JPH0337334Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial application field This invention constitutes a raised floor in a work environment that requires high cleanliness, such as a downflow clean room used for manufacturing LSI and VLSI semiconductors. Regarding improvements to the free access panel.

Conventional technology The above clean room is equipped with a HEPA filter on the ceiling, has a raised floor, and has a grating that allows air to pass through, and uses fans to forcefully circulate air from the clean room through a passage outside the clean room. This allows a laminar air flow to flow vertically within the clean room, creating a so-called downflow structure.

Currently, the floor surface is constructed by laying a large number of grid-shaped free access panels with length and width dimensions of approximately 40 to 60 cm without gaps. The reason why the floor is constructed using a large number of free access panels in this way is that when the layout of semiconductor manufacturing equipment in the clean room is changed, the size and shape of the floor surface can also be adjusted to accommodate changes in the layout. This is so that changes can be made quickly.

Problems that the invention aims to solve By the way, as the degree of integration of semiconductors manufactured in clean rooms increases, the air in clean rooms is required to be purified even more, and as part of this, it is necessary to eliminate contamination due to the coming and going of workers. Clean rooms are increasingly being unmanned to prevent substances from being brought in from outside. However, when a clean room is left unmanned, the following problems arise. In other words, when processing equipment installed in a clean room performs a specified process (cleaning, etching, etc.), the processing liquid may leak, but if there is no operator in the clean room, the leakage of the processing liquid cannot be detected. First, there are problems in that the leaked processing liquid evaporates or reacts with constituent materials such as the floor, deteriorating the atmosphere within the clean room and corroding the floor.

Means for Solving the Problems The present invention improves the free access panel that makes up the floor of the clean room so that leaks of processing liquid can be detected when the clean room is unmanned. , which attempts to solve the above problems.

That is, the free access panel of the present invention is characterized by being equipped with a leakage detection line.

Function Processing equipment for semiconductor manufacturing is usually installed on the floor of a clean room. Therefore, the processing liquid leaking from the processing device always falls onto the free access panel. Since the panel is equipped with a water leakage detection line, it is possible to detect a leakage of the processing solution before the processing solution worsens the atmosphere in the clean room or corrodes the floor, allowing prompt response. becomes possible.

Embodiment FIG. 2 shows an overall view of a clean room to which the free access panel of the present invention is applied. The ceiling of the clean room is equipped with HEPA (High Efficiency
Abbreviation for Particulate Air) filter 1 is provided,
The bed 2 is a raised bed and is configured to pass an air flow. The space below the floor 2 and the space above the HEPA filter 1 are communicated by a passage 4 having fans 3, 3, which circulate air within the clean room and through the passage 4. It's like this. Inside the clean room, highly clean air flows vertically downward in a laminar flow state as shown by the arrow by the HEPA filter 1. In the figure, 5 is a processing device installed in a clean room.

As shown in FIG. 3, the floor 2 is constructed by laying a large number of free access panels 21 without gaps. Each free access panel is set on beams 22 to form a raised floor structure.

The free access panel 21 has a rectangular shape of about 40 to 60 cm in length and width, and is made of punched metal or grating with a large number of holes to allow air to flow in the vertical direction. In the case of the present invention, a water leakage detection line 23, as shown in FIG.
24 is wired in a meandering manner. Water leak detection line 2
Resistance wires are used as 3 and 24, and two of them are provided close to each other. Connection terminals 25 are provided facing downward approximately in the center of two opposing sides of the free access panel 21, and both ends of water leakage detection lines 23 and 24 are connected to the connection terminals 25. Therefore, when constructing the floor 2 by laying the free access panels 21..., if the connecting terminals 25 of the adjacent free access panels 21... are connected by the wires 26 as shown in FIG. The water leak detection lines 23 and 24 of the access panel can be connected in series, respectively.

In this way, the water leakage detection lines 23..., 24 of each panel
If connected in series, the water leakage detection wires 23, 2
By monitoring the resistance value between both detection lines 23 and 24 from one end of 4, it is possible to identify the occurrence of a leakage of the processing liquid and the free access panel immersed in the processing liquid. That is, when a leak of the processing liquid occurs, the distance between the two detection lines 23 and 24 is narrow and both detection lines are shot by the processing liquid.
The resistance value between the detection wires 23 and 24 of the book changes to a finite value, and it is possible to know the occurrence of a leakage of the processing liquid, and since the resistance value of the water leakage detection wire of each free access panel is known, the From the magnitude of the resistance value between the two detection lines 23 and 24 when a liquid leak occurs, the number of free access panels from the measurement point to the point where the processing liquid is leaking can be calculated. Therefore, the free access panel from which the processing liquid is leaking can be identified. Note that connecting the leakage detection wires of the free access panels in series is one example of the use of this invention; even if the leakage detection wires of each free access panel are connected in parallel, it is possible to detect the occurrence of a leak of the processing liquid. be able to. In addition, the detection line 2
3 and 24 may not be resistance wires but may be simple conductive wires.

Effects of the invention Since the free access panel according to the invention is configured as described above, leakage of processing liquid in an unmanned clean room can be quickly discovered and countermeasures can be taken immediately. It is possible to effectively prevent adverse effects such as deterioration of the atmosphere in the clean room and corrosion of panels due to liquid leakage.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of a free access panel showing an embodiment of the present invention, Fig. 2 is a view showing a downflow type clean room, Fig. 3 is a perspective view showing the floor of the clean room, and Fig. 4 is a perspective view of each free access panel. It is a figure showing the connection state of the water leak detection line of an access panel. 21...Free access panel, 23, 24...Water leakage detection line.

Claims (1)

[Scope of utility model registration request] A free access panel characterized by being equipped with a water leakage detection line.