199481U JP19687187U JP19687187U JPH0199481U JP H0199481 U JPH0199481 U JP H0199481U JP 19687187 U JP19687187 U JP 19687187U JP 19687187 U JP19687187 U JP 19687187U JP H0199481 U JPH0199481 U JP H0199481U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- nozzle
- cleaning chamber
- storage box
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案の一実施例の断面図である。
１……キヤリア収納箱、２……洗浄室、３……
収納箱載置台、４……基体、５……洗浄用ノズル
、６……排液口、７……乾燥用ノズル、Ａ……洗
浄液、Ｂ……乾燥用空気。
収納箱載置台、４……基体、５……洗浄用ノズル
、６……排液口、７……乾燥用ノズル、Ａ……洗
浄液、Ｂ……乾燥用空気。
Claims (1)
- 洗浄室と、該洗浄室内に設けられ洗浄液を通す
隙間を有するウエハキヤリア収納箱載置台と、前
記洗浄室の下面または側面に設けられ洗浄液及び
空気を洗浄室内にそれぞれ噴出する洗浄用ノズル
及び乾燥用ノズルとを含むことを特徴とするウエ
ハキヤリア収納箱洗浄装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19687187U JPH0199481U (ja) | 1987-12-24 | 1987-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19687187U JPH0199481U (ja) | 1987-12-24 | 1987-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199481U true JPH0199481U (ja) | 1989-07-04 |
Family
ID=31487461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19687187U Pending JPH0199481U (ja) | 1987-12-24 | 1987-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199481U (ja) |
-
1987
- 1987-12-24 JP JP19687187U patent/JPH0199481U/ja active Pending