JPH0354823Y2

JPH0354823Y2 -

Info

Publication number: JPH0354823Y2
Application number: JP1986066723U
Authority: JP
Priority date: 1986-04-30
Filing date: 1986-04-30
Publication date: 1991-12-04
Also published as: JPS62178030U

Description

【考案の詳細な説明】「産業上の利用分野」半導体製造工程における露光装置や、精密測定
機などにおける高精度の位置決めが必要な装置の
直線運動用の静圧空気直線案内装置に関するもの
である。[Detailed description of the invention] "Industrial application field" This relates to a hydrostatic air linear guide device for linear motion of equipment that requires high-precision positioning, such as exposure equipment in semiconductor manufacturing processes and precision measuring machines. .

「従来の技術」直線案内装置として静止する案内軸に可動体を
外嵌めし両者の間に静圧空気を介在させ可動体を
移動自在とした静圧空気を利用したものがある
が、案内軸および可動体を金属材料で構成したも
のでは加工歪などのために高い精度を確保するこ
とが困難なために、セラミツク材が用いられてい
る。この時に、筒状の可動体を製作するのにセラ
ミツク製の板状体を相互に固定するために、セラ
ミツク材に設けた下穴に金属製でねじの切られた
スリーブを接着剤にて固定し、これにボルトを締
め込む方法がとられている。なお、セラミツク材
に直接ねじ加工したものは、強度が不足して実際
使用することはできない。``Prior art'' There is a linear guide device that utilizes static pressure air in which a movable body is fitted onto a stationary guide shaft and static pressure air is interposed between the two to allow the movable body to move freely. If the movable body is made of a metal material, it is difficult to ensure high accuracy due to processing distortion, so a ceramic material is used. At this time, in order to fix the ceramic plates to each other in order to manufacture the cylindrical movable body, a metal threaded sleeve is fixed with adhesive into the pilot hole made in the ceramic material. However, there is a method of tightening bolts. It should be noted that a screw thread machined directly into ceramic material cannot be used in practice due to insufficient strength.

「考案が解決しようとする問題点」加圧空気の圧力を受けるセラミツク材の板状体
を固定するための力は、金属スリーブを接着して
いる接着層に伝達される。接着は合成樹脂を主体
にした、いわゆる有機の接着剤が用いられる。こ
の接着剤は、金属やセラミツク材と比較して著し
く変形しやすい。すなわち、板状体に圧力がかか
つた場合に金属スリーブが板状体から抜け出す方
向に変形する。``Problem to be solved by the invention'' The force for fixing the ceramic plate under the pressure of pressurized air is transmitted to the adhesive layer that adheres the metal sleeve. For adhesion, a so-called organic adhesive mainly made of synthetic resin is used. This adhesive is significantly more susceptible to deformation than metal or ceramic materials. That is, when pressure is applied to the plate-like body, the metal sleeve deforms in the direction of coming off from the plate-like body.

静圧空気直線案内装置においては、可動体と案
内軸との間の隙間は運動精度を向上させるため
に、非常に僅かな値になるように調整されてい
る。この隙間の大きさに対し、金属スリーブの抜
け出し量が大きな影響を与えるレベルになつてい
る。 In a hydrostatic air linear guide device, the gap between the movable body and the guide shaft is adjusted to a very small value in order to improve motion accuracy. The size of this gap has reached a level where the amount of the metal sleeve coming out has a large effect.

この対策として、板状体にできる限り多くの金
属スリーブを接着したり、金属スリーブの寸法を
大きく、且つ長くし、いわゆる接着面積を大きく
する方法がとられている。しかし、その機能上か
ら板状体の寸法、特に厚みを無制限に大きく、ま
た、長くすることは不可能である。このため前記
の方策にも限度がある。このため、接着剤の変形
を影響のない範囲にすることは実質的に困難であ
つた。 As a countermeasure against this problem, methods have been taken such as bonding as many metal sleeves as possible to the plate-like body or increasing the size and length of the metal sleeve to increase the so-called bonding area. However, due to its functionality, it is impossible to increase the dimensions, especially the thickness, of the plate-like body without limit or to increase its length. For this reason, the above-mentioned measures also have limitations. For this reason, it has been substantially difficult to reduce the deformation of the adhesive to an unaffected range.

本考案はかかる問題点を解決しようとするもの
である。 The present invention attempts to solve such problems.

「問題点を解決するための手段」本考案は、上記の事情に鑑み、金属スリーブを
板状体の両端からそれぞれ挿入し、両金属スリー
ブ間に環状内向き支持壁を介在させて両金属スリ
ーブをねじなどにて実質的に一体とし、これにボ
ルトを用いて他の板状体を固定することにより、
可動体と案内軸との間の隙間を加圧空気供給時に
おいて所定の値とし目的を達成するものである。"Means for Solving the Problems" In view of the above circumstances, the present invention has been developed by inserting metal sleeves from both ends of a plate-like body, interposing an annular inward supporting wall between both metal sleeves, By making it substantially integral with screws etc. and fixing another plate-like body to this using bolts,
The objective is achieved by setting the gap between the movable body and the guide shaft to a predetermined value when pressurized air is supplied.

「実施例」第１図は静圧空気直線案内装置の全体で、静止
するセラミツク製案内軸１にセラミツク製可動体
２を外嵌めし両者間に静圧空気を介在させて可動
体２を移動自在としたものである。"Example" Figure 1 shows the entire static pressure air linear guide device, in which a ceramic movable body 2 is fitted onto a stationary ceramic guide shaft 1, and the movable body 2 is moved with static pressure air interposed between the two. It is something that can be freely done.

第２図は、第１図の縦断面図で、断面正方形状
の案内軸１の周辺を囲むように、板状体を相互に
結合して筒状の可動体２を形成しているものを示
す。案内軸１の断面形状としては、Ｉ型や型な
ども用いられているが、可動体２を板状体の結合
体とする構造であれば利用できる。第２図の例で
は、上下の板状体３，４の中間に側板状体５，６
を固定する場合を示している。 FIG. 2 is a longitudinal cross-sectional view of FIG. 1, showing a structure in which plate-like bodies are joined together to form a cylindrical movable body 2 so as to surround a guide shaft 1 having a square cross section. show. The guide shaft 1 may have an I-shape or a 2-shape cross-section, but any structure in which the movable body 2 is a combination of plate-like bodies can be used. In the example shown in FIG.
This shows the case where .

第３図は側板状体５を設けた下穴７に金属スリ
ーブ８を接着剤９で固定し、これにはねじ１０の
加工が施されていて、このねじ１０に上板状体３
を介してボルト１１をねじ込み、上板状体３と側
板状体５を相互に固定する状態を示している。接
着力を高めるために、金属スリーブ８表面をロー
レツト加工などにより表面積を大きくしたり、接
着層厚みが接着力を高めるのに有効な隙間を設け
るように高精度に金属スリーブ８の外径を加工
し、側板状体５の下穴７の加工を行うのは当然で
ある。 In FIG. 3, a metal sleeve 8 is fixed with adhesive 9 to a prepared hole 7 in which a side plate-like body 5 is provided, and a screw 10 is machined on this metal sleeve.
This figure shows a state in which the upper plate-like body 3 and the side plate-like body 5 are fixed to each other by screwing in the bolts 11 through the bolts. In order to increase the adhesive force, the surface area of the metal sleeve 8 is increased by knurling, etc., and the outer diameter of the metal sleeve 8 is processed with high precision so that the thickness of the adhesive layer creates an effective gap to increase the adhesive force. However, it is a matter of course that the prepared hole 7 of the side plate-like body 5 is processed.

また、第４図および第５図に概念的に示すよう
に、金属スリーブ８の数および外径、長さを大き
くすることは許される限りの範囲で行われる。し
かし、これは、板状体３，５が脆性材料のセラミ
ツク材であるためにおのずから制限される。すな
わち、側板状体５の厚みに対し直径が大きすぎる
下穴７は側板状体５自身の破壊につながりやす
い。また、金属スリーブ８の数を多くすることも
同じ理由で制限される。さらに、板状体を貫通さ
せたスリーブ８を接着し、上下方向の力をバラン
スさせることも行われるが、上下の圧力バランス
がとりにくく使用がむずかしい。 Furthermore, as conceptually shown in FIGS. 4 and 5, the number, outer diameter, and length of the metal sleeves 8 may be increased within a permissible range. However, this is naturally limited because the plates 3 and 5 are made of brittle ceramic material. That is, a pilot hole 7 whose diameter is too large relative to the thickness of the side plate-like body 5 tends to lead to destruction of the side plate-like body 5 itself. Furthermore, increasing the number of metal sleeves 8 is also limited for the same reason. Furthermore, a sleeve 8 passed through the plate-shaped body is bonded to balance the vertical force, but this makes it difficult to balance the vertical pressure and is difficult to use.

側板状体５の厚み20mm、高さ50mm、長さ200mm
の場合に、外径10mm、長さ10mmの金属スリーブ８
をエポキシ系の接着剤９にて固定する場合におい
て、金属スリーブ８の数は10個が最大となる。ピ
ツチ20mmとなり、実質上の限界となる。すなわ
ち、これよりピツチを小さくすることは側板状体
５の破壊の虞が出てくる。厚み方向についても同
様のことがいえる。 Side plate-shaped body 5 has a thickness of 20 mm, a height of 50 mm, and a length of 200 mm.
In this case, a metal sleeve 8 with an outer diameter of 10 mm and a length of 10 mm
When the metal sleeves 8 are fixed with an epoxy adhesive 9, the maximum number of metal sleeves 8 is ten. The pitch is 20mm, which is the practical limit. That is, if the pitch is made smaller than this, there is a risk that the side plate-shaped body 5 will be destroyed. The same can be said about the thickness direction.

金属スリーブ８の数、直径が実質的に最大と考
えられる状態で可動体２を構成した。案内軸１は
断面が50mm×50mm長さ300mmで、ストローク50mm
の直接案内装置とした。材料はアルミナAl₂O₃、
純度99％である。供給圧力４Kg／cm²の空気を供給
した。 The movable body 2 was constructed in a state in which the number and diameter of the metal sleeves 8 were considered to be substantially maximum. Guide shaft 1 has a cross section of 50 mm x 50 mm and a length of 300 mm, and a stroke of 50 mm.
It was designed as a direct guidance device. Material is alumina Al ₂ O ₃ ,
The purity is 99%. Air was supplied at a supply pressure of 4 Kg/cm ² .

可動体２と案内軸１の隙間は片側5μmとした。 The gap between the movable body 2 and the guide shaft 1 was 5 μm on one side.

この時、前記10本の直径６mmのボルト１１にて
側板状板５に上、下板状体３，４を固定した。し
かるに加圧空気供給時において金属スリーブ８は
接着剤９の変形により1.5μm移動した。 At this time, the upper and lower plate-like bodies 3 and 4 were fixed to the side plate-like plate 5 using the ten bolts 11 having a diameter of 6 mm. However, when pressurized air was supplied, the metal sleeve 8 moved by 1.5 μm due to the deformation of the adhesive 9.

このために、目的とした空気量10／sec（標準
状態）が20／secと著しく大きくなつた。 For this reason, the target air flow rate of 10/sec (standard condition) became significantly large to 20/sec.

また、負荷として20Kgが13Kgと小さくなり目的
を達することができなかつた。 In addition, the load was reduced from 20Kg to 13Kg, and the purpose could not be achieved.

このために、調整時に隙間を3.5μmにしようと
したが、この精度に調整することはできなかつ
た。 For this reason, an attempt was made to make the gap 3.5 μm during adjustment, but it was not possible to adjust to this accuracy.

この解決のために、第６図に示す本考案を適用
し目的を達した。 To solve this problem, the present invention shown in FIG. 6 was applied and the objective was achieved.

すなわち、側板状体５の接合端面の上下２方向
からそれぞれ下穴２１および下穴２２を穿設し、
下穴２１と下穴２２との境には円環状内向き支持
壁２３を形成させ、下穴２１および下穴２２に先
端に細径のねじ部２４を突設した金属スリーブ２
５およびねじ２６を刻設している金属スリーブ２
７をそれぞれ嵌め込ませ、金属スリーブ２５の段
部２８を円環状内向き支持壁２３に当接させると
共にそのねじ部２４を円環状内向き支持壁２３を
挿通さ通させて円環状内向き支持壁２３に当接さ
せた金属スリーブ２７のねじ２６に螺合させて金
属スリーブ２５と金属スリーブ２７とを結合す
る。なお、符号２９は金属スリーブ２７の回転用
穴である。次に、側板状体５の両端面にそれぞれ
上板３および下板４の内面を当接させボルト３
０，３１をねじ込み、上下板３，４を側板５と結
合させる。 That is, a pilot hole 21 and a pilot hole 22 are bored from the upper and lower sides of the joint end surface of the side plate-shaped body 5, respectively.
A metal sleeve 2 has an annular inward support wall 23 formed at the boundary between the prepared holes 21 and 22, and a small diameter threaded portion 24 protruding from the tips of the prepared holes 21 and 22.
5 and a metal sleeve 2 having screws 26 carved therein.
7 are respectively fitted, and the stepped portion 28 of the metal sleeve 25 is brought into contact with the annular inward supporting wall 23, and the threaded portion 24 thereof is inserted through the annular inward supporting wall 23 to form the annular inward supporting wall. The metal sleeve 25 and the metal sleeve 27 are connected by screwing into the screw 26 of the metal sleeve 27 which is brought into contact with the metal sleeve 23 . Note that reference numeral 29 is a hole for rotation of the metal sleeve 27. Next, the inner surfaces of the upper plate 3 and the lower plate 4 are brought into contact with both end surfaces of the side plate-like body 5, respectively, and the bolts 3
0 and 31 to connect the upper and lower plates 3 and 4 to the side plates 5.

金属スリーブ２５，２７は接着剤を併用するこ
とが好ましい。この時、前記条件において隙間は
調整した5μmに対し、5.1μmに変化したのみで影
響はなかつた。 It is preferable to use an adhesive for the metal sleeves 25 and 27. At this time, under the above conditions, the gap only changed from the adjusted 5 μm to 5.1 μm, with no effect.

「考案の効果」本考案は、高精度を達成するために、案内軸お
よび可動体にセラミツク材を使用することを前提
とし、この場合の可動体の接合部において、板状
体の両端面部にそれぞれ金属スリーブを埋設し両
金属スリーブ間に環状内向き支持壁を介在させて
両金属スリーブを連結し、金属スリーブに他の板
状体をボルトにより螺締するようにし変位が隙間
の調整可能限界に対し、影響を及ぼさない範囲に
て使用可能とするという効果があつた。``Effect of the invention'' This invention is based on the premise that ceramic material is used for the guide shaft and the movable body in order to achieve high precision. A metal sleeve is embedded in each metal sleeve, an annular inward support wall is interposed between the two metal sleeves, and the two metal sleeves are connected, and another plate-shaped body is screwed to the metal sleeve with bolts, so that the displacement can be adjusted to the limit of the gap. However, it has the effect of allowing use within a range that does not have any adverse effects.

[Brief explanation of the drawing]

第１図は静圧空気直線案内装置の全体構成の概
要を示す正面図、第２図は静圧空気直線案内装置
の概要を示す縦断面図、第３図は第２図の要部拡
大縦断面図、第４図は側板状体の縦断面図、第５
図は側板状体の平面図、第６図は本考案の実施例
の縦断面図である。１……案内軸、２……可動体、３，５……上板
状体、側板状体（板状体の例）、２５，２７……
金属スリーブ、２３……環状内向き支持壁、２
９，３０……ボルト。 Figure 1 is a front view showing an overview of the overall configuration of the hydrostatic air linear guide device, Figure 2 is a vertical sectional view showing an overview of the static air linear guide device, and Figure 3 is an enlarged longitudinal section of the main part of Figure 2. A top view, FIG. 4 is a vertical sectional view of the side plate-like body, and FIG.
The figure is a plan view of the side plate-like body, and FIG. 6 is a longitudinal cross-sectional view of an embodiment of the present invention. 1... Guide shaft, 2... Movable body, 3, 5... Upper plate-like body, side plate-like body (example of plate-like body), 25, 27...
Metal sleeve, 23... Annular inward support wall, 2
9, 30...volts.

Claims

[Scope of utility model registration request]

In a hydrostatic air linear guide device in which a movable body is externally fitted onto a guide shaft, pressurized air is supplied from the circumferential surface of the movable body between the guide shaft outer circumferential surface and the movable body circumferential surface, and the movable body is movable. The guide shaft and the movable body are made of ceramic material, and the movable body is constructed by arranging and joining a plurality of plate-like bodies in a cylindrical shape by bringing the end face of the plate-like body into contact with the inner surface of another plate-like body, A metal sleeve is embedded in each end of the plate-shaped body, an annular inward support wall is interposed between the two metal sleeves, and the two metal sleeves are connected by screwing, and a bolt is screwed into each metal sleeve to connect the other plate-shaped body. A static pressure air linear guide device characterized by a screwed body.