JPH0353557U - - Google Patents
Info
- Publication number
- JPH0353557U JPH0353557U JP11451489U JP11451489U JPH0353557U JP H0353557 U JPH0353557 U JP H0353557U JP 11451489 U JP11451489 U JP 11451489U JP 11451489 U JP11451489 U JP 11451489U JP H0353557 U JPH0353557 U JP H0353557U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- vapor phase
- phase growth
- core tube
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図ａ及びｂは本考案の一実施例の気相成長
サイクルの動作順断面図、第２図は本考案の他の
実施例の気相成長後の状態を示す断面図、第３図
は従来の気相成長装置の断面図である。
１……ヒーター、２……炉芯管、３……ウエハ
ー、４……ウエハーボート、５……排気口、６…
…バルブ、７……ガス導入口、８……ハツチ、９
……ブロアーフアン、１０……ゲートバルブ、１
１……ブロアーフアン排気口。
1A and 1B are cross-sectional views of the operation sequence of a vapor phase growth cycle according to an embodiment of the present invention, FIG. 2 is a cross-sectional view showing the state after vapor phase growth of another embodiment of the present invention, and FIG. is a sectional view of a conventional vapor phase growth apparatus. 1... Heater, 2... Furnace core tube, 3... Wafer, 4... Wafer boat, 5... Exhaust port, 6...
...Valve, 7...Gas inlet, 8...Hatch, 9
...Blower fan, 10...Gate valve, 1
1...Blower fan exhaust port.
Claims (1)
にボートに載せられたウエハーを入れ気相成長を
行なう減圧気相成長装置において、炉芯管内にボ
ートを入、出炉させる為の前記炉口と対向する他
の炉口端に該他の炉口端を開閉するゲートバルブ
を介して前記炉芯管内を排気するべく設けられた
ブロアーフアンを有することを特徴とする減圧気
相成長装置。 In a reduced pressure vapor phase growth apparatus in which a wafer placed on a boat is inserted into the heated furnace core tube from one of the furnace ports and performs vapor phase growth, the above-mentioned method for inserting the boat into the furnace core tube and removing it from the furnace is used. A reduced pressure vapor phase growth apparatus characterized by having a blower fan provided at another furnace mouth end facing the furnace mouth to exhaust the inside of the furnace core tube via a gate valve that opens and closes the other furnace mouth end. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11451489U JPH0353557U (en) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11451489U JPH0353557U (en) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353557U true JPH0353557U (en) | 1991-05-23 |
Family
ID=31662878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11451489U Pending JPH0353557U (en) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353557U (en) |
-
1989
- 1989-09-29 JP JP11451489U patent/JPH0353557U/ja active Pending
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