JPH0342676Y2 - - Google Patents

Description

[Detailed explanation of the idea] [Industrial application field] The present invention relates to a resist coating device.

[Prior Art] This type of resist coating apparatus, as shown in FIG.
A certain amount of resist is dropped onto the surface of a wafer for manufacturing semiconductor devices, and the resist is applied while rotating the wafer. Pressure feeding of the resist is normally performed by pressurizing an inert gas into the resist bottle 1, but in the following explanation, illustration of piping for pressure feeding the inert gas is omitted.

Conventionally, in the resist coating apparatus, as shown in FIG. 7, a stainless steel pipe 3 whose one end is inserted into the resist bottle 1 is fixed to the cap 4 of the bottle 1 and piped to the outside, and the pipe 3 and the cap of the filter 2 are connected to each other. 2
A were connected using joints 5 and piping 6. When replacing the resist bin 1, it was done by loosening and removing the joint 5 in the middle of the piping with a spanner 7.

[Problems to be solved by the invention] In the conventional dispense structure (cap structure) described above, the resist bin 1 and the filter 2 are connected by a fixed stainless steel pipe, and there is no degree of freedom between them. When loosening at step 7, the pipe fixing part 4a of the cap 4 and the base 2a of the filter 2
This will place a burden on that part. Therefore,
Problems have arisen in that the resin cap 4 is cracked and the cap 2a of the filter 2 is deformed, creating a gap that allows air to enter.

In this case, the solution is to loosen and retighten the joint, or tighten it more, but as this process is repeated, the problem arises that the threads on the resin joint become missing. come. For this reason, if the cap is cracked,
This can be solved by replacing the resist with a new one, but if air enters the pipe, the resist inside the pipe may harden, and the amount of dripping may be insufficient, resulting in poor coating.

An object of the present invention is to provide a resist coating device that eliminates the above-mentioned problems.

[Differences between the invention and the conventional technology] In contrast to the conventional dispense structure described above, the present invention uses a one-touch detachment method to attach the pipe to the cap of the resist bin, and also allows the piping itself to have a degree of freedom and does not put a load on the joint. It has an original content.

[Means for Solving the Problems] In order to achieve the above object, the resist coating device according to the present invention includes a resist bottle, a cap, and a pipe, and the resist in the resist bottle is fed under pressure, and the resist is kept constant. A resist coating device is a resist coating device that drips a quantity of resist onto the surface of a wafer for manufacturing semiconductor devices, and a resist bottle is a container filled with resist, and is covered with a cap, and the cap has a through hole, a recess, and a vertical groove. and a lateral groove, the through hole is opened in the central shaft tube and allows the resist delivery pipe to be inserted therethrough in an airtight manner, and the recess is connected to the through hole and is provided at the center of the upper surface of the cap. The vertical groove is a pipe-receiving groove that communicates with the recess and opens on the top and outer surfaces of the cap, and the horizontal groove communicates with the vertical groove and the recess and opens on the outer surface of the cap. A groove for guiding a pipe opened in the circumferential direction over a certain range, the pipe having a straight part and a horizontal part, the straight part being inserted into the resist bin through the through hole of the cap. The horizontal part is piped to the outside of the resist bin through the vertical groove of the cap, and is rotated around the straight part so that a part of it is locked in the horizontal groove. It delivers resist liquid.

[Effect]

The pipe 3 is press-fitted into the vertical groove 4e of the cap 4, and its straight portion 3a is inserted into the resist bin 1 through the through hole 4c of the cap 4, and then rotated along the horizontal groove 4d communicating with the vertical groove 4e. , fixed at its end. When attaching and detaching, reverse the operation to remove the vertical groove 4e.
The pipe 3 can be removed from the cap 4 through the cap.

[Example] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Example 1) In FIGS. 1 to 3, the cap 4 of the resist bottle 1 is made of resin and is attached to the bottle 1 by screwing. The cap 4 has a female thread 4 on the inner circumference.
b, and a through hole 4c through which the stainless steel pipe 3 is airtightly inserted is provided in the central shaft cylinder, and a recess 4d that communicates with the through hole 4c and has a larger diameter than the through hole 4c is provided at the center of the upper surface. A vertical groove 4e is provided which is open and communicates with the recess 4d and is open on the top and outer surfaces of the cap 4. This vertical groove 4e serves as a receiving groove for the pipe 3.

This vertical groove 4e is provided with a horizontal groove 4f communicating therewith. The lateral groove 4f opens into the recess 4d and the outer surface of the cap 4, extends circumferentially over a certain range, and has a stepped portion 4f' formed at its terminal end. The horizontal groove 4f is a groove for guiding the pipe 3 received in the vertical groove 4e, and the stepped portion 4f' is a groove for guiding the pipe 3 received in the vertical groove 4e.
This is a recess that locks the pipe 3 in a fixed position in the horizontal groove 4f. By the combination of the vertical groove 4e and the horizontal groove 4f, L
A mold groove M is formed. Cap 4 also includes:
Although an inert gas press-in piping is inserted for pressure-feeding the resist, its illustration is omitted. The same applies to the following examples. Pipe 3 is through hole 4 of cap 4
A straight part 3a is inserted into the resist 1a of the resist bin 1 through c, a horizontal part 3b is bent at right angles to the straight part 3a, and a joint 5 is bent downward from the tip of the horizontal part 3b and has a joint 5 at its lower end. It consists of a connection 3c having a

The pipe 3 is inserted into the resist bin 1 by passing its straight part 3a through the through hole 4c of the cap 4, passing its horizontal part 3b through the vertical groove 4e of the cap 4, and moving it to the horizontal groove 4d. The horizontal portion 3b is rotated in the circumferential direction about the portion 3a, and the horizontal portion 3b is passed through the lateral groove 4d and is fitted and held in the fixing groove 4g. To remove the pipe 3 from the cap 4, the above operation is reversed.

Connection part 3c of pipe 3 attached to cap 4
and the base 2a of the filter 2 are connected by a flexible tube 8 such as a Teflon tube.

According to the embodiment, the resist bin 1 and the filter 2
Since they are connected by a flexible tube 8, any unreasonable force applied to the connection between the resist bottle, filter, and piping is absorbed by the flexure of the flexible tube 8, preventing cracks in the cap 4 and filter 2. This will not cause deformation of the cap 2a. Further, since the pipe 3 is fitted and held in the L-shaped groove M, it can be easily attached and detached, and the registration bin 1 can be replaced quickly.

(Embodiment 2) FIGS. 4 and 5 are external views showing a second embodiment of the present invention, and FIG. 6 is a sectional view.

FIG. 4 shows a cap 4 for a case where it is impossible to rotate and fix the pipe 3 to the left side, and the L-shaped groove M is formed to face the right side. Figure 5 shows the L-shaped groove M with the fixing groove 4g removed.
If the equipment is free from vibrations, the pipe 3 can be sufficiently maintained in a semi-fixed state with this cap 4. FIG. 6 is a cross-sectional view of the cap 4, in which the portion attached to the resist bin 1 has been changed from a screw type to a snap-in type 4h. If it is not necessary to completely fix the cap 4, this type has the advantage that the tube can be attached with one touch.

[Effects of the invention] As explained above, the present invention changes the method of fixing the pipe to the cap of the resist bin to a one-touch method, making it easier to replace the resist bin.Moreover, by eliminating the burden on the piping, It has the effect of preventing leaks from joints and preventing coating failures due to insufficient dripping amount.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a first embodiment of the present invention;
Figures 2 and 3 are detailed views of the resist bin, Figure 4
5 is an external view showing a second embodiment of the present invention, FIG. 6 is a sectional view thereof, and FIG. 7 is a perspective view showing a conventional example. 1...Regist bin, 2...Filter, 3...
Pipe, 4... Cap, M... L-shaped groove, 8...
flexible tube.

Claims (1)

[Scope of Claim for Utility Model Registration] A resist coating device that includes a resist bin, a cap, and a pipe, and that pumps resist in the resist bin and drops a certain amount of the resist onto the surface of a wafer for manufacturing semiconductor devices. The resist bin is a container filled with resist, and is covered with a cap, the cap has a through hole, a recess, a vertical groove, and a horizontal groove, and the through hole is opened in the central barrel. , the resist delivery pipe is inserted airtightly, the recess is an enlarged diameter portion that communicates with the through hole and is provided at the center of the upper surface of the cap, and the vertical groove communicates with the recess and is a part of the cap. The lateral groove is a pipe-receiving groove that is opened on the top and outer surfaces, and the horizontal groove is a pipe-guiding groove that is open in the circumferential direction over a certain range of the outer surface of the cap and communicates with the vertical groove and the recess. Yes, the pipe has a straight part and a horizontal part, the straight part is inserted into the resist bin through the through hole of the cap, and the horizontal part is piped to the outside of the resist bin through the vertical groove of the cap. What is claimed is: 1. A resist coating device, characterized in that the resist coating device is configured to rotate and displace a portion around a straight portion so as to be partially locked in a horizontal groove, and to send out a resist solution fed through the straight portion.