JPH0338367U - - Google Patents

Info

Publication number
JPH0338367U
JPH0338367U JP1989100220U JP10022089U JPH0338367U JP H0338367 U JPH0338367 U JP H0338367U JP 1989100220 U JP1989100220 U JP 1989100220U JP 10022089 U JP10022089 U JP 10022089U JP H0338367 U JPH0338367 U JP H0338367U
Authority
JP
Japan
Prior art keywords
heater
crucible
graphite layer
applying
upper opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989100220U
Other languages
English (en)
Other versions
JPH0748669Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989100220U priority Critical patent/JPH0748669Y2/ja
Publication of JPH0338367U publication Critical patent/JPH0338367U/ja
Application granted granted Critical
Publication of JPH0748669Y2 publication Critical patent/JPH0748669Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の分子線セルの概略縦断面図。
第２図はヒータが上下均一に分布した従来例にか
かる分子線セルの縦断面図。第３図はヒータが上
方にのみ存在する従来例にかかる分子線セルの縦
断面図。 １……るつぼ、２……ヒータ、３……反射板、
４……熱電対、６……グラフアイト層、７……ヒ
ータ、１０……ヒータ加熱用電源、１１……電界
用電源、１２〜１５……リード、１６……接続端
子。

Claims (1)

    【実用新案登録請求の範囲】
  1. 上方の開口した有底の容器であつて原料物質を
    収容するためのＰＢＮ製のるつぼと、るつぼの上
    方開口部周縁にコーテイングされたグラフアイト
    層と、るつぼ上方開口部の近傍に設けられたヒー
    タと、ヒータに通電し発熱させるためのヒータ加
    熱用電源と、ヒータの熱を内方へ反射するためヒ
    ータの外側、るつぼの底部に設けられた反射板と
    、るつぼの温度を測定するための熱電対と、グラ
    フアイト層とヒータの間に直流電圧を加えヒータ
    から生じた熱電子を加速してグラフアイト層に当
    てるための電界用電源とを含むことを特徴とする
    分子線セル。
JP1989100220U 1989-08-28 1989-08-28 分子線セル Expired - Fee Related JPH0748669Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989100220U JPH0748669Y2 (ja) 1989-08-28 1989-08-28 分子線セル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989100220U JPH0748669Y2 (ja) 1989-08-28 1989-08-28 分子線セル

Publications (2)

Publication Number Publication Date
JPH0338367U true JPH0338367U (ja) 1991-04-12
JPH0748669Y2 JPH0748669Y2 (ja) 1995-11-08

Family

ID=31649239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989100220U Expired - Fee Related JPH0748669Y2 (ja) 1989-08-28 1989-08-28 分子線セル

Country Status (1)

Country Link
JP (1) JPH0748669Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004315898A (ja) * 2003-04-16 2004-11-11 Tokki Corp 蒸着装置における蒸発源

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200895A (ja) * 1984-03-23 1985-10-11 Agency Of Ind Science & Technol 分子線結晶成長装置の噴出セル構造
JPS62244122A (ja) * 1986-04-17 1987-10-24 Mitsubishi Electric Corp 化合物半導体薄膜の製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200895A (ja) * 1984-03-23 1985-10-11 Agency Of Ind Science & Technol 分子線結晶成長装置の噴出セル構造
JPS62244122A (ja) * 1986-04-17 1987-10-24 Mitsubishi Electric Corp 化合物半導体薄膜の製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004315898A (ja) * 2003-04-16 2004-11-11 Tokki Corp 蒸着装置における蒸発源

Also Published As

Publication number Publication date
JPH0748669Y2 (ja) 1995-11-08

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees