JPH0353832U - - Google Patents
Info
- Publication number
- JPH0353832U JPH0353832U JP1989114462U JP11446289U JPH0353832U JP H0353832 U JPH0353832 U JP H0353832U JP 1989114462 U JP1989114462 U JP 1989114462U JP 11446289 U JP11446289 U JP 11446289U JP H0353832 U JPH0353832 U JP H0353832U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- heating
- cooling
- cooling means
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989114462U JPH0353832U (de) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989114462U JPH0353832U (de) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353832U true JPH0353832U (de) | 1991-05-24 |
Family
ID=31662830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989114462U Pending JPH0353832U (de) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353832U (de) |
-
1989
- 1989-09-29 JP JP1989114462U patent/JPH0353832U/ja active Pending
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