JPH0349237U - - Google Patents
Info
- Publication number
- JPH0349237U JPH0349237U JP10998489U JP10998489U JPH0349237U JP H0349237 U JPH0349237 U JP H0349237U JP 10998489 U JP10998489 U JP 10998489U JP 10998489 U JP10998489 U JP 10998489U JP H0349237 U JPH0349237 U JP H0349237U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- detection means
- move
- wafer detection
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Description
第１図は、本考案の一実施例を示すウエハ搬送
装置の一部を破断して示す側面図、第２図は同装
置内にウエハがセツトされている状態を示す平面
断面図である。第３図は、従来のウエハ搬送装置
の一部を破断して示す側面図、第４図は同装置内
にウエハがセツトされている状態の様子を示す平
面断面図である。
３０…キヤリア、３１…エレベータテーブル、
３２′…搬送ベルト、３３…ガイド溝、３４…搬
送用カツプ、３４ａ…ウエハストツパ、３４ｂ，
３４ｃ…切欠部、３５…搬送レール、３６…ウエ
ハ検知用センサ。
FIG. 1 is a partially cutaway side view of a wafer transfer device showing an embodiment of the present invention, and FIG. 2 is a plan sectional view showing a state in which a wafer is set in the device. FIG. 3 is a partially cutaway side view of a conventional wafer transfer device, and FIG. 4 is a plan cross-sectional view showing a state in which a wafer is set in the device. 30...Carrier, 31...Elevator table,
32'...Transportation belt, 33...Guide groove, 34...Transportation cup, 34a...Wafer stopper, 34b,
34c...notch, 35...conveyance rail, 36...wafer detection sensor.
Claims (1)
ら出力される信号に基づいて、昇降動作し、水平
移動可能な搬送用カツプを有することを特徴とす
るウエハ搬送装置。 A wafer transfer device comprising a wafer detection means, and a transfer cup that can move up and down and move horizontally based on a signal output from the wafer detection means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998489U JPH0349237U (en) | 1989-09-19 | 1989-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998489U JPH0349237U (en) | 1989-09-19 | 1989-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0349237U true JPH0349237U (en) | 1991-05-14 |
Family
ID=31658542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10998489U Pending JPH0349237U (en) | 1989-09-19 | 1989-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0349237U (en) |
-
1989
- 1989-09-19 JP JP10998489U patent/JPH0349237U/ja active Pending