JPH0357910A - Apparatus for measuring direction of normal line and measuring of direction of normal line - Google Patents

Abstract

PURPOSE:To decide the direction of a normal line of a curved surface such as a working surface of a three-dimensional work by setting a reference point on curved surface, and setting at least three measuring points in the vicinity of the reference point on the curved surface. CONSTITUTION:Such reference point setting means to set a reference point CP on a curved surface of a working surface 66a of a work 66 as a filler 41, a reference laser oscillator, a reference optical fiber, etc., are provided. At least three measuring points P are set in the vicinity of the reference point CP on the curved surface. Moreover, a laser oscillator 42A, a photodetector 42B, and distance measuring means such as a measuring optical fiber, a projecting optical fiber, a photodetecting optical fiber, etc., are provided to measure the position of a distance L, or the like of each measuring point P. Based on the position of the measuring point P, a virtual plane 65 is set including the measuring point P. A normal line direction operating part operates the direction of a normal line, for example, a normal line vector N of the virtual plane 65. The direction of a normal line at the reference point CP on the curved surface is calculated proximately as the direction of the normal line of the virtual plane 65 regulated by the measuring point P set in the vicinity of the reference point CP. Accordingly, the direction of the normal line at a predetermined position on the curved surface can be detected.

Description

DETAILED DESCRIPTION OF THE INVENTION (a). INDUSTRIAL APPLICATION FIELD The present invention relates to a normal direction measuring device and method for measuring the normal direction of a curved surface such as a machined surface of a three-dimensional workpiece. (b). Conventional technology Conventionally, in order to process a three-dimensional workpiece using a three-dimensional laser processing machine, prior to processing, an operator manually operates a torch to perform teaching, and based on the amount of movement of the torch during teaching. A machining program is created using the machine, and during machining, a torch is driven based on the machining program to machine the workpiece. Furthermore, when processing a three-dimensional workpiece using a three-dimensional laser processing machine, it is necessary to emit laser light perpendicularly to the processing surface of the workpiece. Conventionally, this adjustment was performed by the operator visually determining the normal direction of the machined surface during teaching, and adjusting the inclination angle of the torch to match that direction. (C). Problems to be Solved by the Invention However, the vR alignment that aligns the torch in the normal direction is limited to the vR of the position! It is more difficult than l1, requires skill, and has poor accuracy. Therefore, during teaching, if processing is performed based on the torch inclination angle that has been adjusted to match the normal direction by visual inspection by the worker, the laser beam emission direction will be aligned with the normal direction of the workpiece surface. It was difficult to match, and there was a disadvantage that processing efficiency decreased. In addition, vR by visual inspection
This has the disadvantage that the time required for teaching is longer than the actual machining time of the workpiece, which reduces the operating rate of the laser processing machine. In view of the above circumstances, it is an object of the present invention to provide a normal direction measuring device and a normal direction measuring method capable of determining the normal direction of a curved surface such as a machined surface of a three-dimensional workpiece. (d). Means for Solving Problems The present invention provides a reference point setting means C41.51, 57 for setting a reference point (cp) on the curved surface (66a) of the object (66).
．． 61), and the reference point (61) is provided on the curved surface (66a).
A distance measuring means (42A, 42B, 59A, 62A, 62B.
63A, 63B), and the distance measuring means (42A, 4
2B, 59A. 62A. 62B. 63A. The position ffi (L) of each measurement point (P) measured by 63B)
Based on the above, a virtual plane (65
) and set the normal direction (N) of the virtual plane (65)
It is constructed by providing a wide line direction calculation section (46) that calculates. Further, the present invention emits the reference laser beam (LB) in the direction of the reference axis (CL') to
) is provided with a reference laser beam emitting means (51, 57, 61) for setting a reference point (cp), and a measurement laser beam (LS
) on the curved surface (66a) and set the reference point (c) on the curved surface (66a).
p) Measuring laser beam emitting means (42A, 59A, 62A, 63) that sets at least three measurement points (P) in the vicinity
A) is provided to receive the measurement laser beam (LS) reflected at each measurement point (P), and to receive the measurement laser beam (LS) reflected at each measurement point (P).
) is provided with a measuring laser beam receiving means (42B.62B.63B) capable of outputting a signal corresponding to the position (L) of Measurement point (P) digit! Based on the signal corresponding to (L), a virtual plane (65) including those measurement points (P) is set, and the normal direction of the virtual plane (65) (
The normal direction calculation unit (46) is provided to calculate N). Further, the present invention provides a main body (55a) consisting of a large diameter light receiving section (55b) and a small diameter light projecting section (55c) connected to the light receiving section (55b), and the light projecting section (55c) To,
Reference laser beam (-LE) in the reference axis (CL') direction
Inject the object (66). A reference laser beam emitting means (5 pieces) is provided to set a reference point (cp) on the curved surface (66a) of
A measurement laser beam emitting means (42A) is provided for emitting a laser beam (LS) and setting at least three measurement points (P) on the curved surface (66a) near the reference point (cp), 55b), a light receiving element (55b) capable of receiving the measurement laser beam (LS) reflected at each measurement point (P) and outputting a signal corresponding to the position (L) of each measurement point (P); 42B), and the position fi! of each measurement point (P) output from the light receiving element (42B) is provided. Based on the signal corresponding to (L), a virtual plane (65) including those measurement points (P) is set, and the normal direction (N
) is provided with a normal direction calculation unit (46). Further, the present invention provides a main body (56a), and the main body (56a).
a) A reference laser oscillator (5l) that outputs a reference laser beam (LB) is provided outside, and a reference laser beam (5l) output from the reference laser oscillator (LB) is installed in the main body (56a). LB) in the direction of the reference axis (CL') to set a reference point (cp) on the curved surface (66a) of the object (66).
6 a) A measurement laser oscillator (42A) that outputs a measurement laser beam (LS) is provided outside the main body (56a).
), the measurement laser beam (LS) output from the measurement laser oscillator (42A) is emitted to the curved surface (6
6 a) At least 3 points near the reference point (cp) on
Measurement optical fiber (59A) for setting the measurement point (P)
) is provided on the main body (56a), and each measurement point (P) is provided on the main body (56a).
A light-receiving element (42B) capable of receiving the measurement laser beam (LS) reflected at and outputting a signal corresponding to the position (L) of each measurement point (P) is provided;
42B) of each measurement point (P) output from
), a normal direction calculation unit (46) sets a virtual plane (65) including the measurement points (P) and calculates the normal direction (N) of the virtual plane (65). ). Further, the present invention provides a main body (6Oa), and the main body (600a).
a) A reference laser oscillator (5 units) that outputs a reference laser beam (LB) is provided outside, and the main body (60a) is provided with:
Emitting a reference laser beam (LB) output from the reference laser oscillator (51) in the reference axis (CL') direction,
A reference optical fiber (6 pieces) for setting a reference point (cp) on the curved surface (66a) of the object (66) is provided, and the main body (
60a) A measurement laser oscillator (6 3 A) that outputs a measurement laser beam (LS) is provided outside the main body (60a).
a), the measurement laser beam (LS) output from the measurement laser oscillator (63A) is emitted to form the curved surface (63A).
6a) is provided with a light emitting optical fiber (62A) for setting at least three measurement points (P) near the reference point (cp) on the main body (60a), and at each of the measurement points (P) A light-receiving optical fiber (62B) for receiving the reflected measurement laser beam (LS) is provided, and the main body (60a)
outside. Each of the measurement points (
A light receiving element (63B) capable of outputting a signal corresponding to the position (L) of P) is provided, and the position of each measurement point (P) outputted from the light receiving element ('63B) is ! Based on the signal corresponding to I (L), a virtual plane (
65) and set the normal direction (N) of the virtual plane (65).
A normal direction calculation unit (46) is provided to calculate the normal direction calculation unit (46).

Further, the present invention emits a reference laser beam (LB) in the direction of the 5 reference axis (CL') to
a) A reference laser beam emitting means (51, 57, 61) is provided for setting a reference point CCP> on the curved surface ( 66a) in the vicinity of the reference point (cp).
Measurement laser beam modulation and emission means (42A, 59A, 62A, 63A) for setting measurement points (P) are provided. The measurement laser beam (L) reflected at each measurement point (P)
Measurement laser beam receiving means (42B, 62B) that receives light containing S) and outputs a light reception signal corresponding to the received light.
, 63B), and the measuring laser beam receiving means (42
B. The measurement laser beam (L
A noise removing means (46a, 46b) is provided for extracting and demodulating the fraction corresponding to S) and outputting a position signal corresponding to the position t(L) of each measurement point (P), 46a, 46b), a virtual plane (65) containing the measurement points (P) is set based on the position signal corresponding to the position if (L) of each of the measurement points (P), and It is configured by providing a normal direction calculation unit (46) that calculates the normal direction (N) of the plane (65). Also. The present invention emits a reference laser beam (LB) in the direction of a reference axis (CL') to
a) A reference laser beam emitting means (51, 57, 61) for setting a reference value (CP) is provided on the top, and a measurement laser beam (L
S) is injected to the reference point (66a) on the curved surface (66a).
cp) nearby it. At least three measuring laser beam emitting means (42A,
59A, 62A. 63A). Each of the measurement laser beam emitting means ('42A.59A, 62A, 63A)
Time division drive means (47a,
47c) is provided to receive the measurement laser beam (LS) reflected at the measurement point (P), and to receive the measurement laser beam (LS) reflected at the measurement point (P).
) at least three measurement laser beam receiving means (42B, 62B, 63
B) the respective measurement laser beam emitting means (42A, 59
A, 62A. 63A), and among the measurement laser beam receiving means (42B, 62B.63B),
The measurement laser beam emitting means (42A, 59A, 62A) are moved by the time division driving means (47a, 47c).
, 63A)
, 62B. 63B) one by one in time division,
The selected measuring laser beam receiving means (42B, 62
time division selection means (46c, 46c) for outputting a signal corresponding to the position (L) of the measurement point (P) only from
7c), and the time division selection means (46c.47C)
Each of the measurement laser beam receiving means (
4'2 B, 62B. Based on the signal corresponding to the position M (L) of the measurement point (P) output from 63B),
Find the positions (L) of at least three measurement points (P), set a virtual plane (65) containing the measurement points (P), and calculate the normal and line direction (N) of the virtual plane (65). It is configured by providing a normal direction calculation unit (46) for calculation.

The present invention also provides reference point setting means (41, 6, 57,
61) and distance measuring means (42A.42B, 59A.62A
, 62B, 63A. 63B), and the reference point setting means (41, 5L, 57, 6l) sets the target object (66).
A reference point (cp) is set on the curved surface (66a) of . The distance measuring means (42A, 42B, 59A, 62A. 62B, 6
3A, 63B), set at least three measurement points (P) near the reference point (CP) on the curved surface (66a), and measure the position (L) of each measurement point (P). , based on the measured position (L) of each measurement point (P).
Set a virtual plane (65) including those measurement points (P),
The normal direction (N) of the M virtual plane (65) is calculated, and the calculated normal direction is set as the normal direction of the reference point.
t be threatened. Note that the numbers in parentheses are for convenience and indicate corresponding elements in the drawings, and therefore, this description is not limited to the descriptions on the drawings. The following r(e). The same applies to the column "Effect".

(e). Effect With the above-described configuration, the curved surface (66a) of the object (66)
The normal direction at the reference point (cp) is . Reference point (cp)
A virtual plane (6
5) is approximately calculated as the normal direction (N).

(f). Embodiments Hereinafter, embodiments of the present invention will be explained based on the drawings. The 3rd construction drawing is a front view showing an example of a teaching device to which the normal direction measuring device and the normal direction measuring method according to the present invention are applied, M2 is a perspective view showing an example of a three-dimensional laser processing machine, @ is an enlarged view of the torch portion of the laser processing machine shown in Fig. 2, Fig. 4 is a view showing an example of the normal direction measuring device according to the present invention, and Fig. 5 is the normal direction shown in Fig. 4. The bottom view of the measuring device, Figure M6 is a block diagram showing an example of the M control device of the teaching device, Figure 7 is a schematic diagram for determining the rotation angle of the torch and the rotating torch, and Figure 8 is the control device of the teaching device. 9 is a diagram showing another example of the normal direction measuring device according to the present invention. FIG. 10 is a bottom view of the normal direction measuring device shown in FIG. 11 is a diagram showing another example of the normal direction measuring device according to the present invention, FIG. 12 is a bottom view of the normal direction measuring device shown in FIG. 11, and FIG. 13 is a diagram showing another example of the normal direction measuring device according to the present invention. 14 is a bottom view of the normal direction measuring device shown in FIG. 13; FIG. 15 is a diagram showing another example of the normal direction measuring device according to the present invention; Fig. 16 is a bottom view of the normal direction measuring device shown in Fig. 15, Fig. 17 is a diagram showing the principle of distance measurement in the normal direction measuring device shown in Fig. 15 and Fig. 16 @, The figure is a block diagram showing another example of the control device of the teaching device. As shown in FIG. 2, the laser processing machine 1 has a machine body 2, in which a table 3 is driven to move in the directions of arrows A and B, which are the xm directions, by a driving motor 5 and a ball screw 6. It is set up freely. The fuselage 2 is provided with a gate-shaped column 7 that straddles the table 3, and the column 7 has a saddle 9. Drive motor 10. The arrow C. which is the Y-axis direction is drawn by the ball screw 1. It is provided so as to be movable in the D direction.

A processing head 12 is mounted on the saddle 9, and a silver motor 13. The ball screw 5 moves the arrow E. F
It is provided so that it can be freely moved and driven in the direction.

As shown in FIG. 3, at the tip of the processing head 12, the body 17 of the rotating torch 16 is rotated by the positioning motor 9 around the rotation axis RA parallel to the two axes. It is provided so as to be rotatable in the H direction.

An optical path 17b composed of two reflecting mirrors L7c is formed in the body L7, and the optical path 17b is composed of two reflecting mirrors L7c.
At the tip of the torch section 2o, a positioning motor 2 connects a rotary shaft RB inclined at 45 degrees with respect to the rotary shaft RA.
Surrounding arrow I. It is installed so that it can be rotated freely in the J direction. A tip 20a is attached to the tip of the torch section 20. The central axis CL of the chip 20a is inclined at 45 degrees with respect to the rotation axis RB. Furthermore, inside the torch section 2.0, there is the optical path 17b in the body L7 described above and the chip 20.
An optical path 20 consisting of two reflecting mirrors 20b connected to a
c is formed. On the other hand, the teaching device 22 is installed outside the movable range of the rotating torch 16 of the laser processing machine 1, that is, outside the processing range of the laser processing machine 1, and the teaching device 22
As shown in FIG. 1, the base 23 has a base 23 extending in a direction perpendicular to the plane of the drawing. base 23
A traveling frame 25 is supported above the base 23 so as to be movable in the X'-axis direction, which is perpendicular to the plane of the paper.
The traveling frame 25 is provided with an L-shaped arm 26. A saddle 27 is attached to the arm 26 with an arrow C'. The saddle 27 is supported movably in the D' direction, and a telescoping arm 29 is further attached to the saddle 27 in the 2' axial direction (in addition,
x' mentioned above. The y' + z'' axes constitute an orthogonal coordinate system.) It is supported movably in the directions of arrows E' and F'. A dummy rotating torch 30 having the same external dimensions as the attached rotating torch 6 is provided, and the dummy rotating torch 3o has the same structure as the rotating torch 16 at least in the structure of its movable part (i.e., The dummy rotating torch 30 and the rotating torch 16 have the same movable function.) That is, the fuselage 1 corresponding to the fuselage engineer 7
7' is an arrow G' around the rotation axis RA' parallel to the Z' axis.
Rotated Nw by the positioning motor 19' in the H' direction.
The torch section 20' corresponding to the arch section 20 is arranged at an angle of 45 mm with respect to the rotation axis R A'.
@Arrow work around the tilted rotation axis RB'', in the J' direction,
It is provided so that it can be rotated freely by a positioning motor 21'. The torch portion 20' has a swing 1 heave L.
A normal direction measuring device 40 corresponding to the chip 20a of No. 6 is provided. Then, the normal direction measuring device 40
As shown in the drawings and FIG. 5, it has a main body 40a, and the main body 40a is provided with a conical filler 4l that defines a reference axis and a reference point during teaching. That is, the center axis of the filler 41 inclined at 45 degrees with respect to the rotation axis RB'' shown in FIG. 1 becomes the reference axis CL', and the tip of the filler 41 provided on the reference axis CL' shown in FIG. becomes the reference point CP. Since the reference point CP is provided at the intersection of the rotation axis RA' and the rotation axis RB', the rotation of the body 17' in the arrow G' and H' directions or the torch The position of the reference point CP does not change due to the rotation of the portion 20' in the direction of the arrow J'.In addition, the reference plane PL on the main body 40a is perpendicular to the reference axis CL', and the reference point CP is perpendicular to the reference axis CL'.
On a plane parallel to the reference plane PL of the main body 40, there are three laser oscillators 4 such as semiconductor lasers on the same radius r from the reference axis CL'.
2Ai. 42A, 42A3 are provided at predetermined angular intervals so as to be able to emit the laser beam LS in parallel to the reference axis CL'. In addition, three light receiving elements 42B1, 42B2, 42B, such as position detection elements (PSD), are arranged on the same radius from the reference axis CL' on a plane parallel to the reference plane PL as the laser oscillator 42A. Each laser oscillator 42A, 42A, . It is provided in a form corresponding to 42A. Each light receiving element 42B has a light receiving surface 42b.
is provided, and each light receiving element 42B is provided with the light receiving surface 4.
When light is received at 2b, a signal corresponding to the position of the received light in the direction of the arrow LR on the light-receiving surface 42b, that is, on the line of intersection between the radiation surface and the light-receiving surface 42b centered on the reference axis CL' is output. You can. And each light receiving element 4
A condenser lens 43 is provided at the bottom of 2B in FIG. Also, as shown in Figure 1. The saddle 27 has an arrow C'. The arrow E'' of the encoder 31 and the telescopic arm 29 that can detect the amount of movement in the D' direction
, F'' directions, and the dummy rotating torch 30 is also provided with an encoder 32 that can detect the amount of movement in the directions of arrows G', H' and arrow I of the dummy rotating torch 30.
'． Encoders 33 and 35 are provided that can detect the amount of rotation angle in the J' direction. Further, the running frame 25 is provided with an encoder 34 that detects the amount of movement of the running frame 25 in a direction perpendicular to the paper surface. Also. The teaching device 22 is as shown in FIG. A main control section 45 is provided. 45 includes a machining program generation device 36, a machining program memory 37, and a normal direction measuring device control unit 47 via a bus i45a.
, egg movement control unit 49, etc. are connected. The normal direction measuring device control section 47 includes drivers 47a, 47a,
．． The respective laser oscillators 42A, 42A2, 42A,
are connected to each other. Further, a normal direction calculation unit 46 is connected to the normal direction measurement device control unit 47, and the normal direction calculation unit 46 includes demodulators 46b■, 46b2, 46
b,. Bandpass filters 46a, . 46a2, 46
a, to each of the light receiving elements 42B, 42B, 42
B, are connected to each other. Also. 1! Dynamic control section 49
is the positioning motor 9'. 21' is connected, and encoders 31, 32, 33, and 34, 35 are connected to the machining program generator 136. Also, lordship. In the control section 45, the laser processing machine is connected to the communication line 44.
It is connected via. Since the laser processing machine 1 and the teaching device 22 have the above-described configurations, when teaching the processing program related to the laser processing machine 1 using the teaching device 22, the teaching area 39 indicated by diagonal lines in the first engineering drawing is A three-dimensional workpiece 66 to be processed is set up, and in this state, the operator moves the dummy rotating torch 30 of the teaching device 22 according to the actual processing, thereby performing a teaching operation. Note that x of the teaching device 22
The 'y'z' coordinate system corresponds to the XYz coordinate system of the laser processing machine. Therefore, the traveling frame 25 can move relative to the base 23 in a direction perpendicular to the plane of the paper, but this is due to the arrow A on the table 3 in the laser processing machine 1.
Corresponds to movement in the B direction. Further, the movement of the saddle 27 relative to the arm 26 in the directions of arrows C' and D' corresponds to the movement of the saddle 9 relative to the column 7 of the laser processing machine I in the directions indicated by the arrows C' and D'. Corresponds to movement in the D direction. Furthermore, the arrow E' of the telescopic arm 29
．． The movement in the F' direction corresponds to the movement of the processing head 12 in the laser beam machine 1 in the directions of arrows E and F. Also, the rotation axis RA' of the teaching device 22. RB' corresponds to the rotation axes RA and RB of the laser processing machine l, respectively, so
Arrow G' on the body 17' of the dummy rotating torch 30. H'
The direction of rotation is determined by the arrow G. on the body l7 of the rotating torch 16. H
Corresponding to the rotation in the direction, the arrow I' . J
The rotation in the direction indicated by the arrow I. Corresponds to rotation in the J direction. Further, the reference axis CL' of the normal direction measuring device 40 of the teaching device 22 corresponds to the central axis CL of the chip 20a of the laser processing machine 1.

When the operator performs a simulated machining operation, the operator manually operates the normal direction measuring device 40 and places the tip of the filler 4l of the normal direction measuring device 40 on the machining surface of the workpiece 66.
6a and moved so that the reference point CP at the tip of the filler 41 traces the position to be irradiated with laser light when processing the workpiece 66. At this time, the normal direction calculation unit 46 calculates the reference point CP moving on the processing surface 66a.
The drive control section 49 actively controls the positioning motor 19'. The torch portion 20'' is appropriately rotated in the directions of arrows G', H' and I', J'', respectively, and the reference axis CL' of the filler 41 of the normal direction measuring device M40 is
is made to coincide with the normal direction on the processing surface 66a at the reference point CP.

In other words, the normal direction measuring device 40 has an orthogonal coordinate system xy
has a z coordinate system, and the xyz coordinate system has a reference point cp
is the origin 0 (0.O.O), the reference axis CL' is the two axes, and the X-axis is set on the plane defined by the reference axis CL' and the rotation axis RB'. That is, since the rotation axis RB' is inclined at 45 degrees with respect to the reference axis CL', the equation of the straight line of the rotation axis RB' in the xyz coordinate system is x=z, y=0? expressed. As shown in FIGS. 4 and 6, the normal direction measuring device control section 47 of the normal direction measuring device 40 controls the driver 4.
7a■. 47a. , 47a,, strange? Vessel 47b■, 47b
2, 47b, from each laser oscillator 42A1, 42A, 42A, provided in the main body 40a (only laser oscillators 42Ad and 42A2 are shown in FIG. 4). The light is emitted parallel to the reference axis CL' to the surface 66a. At this time, each modulator 4 7
b1.47b2, 47b, each laser oscillator 4
2A, 42A, 2.42A, modulation of different frequencies is applied to each laser oscillator 42A, 42A.
、． The laser beams LS, LS, . Inject LS. Then, the laser beams LS, LS, LS, are processed on the processed surface 66a.
The reflected laser beams LS2, LS, which are diffusely reflected at each measurement point P2, P, on the top, are sent to the light receiving surface 4 of each light receiving element 42B, 42B2, 42B, by each condenser lens 43.
Each light receiving element 42B1.42B1 is focused on 2b.
The light is received at 42B. And each light receiving element 42B■,
42B,, 42B, are the received laser beams LS, LS
2. Where is the focal point in the direction of arrow LR on the light receiving surface 42b of LS? A voltage signal corresponding to the band pass filter 46 a
1. 4 6 a,, 4 6 a,, demodulator 46b,
, 46b2, 46b, to the normal direction calculation unit 46. At this time, a frequency component corresponding to the laser beam LSX emitted from the laser oscillator 42A1 after being modulated in a predetermined manner by the bandpass filter 46a is selected from among the voltage signals output from the light receiving element 42B. The voltage signal is taken out, further demodulated by the demodulator 46b, and outputted to the normal direction calculation unit 466. In addition, the voltage signals output from the light receiving elements 42B2, 42B are similarly processed for each bandpass. Filters 46a2, 46a3
, each laser oscillator 42A, . 42A, each laser beam LS is emitted with a predetermined modulation applied thereto.
, , LS, are extracted and outputted to the normal direction calculation unit 46 . Therefore, even if each light-receiving element 42B receives the laser beam LS emitted from the laser oscillator 42A that does not correspond to the light-receiving element 42B, or receives natural light, the normal direction calculation unit 46 calculates ? Only a voltage signal corresponding to the laser beam LS emitted from the laser oscillator 42A corresponding to the light receiving element 42B, that is, a voltage signal corresponding to the distance L to each measurement point P is output. Then, the normal direction calculation section 46 calculates each of the light receiving elements 42B, 42B, . 42B, to bandpass filter 46a■. 46a2.46a,, demodulator 46b, .
46b2, 46b, each measuring point P1, P, . The distance to P, L, L2, L
Find .

Next, the normal direction calculation unit 46 calculates the measured distance aLt.
．． L., LJI et al. at each measurement point Pi.L. P2. P, x
Calculate coordinates in the yz coordinate system. That is, each measurement point P
E, P2, P, X3! The target and y coordinates are the same as the x and y coordinates of the laser oscillators 42A1, 42A2, 42A, respectively, and are set in advance, so
2. By finding the two coordinates of P1 from the difference between the measured distance L2, L, and the distance 1tl r- a of the reference plane PL from the reference point CP, x of each measurement point P1, P2, P, ．．
y. The z coordinate is calculated. Then, the normal direction calculation unit 46
Since a virtual plane 65 including three points P, P2, and P is defined, the normal vector N of the virtual plane 65 is determined by each measurement point P, P2, and P2. P, x. Determine from the y and z coordinates. That is,
The coordinates of each measurement point P are P 1 = (X 1 % yz . Z 1) Pz
= (X2,'!2,Z2) P x = (X 3 - :/ 3 - Z
By calculating s), Ax+By+Cz+D=0 (A.B.C.D are constants.) is obtained. The normal vector N of the virtual plane 65 is N= (A.B.C)? 2+B"+C"=1, so it is assumed that the direction of the normal vector N of the virtual plane 65 coincides with the normal direction of the reference point CP on the processing surface 66a. Measurement point P■,
Since P2, P, are set near the reference point CP, the direction of the normal vector N of the virtual plane 65 and the actual normal direction at the reference point CP on the processing surface 66a do not deviate greatly.

Next, the normal direction calculation unit 46 moves the torch 20' to the arrow direction.
an angle α at which the body 17' should be rotated in the direction of arrow J' (this may also be an angle at which it should be rotated in the direction of arrow J') and an angle β at which the body 17' should be rotated in the direction of arrow G' (or an angle at which it should be rotated in the direction of arrow H').

) is calculated.

first. The normal vector N calculated in the xyz coordinate system is expressed as x'y' in the orthogonal coordinate system shown in FIG.
Coordinate transformation to z' coordinate system. The x'y2' coordinate system has the reference point cp as the origin ○ (0, 0, O), and the extension line of the rotation axis RA' as the Z' axis (therefore, the 2' axis direction coincides with the Z'' axis direction). ), and the rotational axis RA' and rotational axis RB'
The X' axis is set on the plane defined by . Therefore, the equation of the straight line of the rotation axis RB' in the x'y'z' coordinate system is expressed as x' = z', y' = 0. Then, the reference axis C of the normal direction measuring device 40
L' is in the 2' axis direction (therefore, the reference axis CL
When the reference axis CL' used to calculate the normal vector N is rotated by an angle θ in the direction of the arrow I' around the rotation axis RB', Assume that the normal vector N is *X'y'
In the z' coordinate system, N= (A',B'.C')A'''
It is assumed that +B'``+C'''=1. Next, the reference axis CL' and the rotation axis R of the normal direction measuring device 40 are
The angle formed by the extension line of A' (i.e. z' axis) is the angle η (=
torch 20' which is the same as arccos C'')
Find the rotation angle α in the direction of arrow I' around the rotation axis RB'. That is, when the torch 20' rotates in the direction of the arrow I'J', the tip S0 of the unit vector S on the reference axis CL' moves to the point ○' ( 1/2, 0.1/2). Then, when the tip S0 of the unit vector S moves to the position of point Se, if the angle formed by the unit vector S and the 2' axis becomes the angle η, then move the tip S0 of the unit vector S to the point S1. When the angle is the arrow I of the torch 20'
is the rotation angle α in the ′ direction. Then, a point S. is located on the rotation axis RA'. (0.O, 1) and calculate the rotation angle α by applying the cosine law to triangle OSIS and triangle O″S S2, a = arccos ( 2cosη
-1) 10 = arccos (2 C' - 1) 10. Furthermore, the rotation angle β of the body 17' around the rotation axis RA' in the direction of the arrow G' such that the reference axis CL' coincides with the direction of the normal vector N is determined. Since the rotation angle β is equal to the circumferential angle between the point S1 and the tip N0 of the normal vector N with respect to the rotation axis RA', the rotation angle β is as follows.

Next, the normal direction calculation unit 46 calculates the calculated rotation angle α
, β are output to the decommissioning control section 49. The drive control section 49 is
Based on the rotation angles α and β, the positioning motor 21',
19' is cantered to rotate the torch 20' of the dummy rotating torch 30 by an angle α in the direction of the arrow ', and
Rotate the body 17' by an angle β in the direction of arrow G'. Then... x' of the reference point cp at the tip of the filler 41 of the normal direction measuring device 40. The direction of the reference axis CL' of the filler 41 coincides with the direction of the normal vector N calculated by the normal direction calculation section 46 without changing the position of the y'z' coordinates. Therefore, the operator manually moves the normal direction measuring device 40 to arrow A.
'', B'' direction, arrow C'. D' direction or arrow E'
Move the filler 4l in the F' direction to the reference point CP at the tip of the filler 4l.
When the operator traces the machined surface 66a of the workpiece 66, the reference axis CL of the filler 41 of the normal direction measuring device 40 is Since the drive is controlled so that the direction of ' is coincident with the normal direction, the operator can move the normal direction measuring device 40 to /! There is no need to adjust the i1 oblique angle to vR, and it is only necessary to adjust the position of the reference point CP at the tip of the filler 4l. Therefore, teaching work can be performed accurately in a short time.

The amount of movement of the traveling frame 25, saddle 27, telescopic arm 29, and dummy rotating torch 30 by the operator or the positioning motor 9'21' is determined by each encoder 34.31.
．． It is detected at 32, 33, and 35 and output to the machining program generation device 36. The machining program generation device 36 generates a machining program PRO corresponding to the simulated machining operation based on these detected values, and stores it in the machining program memory 3.
Store it in 7. The machining program PRO created in this way and stored in the machining program memory 37 is transferred online to the laser processing machine 1 via the main control unit 45, and the laser processing machine 1 performs machining based on the machining program PR○. can be executed immediately. Note that processing by the laser processing machine 1 is performed with the workpiece to be machined, which has been taught, such as the workpiece 66, mounted on the table 3, and the table 3 is moved by the thigh movement motor 5 in the direction indicated by the arrow A. The drive motor 10 moves the saddle 9 in the direction of arrows C and D, and the drive motor 13 moves the processing head l2 in the direction of arrow E. F
By driving the rotating torch 1 in the direction and further by driving the positioning motor 19 shown in FIG.
6's body l7 with arrow G. Rotate in the H direction, and
By driving the positioning motor 21, the torch section 2
This is done by rotating the 0 in the directions of arrows I and J. Then, the laser beam is transmitted from the processing head l2 through the optical path 17b in the rotating torch 16 to the optical path 20 in the torch section 20.
c, from the chip 20a to the machining surface 66a of the workpiece 66.
The laser beam is injected toward the center axis CL of the tip 20a in a direction that coincides with the central axis CL of the tip 20a, that is, in the normal direction of each processing portion determined at the time of teaching, that is, perpendicular to the processing surface 66a, and predetermined processing is performed.

In the above-described embodiment, each modulator 47b modulates the power supply of each laser oscillator 42A with a different frequency, and each laser oscillator 42A emits laser light LS with different amplitude modulation. Then, the laser beam LS is filtered by each bandpass filter 46a.
The laser oscillator 42 corresponding to the light receiving element 42B is selected from among the voltage signals output from each light receiving element 42B that has received the light.
Laser light L emitted from A and subjected to predetermined modulation
When removing the influence of the laser beam LS emitted from the laser oscillator 42A that does not correspond to the light receiving element 42B among the laser beams LS received by each light receiving element 42B by extracting the precept voltage signal corresponding to S. However, the laser oscillator 4 that does not correspond to each light receiving element 42B
Is it 2A? In order to remove the influence of the emitted laser beam LS, three measurement points P. , P2, P, from the reference plane PL can also be measured without measuring the distances L2, L2, L, from the reference plane PL at the same time, by staggering the respective measurement times, that is, measuring them in a time-sharing manner. That is, a signal switch 47c is connected to the normal direction measuring device control section 47 of the teaching device 22 shown in FIG. 8, and the signal switch 47c is connected to the drivers 47a, . Each laser oscillator 42A, 42A2, 42A, is connected via 47a, 47a. Further, a normal direction calculation unit 46 is connected to the normal direction measurement device control unit 47, a multiplexer 46c is connected to the normal direction calculation unit 46, and each of the light receiving units is connected to the multiplexer 46c. Element 42B 42B2, 42B
, are connected. The normal direction calculation unit 46 and the multiplexer 46c include the signal switching unit 47.
c is connected. Then, each measurement point p1, p. The basis of ,P,? When measuring the distance \VIL■, L2, L, from the plane PL, first,
Measure only the distance L1 from measurement point Pe. That is, the normal direction measuring device control section 47 outputs a signal to the multiplexer 46c via the signal switch 47c to the effect that the normal direction calculation section 46 should be connected to the light receiving element 42B, and
A signal indicating that the laser beam LS should be emitted is output to the driver 47a of the laser oscillator 42A. Then, 3
Of the three light-receiving elements 42B, only the light-receiving element 42B is connected to the normal direction calculation unit 46 via a multiplexer 46c, and among the three laser oscillators 42A, only the laser oscillator 42A emit laser light. LS is the reference axis CL'
The beam is emitted parallel to and irradiated to measurement point P1. and,
The light receiving element 42B receives the laser beam LS diffusely reflected at the measurement point P shown in FIG. The light receiving element 42 sends a voltage signal corresponding to the distance L to the normal direction calculation unit 46.
B. Only the normal direction calculation unit 46 is outputted via the multiplexer 46c connected to the normal direction calculation unit 46. Then, the normal direction calculation unit 4
Step 6 calculates the distance Le of the measurement point Pe based on the voltage signal output from the light receiving element 42B1. At this time, the laser beam LS may be received by the light receiving elements 42B, 42B other than the light receiving element 42B, but the voltage signal from each of the light receiving elements 42B2, 42B is blocked by the multiplexer 46c and becomes inactive. It is not input to the linear direction calculation unit 46, and the light receiving element 42B is
Since the laser beams LS output from the laser oscillators 42A2, 42A, which do not correspond to 2B are not received, the distance lL. Only the voltage signal corresponding to
6, the distance WtLt of the measurement point P is accurately measured. Next, the measurement point P. Measure the distance L2 of the measurement point P2 in the same way as in the case of . That is, the normal direction measuring device control unit 47 causes the laser beam LS to be emitted only from the laser oscillator 42A2 via the signal switch 47c, and also causes the multiplexer 46c to emit the laser beam LS from the light receiving element 4.
Only 2B2 is connected to the normal direction calculation section 46. and.
Only the voltage signal corresponding to iaLz outputted from the light receiving element 42B2 that received the laser beam LS reflected at the measurement point P2 is input to the normal direction calculation unit 46, so that the distance lmLa of the measurement point P2 can be accurately determined. It is measured. Next, the distance gt Ls of the measurement point P is measured in the same manner as in the case of the measurement point P and measurement point P2 described above. That is, the normal direction measuring device control unit 47 causes only the laser oscillator 42A to emit the laser beam LS via the signal switch 47c, and also causes the laser beam LS to be emitted only from the laser oscillator 42A. The light receiving element 4 is connected by the multiplexer 46c.
2B, is connected to the normal direction calculation unit 46. and,
Only the voltage signal corresponding to the distance 11ir-s outputted from the light receiving element 42B3 which received the laser beam LS reflected at the measurement point P is input to the normal direction calculation unit 46. The distance L, between atq fixed point P, is accurately measured.
Therefore, each measurement point Pe, P2. By measuring the distances L, , L2, and L3 of P from the reference plane PL in a time-divided manner and removing the influence of the plurality of laser oscillators 42A. Each distance mL, L2, and L3 can be accurately measured.

Moreover, each measurement point pL by applying modulation to the above-mentioned laser beam LS. Measurement of distance L, L2,L, of p,,P, and distance L. of each measurement point P,P2,P, by time division.
．． L2. It is also possible to perform the measurements of L, in combination.

That is, a signal switch 47c is connected to the normal direction measuring device control section 47 of the teaching device 22 shown in FIG.
7a2, 4 7 a, . Modulators 47b, 47b, 47b
via each laser oscillator 42A, 42A2, 42A,
is connected. Further, a normal direction calculation unit 46 is connected to the normal direction measurement device control unit 47, and a multiplexer 46c is connected to the normal direction calculation unit 46 via a demodulator 46b and a bandpass filter 46a. Furthermore, the multiplexer 46c has respective light receiving elements 42B, . 42B
2, 42B3 is connected. The signal switch 47c is connected to the normal direction calculation section 46 and the multiplexer 46c. And each laser oscillator 42A and each photodetector? 42B, the distance m L . of each measurement point P, P2, P, from the reference plane PL. , L2, and L, first measure only the distance L of the measurement point P■.

That is, the normal direction measuring device control section 47 controls the signal switching device 47.
The light receiving element 4 is connected to the multiplexer 46c via the
2B and the driver 47a of the laser oscillator 42A.
A signal to the effect that the laser beam LS should be emitted is outputted to (2). Then, among the three light receiving elements 42B, only the light receiving element 42B is connected to the normal direction calculation unit 46 via the multiplexer 46c, the bandpass filter 46a, and the demodulator 46b.
is connected to. Moreover, among the three laser oscillators 42A,
A driving current is supplied only to the laser oscillator 42A1 via the driver 47a and the modulator 47b, and frequency modulation is applied to the drive current, so that the laser oscillator 42A1
A laser beam LS is emitted from the center parallel to the reference axis CL' with a predetermined amplitude modulation applied thereto, and is irradiated onto the measurement point Pe.

The light receiving element 42B is shown in FIG. The laser beam LS diffusely reflected at the fixed point P■ is received, and a voltage signal, etc. corresponding to the distance JIiL L is sent to the normal direction calculation unit 46, and only the light receiving element 42B■ is passed through the bandpass filter 46a.
, a demodulator 46b and a multiplexer 46c connected to the normal direction calculation unit 46. Then, the normal direction calculation unit 46 calculates the distance L1 of the measurement point Pe based on the voltage signal output from the light receiving element 42Be. At this time, the light receiving element 42B2 other than the light receiving element 42B1,
42B, when the laser beam LS is received at the respective light receiving elements 42B2, 42B, the voltage signals from the respective light receiving elements 42B2, 42B are blocked at the multiplexer 46c and sent to the normal direction calculation section 46.
The light receiving element 42B1 is not input to the laser oscillator 42A2, 42 which does not correspond to the light receiving element 42B1.
Even if the light receiving element 42B does not receive the laser beam LS output from A, and furthermore, the light receiving element 42B receives unmodulated natural light or some kind of modulated electric light light, the light receiving element 42B From the voltage signal output from the element 42B1, a voltage signal corresponding to the laser beam LS subjected to a predetermined modulation is extracted by the bandpass filter 46a, and further demodulated by the demodulator 46b to obtain the distance IL. Since only the voltage signal corresponding to point P is output to the normal direction calculation unit 46, the distance of the measurement point P
11 Lz is measured accurately. Next, in the same manner as in the case of the measurement point Pd described above, the measurement point P
Measure the distance 'era L 2 of 2. That is, the normal direction measuring device control section 47 includes a signal switch 47c, a driver 47
a2, via the modulator 47b, supplying a hidden current with a predetermined frequency modulation applied only to the laser oscillator 42A2 to emit a laser beam LS with a predetermined modulation from only the laser oscillator 42A2, and multiplexer 46c , only the light receiving element 42B2 is filtered by the bandpass filter 46a.
, are connected to the normal direction calculation unit 46 via a demodulator 46b.

In this case, the modulation applied to the laser beam LS is natural light,
Since the purpose is to eliminate the influence of electric lights, etc.
The modulation frequency applied to the power supply of the laser oscillator 42A2 is
It may be the same frequency as the modulation frequency applied to the power supply of the laser oscillator 42A described above. Then, the laser beam LS is subjected to a predetermined modulation from among the voltage signals output from the light receiving element 42B2 that received the laser beam LS reflected at the measurement point P2.
A voltage signal corresponding to the distance L2 is extracted, and only the voltage signal corresponding to the distance L2 is inputted to the normal direction calculation section 46,
The distance L2 of the measurement point P2 is accurately measured.

Next, the distance L of the measurement point P3 is measured in the same manner as in the case of the measurement point Pd and the measurement point P2 described above. That is, the normal direction measuring device control unit 47 causes the laser beam LS modulated by the modulator 47b to be emitted only from the laser oscillator 42A via the signal switch 47c, and
A multiplexer 46c connects only the light receiving element 42B to the normal direction calculation unit 46 via a band pass filter 46a and a demodulator 46b. In this case as well, the frequency of modulation applied to the power supply of the laser oscillator 42A3 may be the same frequency as the frequency of modulation applied to the power supply of the laser oscillators 42A and 42A2. Then, a voltage signal corresponding to the laser beam LS subjected to a predetermined modulation is extracted from among the voltage signals output from the light receiving element 42B that received the laser beam LS reflected at the measurement point P3, and a voltage signal corresponding to the laser beam LS subjected to a predetermined modulation is extracted.
Only the voltage signal corresponding to . is input to the normal direction calculation section 46. The distance L between the measurement point P and the measurement point P can be accurately measured.

Therefore, the distances L, L2, and L of the measurement points P, P2, and P3 from the reference plane PL are time-divided to remove the influence of the plurality of laser oscillators 42A, and further, L/-
By modulating the light LS to remove the influence of natural light, electric light, etc., each distance HL, L2, and L can be accurately measured. Furthermore, in the above embodiment, the teaching device 22
Although we have described the case where the laser processing machine 1 is provided separately and independently from the laser processing machine, it is also possible to install a normal direction measuring device 40 etc. on the laser processing machine 1 and perform teaching work on the laser processing machine. Of course, it is also possible to do so. In addition, the normal direction measuring device 40 is connected to the positioning motor 19'.
．． 21', the rotation angle is detected by encoders 33 and 35, and the machining program PRO is executed.
As described above, the normal direction calculation unit 46
The rotation angles α and β calculated by
0 does not need to be rotated. ) Machining program PR
Of course, it is also possible to create ○. In addition, in the above embodiment, the normal direction measuring device 40
We have described the case in which the filler 41 is provided at the base point CP and the reference point CP is mechanically set.
A non-contact sensor or the like may be used, such as the normal direction measuring device 50 shown in the figure. Note that among the components of the normal direction measuring device 50, the same components as the normal direction measuring device 40 include:
The same subtitles will be given and the explanation will be omitted. That is, the normal direction measuring device 50 has a substantially cylindrical main body 50a, and the main body 50a is connected to the tip of the torch section 20'.
And, on the main body 50a, at the bottom of FIG. 9, the book? #5
A laser beam entrance surface 50b is formed perpendicular to the central axis of 0a, that is, the reference axis CL', and further, below the laser beam entrance surface 50b in the figure, a laser beam perpendicular to the reference axis CL' is formed. An exit surface 50c is formed. In the center of FIG. 0 of the laser beam emitting surface 50c, there is a lower part of FIG. 9.
A substantially conical tip 50d is fixed. Also, the main body 5
On the reference axis CL' inside 0a. A reference laser oscillator 5 such as a semiconductor laser is provided in such a manner that it can emit a reference laser beam LB, which is a visible light, in the direction of the reference axis CL'. On the lower reference axis CL', an optical path 51a is formed to pass through the main body 50a and the tip 50d, and at the tip of the optical path 51a, a reference light beam emitting part 5lb is opened downward in the figure.
is in great shape. Also, above the laser beam emitting surface 50c inside the main body 50a in the drawing, there are three laser oscillators 42A, such as semiconductor lasers, . 42A,. 42A3 is the first
As shown in FIG. 0, they are provided on a plane perpendicular to the reference axis CL', on the same radius from the reference axis CL', at equal angular intervals, that is, at 120' intervals with respect to the reference axis CL'. Each of the laser oscillators 42A has an emission part 42a at the lower end of FIG. It is arranged around the injection part 5lb. Each laser oscillator 42A is connected to the emission section 42A.
The laser beam LS can be emitted from a to the reference axis CL' for parallel measurement. Further, a reference plane PL is defined by each of the injection portions 42a. As shown in FIG.
2A 42A2, 42A3 and the respective injection portions 4 in the same radial direction with respect to the reference axis CAL', that is, at 120° intervals.
2a, and are provided on the same radius from the reference axis CL'. Inside the main body 50a of each bandpass filter 53 in the upper part of FIG. 9, there is a reflection #!
The optical path 52a constituted by 52 is shaped,
A condensing lens 43 is provided on the optical path 52a. Above each condensing lens 43 in FIG.
As shown in Figure O, each of the laser oscillators 42A, 42
As shown in FIG. 9, the light receiving surfaces 42b are moved toward the optical path 52a side, that is, downward in the figure, in the same radial direction with respect to the reference axis CL', 42A, and 42A, that is, at intervals of 120@. It is set up in a direction. Further, similarly to the normal direction measuring device 40 described above, each of the laser oscillators 42A includes:
Each modulator 47b or each driver 47a shown in FIG. 6, FIG. 8, or FIG.
Each bandpass filter 46a or multiplexer 46c shown in FIG. 6, FIG. 8, or FIG. 18 is connected to E. Since the normal direction measuring device 50 has the above structure, the normal direction measuring device 50 is
To measure the normal direction on the processing surface 66a of the workpiece 66, the operator operates the teaching device 22 to move the normal direction measuring device 50 provided at the tip of the torch section 20' over the processing surface 66a. and the normal direction measuring device 5
0 from the reference laser oscillator 5, and the optical path 51a
The reference laser beam LB is emitted from the reference beam emitting unit 5lb through the reference beam emitting unit 5lb in a manner consistent with the reference axis CL'.
Irradiate the specified position where the normal direction of a is to be determined. That is, as shown in FIG. 9, the reference laser oscillator 51
A point on the processing surface 66a that is irradiated with the reference laser beam LB emitted from the reference point CP is defined as a reference point CP. Then, from each laser oscillator 42A, the measurement laser beam LS is emitted from the reference axis C.
When injected onto the processing surface 66a parallel to L', the processing surface 66
The measurement laser beam LS diffusely reflected at each measurement point P near the reference point CP on point a is . Each bandpass filter 53
The light other than the measurement laser light LS of a predetermined frequency is removed and enters the optical path 52a. Then, the measurement laser beam LS passes through the optical path 52a and passes through the condenser lens 4.
3, the light is focused on the light receiving surface 42b of each light receiving element 42B.
Above, the light is received in such a way that it is focused at a position in the direction of the arrow LR corresponding to the distance L from the reference plane PL to the measurement point P. Then, as in the case of the normal direction measuring device 40 described above, a signal corresponding to the focal position on the light receiving surface 42b of the received measurement laser beam LS is output from each light receiving element 42B to the normal direction calculation unit 46. Then, the position of each measurement point P is determined in the normal direction calculation unit 46. A virtual plane 65 is defined by each measurement point P, and by calculating the normal vector N of the virtual plane 65, the normal direction at the reference point CP on the processing surface 66a is determined. In addition, in the normal direction measuring device, if the measurement laser beam LS emitted from each laser oscillator 42A and reflected at each measurement point P on the processing surface 66a can be received by each light receiving element 42B, the laser The arrangement of the components of the normal direction measuring device, such as the oscillator 42A and the light receiving element 42B, may be arbitrary. That is, the normal direction measuring device 55 shown in Figs. 1 and 12. The lower part of the main body was made smaller by changing the arrangement of the components. It should be noted that among the components of the normal direction measuring device 55, the same components as those of the normal direction measuring devices 40 and 50 are given the same reference numbers and their explanations are omitted. The normal direction measuring device 55 has a main body 55a consisting of a light receiving section 55b and a light projecting section 55c, and the light receiving section 55b is formed in a substantially cylindrical shape.
It is connected to the tip of the torch section 20'. A laser beam incident surface 55d is formed at the lower part of the first construction of the light receiving section 55b, which is perpendicular to the central axis of the main body 55a, that is, the reference axis CL', and as shown in FIG. At the center of the laser light incident surface 55d, the light receiving section 55 is located at the bottom of FIG.
A substantially cylindrical light projecting portion 55c having a diameter smaller than that of b is fixed. Further, a laser beam emitting surface 55e perpendicular to the reference axis CL' is formed at the eleventh lower part of the light projecting section 55c, and a substantially conical cone is formed on the laser beam emitting surface 55a below the first construction drawing. The tip end portion 55f of the shape is connected, and inside the light projecting portion 55c, a reference laser oscillator 5 is mounted on the central axis, that is, the reference axis CL', and the reference laser oscillator 5 is connected to the reference laser oscillator 5 in the direction of the reference axis CL'. It is provided in a form that can emit the laser beam LB, and the reference axis CL' below the reference laser oscillator 51 in FIG.
At the top, an optical path 51a is formed so as to pass through a light projecting part 55c and a tip part 55f, and a reference light beam emitting part 5lb is formed so as to be open downward in the figure. Further, above the laser beam emitting surface 55e inside the light projecting section 55c, three laser oscillators 42A, 42A2, 42A, are arranged perpendicular to the reference axis CL' as shown in FIG. On the plane, on the same radius from the reference axis CL', at equal angular intervals with respect to the reference axis CL', that is. They are set at 120' intervals. Each laser oscillator 42A has an emission part 42a at the lower end in FIG. 11, and each emission part 42a is arranged on the laser beam emission surface 55e. Each laser oscillator 42A is connected to the reference axis C from the emission section 42a.
The measurement laser beam LS can be emitted parallel to L'. Further, a reference plane PL is defined by each of the injection portions 42a. And before? No. 113 of each injection part 42a
Below the ii1, the optical path 42c is connected to the tip 55.
A measuring light beam emitting portion 42d is formed so as to pass through f and be parallel to the reference axis CL', and open downward in the figure. As shown in FIG.
are arranged around. As shown in FIG. 2, three bandpass filters 53, 53, 53 are provided on the laser beam incident surface 55d for each of the laser oscillators 4.
2A, 42A2, 42A3 are arranged in the same radial direction with respect to the reference axis CL', that is, at intervals of 20 degrees, around each of the measurement light beam emitting portions 42d.
It is located on the same radius from '. Then, the light receiving portion 55b of each of the band pass filters 53 in the upper part of the first upper diagram.
An optical path 52a is formed inside, and the optical path 52a
A condensing lens 43 is provided above. A reflecting mirror 52 is provided above the optical path 52a in the figure, and the reference axis CL' side of the reflecting mirror 52, that is, the 11th@
An optical path 52b communicating with the optical path 52a is formed on the left side. As shown in FIG. 12, on the reference axis CL' side from each reflection tIL52 and each optical path 52b, there are light receiving elements 42B, 42B2, 42B3 on a plane perpendicular to the reference axis CL'. On the same radius from the axis CL', each of the laser oscillators 42Ai, 42A2, 42A
, and the same radial direction with respect to the reference axis CL', that is, 1
As shown in FIG.
b and facing toward the reflecting mirror 52 side.
In addition, similar to the normal direction measuring device 40.50 described above, each of the laser oscillators 42A has a
Each modulator 47b or each driver 47a shown in FIG. 8 is connected, and each light receiving element 42B is connected to each bandpass filter 46a or multiplexer 46c shown in FIG. 6, 8, or 18. ing.

Since the normal direction measuring device M55 has the above-described configuration, in order to measure the normal direction on the machined surface 66a of the workpiece 66 using the normal direction measuring device 55 during teaching, the operator must use the teaching device 22. is operated to move the normal direction measuring device 55 provided at the tip of the torch section 20' on the processing surface 66a, and the reference laser oscillator 51 of the normal direction measuring device 55 outputs the signal, which is transmitted through the optical path 51a. A reference point CP is set by irradiating a reference laser beam LB, which is emitted from the reference beam emitting section 5lb in a direction -a to the reference axis CL'', to a predetermined position on the processing surface 66a whose normal direction is determined. Then, a measurement laser beam LS is emitted from each laser oscillator 42A through an optical path 42c and a measurement beam emission section 42d.
When the injection is made parallel to the reference axis CL', the machined surface 6
The measurement laser beam LS diffusely reflected at each measurement point P near the reference point CP on 6a is passed through each bandpass filter 5.
3, the light other than the laser light of a predetermined frequency is removed and enters the optical path 52a.

The measuring laser beam LS is condensed by the condensing lens 43, passes through the optical path 52a, passes through the reflecting mirror 52, and passes through the optical path 52a.
2b, an arrow L corresponding to the distance ML from the reference plane PL to each measurement point P is drawn on the light receiving surface 42b of each light receiving element 42B.
The light is received in a way that focuses on the position in the R direction. As in the case of the normal direction measuring devices 40 and 50 described above, a signal corresponding to the focal position on the light receiving device 42b of the measurement laser beam LS received from each light receiving element 42B to the normal direction calculating section 46 is transmitted. The position of each measurement point P is determined by the normal direction calculation unit 46. A virtual plane 65 is defined by each measurement point P. By calculating the normal vector N of the virtual plane 65, the reference point CP on the processing surface 66a is
The normal direction at is determined. Note that the normal direction measuring device 55 has a small and compact tip portion 55f provided with a reference beam emitting portion 5lb from which the reference laser beam LB is emitted, and a light projecting portion 55c to which the tip portion 55f is connected. Therefore, in order to set the above-mentioned reference point CP, when the operator irradiates the reference laser beam LB to a predetermined position on the processing surface 66a, it is necessary to recognize the irradiation position of the reference laser beam LB. Moreover, the operability when moving the normal direction measuring device 55 on the processing surface 66a is improved. In addition, the normal direction measuring device 5 shown in FIGS. 13 and 14
6 is a compact version of the entire main body. Note that among the components of the normal direction measuring device R56, the normal direction measuring device 40,
Components that are the same as those in 50 will be given the same numbers and their explanations will be omitted. That is, the normal direction measuring device i! ! 56 has a substantially cylindrical main body 66a, and the main body 56a is connected to the tip of the torch portion 20'. The main body 56a has a central axis, that is, a base $, located at the bottom of FIG. 13.
A laser beam entrance surface 56b perpendicular to @CL' is formed, and below the laser beam entrance surface 56b in the figure,
A laser beam exit surface 56c is formed perpendicular to the reference axis CL'. A cylindrical tip 56d is fixed to the center of the laser beam emitting surface 56c in FIG. 14 and downward in FIG. A reference laser oscillator 51 for outputting a reference laser beam LB& is provided outside the main body 56a, and a reference optical fiber 57 is connected to the reference laser oscillator 5l. And before? The reference optical fiber 57 is guided from the outside of the main body 56a to the inside of the main body 56a and is provided on the reference axis CL''.The reference optical fiber 57 is provided at the lower end of FIG.
a, and the reference laser beam LB emitted from the reference laser oscillator 51 can be emitted from the emission section 57a in the direction of the reference axis CL'. An optical path 51a is formed on the reference axis CL' in the lower part of FIG. 13 of the emission part 57a, passing through the main body 56a and the tip part 56d. In the figure, a reference light beam emitting section 5lb is formed so as to be open downward.

Additionally, a measuring laser beam LS is provided outside the main body 56a.
Three laser oscillators 42Ad, 42A2, 4 output
2A, is provided, and each of the laser oscillators 42A
, 42A2, 42A, are connected to measurement optical fibers 59A1, 59A2, 59A, respectively, and each of the measurement optical fibers 59A1, 59A, 59A3 is guided from the outside of the main body 56a to the inside of the main body 56a. Base '1! ! Each of the measuring optical fibers 59A has an emitting part 59a at the lower end in FIG. On the laser beam emission surface 56c, as shown in FIG. 14, a reference axis CL is provided around the reference beam emission part 5lb.
' are arranged at equal angular intervals, that is, at 120° intervals. The measurement laser beam LS output from each laser oscillator 42A can be emitted from each emission section 59a in parallel to the reference axis CL''.Furthermore, the reference plane PL is defined by each emission section 59a. As shown in FIG. 14, three band-pass filters 53, 53, and
However, each injection section 59a. , 59a2, 59a, are arranged around each injection part 59a in the same radial direction with respect to the reference axis CL', that is, at intervals of 120', and are provided on the same radius from the reference axis CL'. ing. Then, inside the main body 56a of each of the bandpass filters 53 in the upper part of FIG. 52 is formed, and on the optical path 52a there is a condenser lens. 43 are provided. And each condenser lens 43
At the upper part of Fig. 3, there are light receiving elements 42B■, 42B. ,4
2B. As shown in FIG. 4, each of the injection portions 59a and 59a are located on a plane perpendicular to the reference axis CL' and on the same radius from the reference axis CL'. 59a2, 59a, and standard 1i1c
In the same radial direction with respect to L', ie. As shown in FIG. 13, the light-receiving surfaces 42b are provided at intervals of 120', with the light-receiving surfaces 42b facing toward the optical path 52a, that is, toward the bottom in the figure. Further, similarly to the above-mentioned normal direction measuring device 40.50, each laser oscillator 42A includes each modulator 47b or each driver 47 shown in FIG. 6, FIG. 8, or FIG.
A is connected to each light receiving element 42B, and each band pass filter 46 shown in FIG. 6, FIG. 8 or FIG.
a or multiplexer 46c is connected. Since the normal direction measuring device 56 has the above configuration, the normal direction measuring device I! 56, the operator operates the teaching device 22 to measure the normal direction on the processing surface 66a of the workpiece 66 using the normal direction measuring device 115 provided at the tip of the torch section 20'.
6 on the machined surface 66a, the normal direction measuring device @56
The reference laser oscillator 5l outputs the light beam to the reference light emitting unit 5lb via the reference optical fiber 57 and the optical path 51a.
A reference point CP is set by irradiating a reference laser beam LB emitted from the reference axis CL' in a manner consistent with the reference axis CL' to a predetermined position on the processing surface 66a whose normal direction is determined. And from each laser oscillator 42A. When the iI9 standard laser beam LS is emitted parallel to the reference axis CL'' through the measurement optical fiber 59A, the measurement laser beam is diffusely reflected at each measurement point P near the reference point CP on the processing surface 66a. LS enters the optical path 52a with light other than the laser beam of a predetermined frequency removed by each bandpass filter 53.The measurement laser beam LS passes through the optical path 52a,
The light is focused by the condenser lens 43 onto the light receiving surface 42b of each light receiving element 42B. The light is received with a focus at a position in the direction of arrow LR corresponding to the distance L from the reference plane PL to each measurement point P. And the above-mentioned normal direction measuring devices 40, 50
Similarly to the case, the light receiving surface 42b of the received measurement laser beam LS is sent from each light receiving element 42B to the normal direction calculation unit 46.
A signal corresponding to the upper focal point position is output, and the position of each measurement point P is determined in the normal direction calculation section 46. A virtual plane 65 is defined by each measurement point P, and by calculating the normal vector N of the virtual plane 65, the normal direction at the reference point CP on the processing surface 66a is determined. The normal direction measuring device 56 includes a main body 56a.
5 reference laser oscillators and 4 measurement laser oscillators
2A is not provided, the entire main body 56a is formed in a small size.
6 on the processing surface 66a and irradiating the reference laser beam LB to a predetermined position on the processing surface 66a to set the reference point cp.
Improves operability when setting.

In addition, in order to measure the distance L to each measurement point P on the processed surface 66a, it is necessary to measure the distance L from the position shown in FIG. As shown in the normal direction measuring device 60 shown in Fig. 6, the machined surface 66
It is also possible to measure by the light intensity of the measurement laser beam LS reflected on a. It should be noted that, among the structural elements of the normal direction measuring device M60, the same components as those of the normal direction measuring devices 40 and 50 will be given the same reference numerals and their explanation will be omitted. That is,
The normal direction measuring device 60 has a substantially cylindrical main body 60a, and the main body 60a is connected to the tip of the torch section 20'. And, on the outside of the main body 60a. A reference laser oscillator 51 that outputs a reference laser beam LB is provided, and a reference optical fiber 61 is connected to the reference laser oscillator 51. The reference optical fiber 61 is guided from the outside of the main body 60a to the inside of the main body 60a, and is placed on the reference axis CL' with the tip 61a protruding downward in FIG. 15 from the tip 60b of the main body 60a. The reference laser beam LB output from the laser oscillator 51 is
The laser oscillators 63A, 63A, etc., such as semiconductor lasers, are provided outside the main body 60a to emit measurement laser light LS from the tip 61a in the direction of the reference axis CL''. 63A3 is provided,
The laser oscillators 63A■, 63A2 and 63A3 include:
Optical fibers for light projection 62A, 62A2, 62A, respectively
3 is connected. Each of the light emitting optical fibers 6
2A is guided from the outside of the main body 60a into the inside of the main body 60a and is provided substantially parallel to the reference axis CL'. Each of the light emitting optical fibers 62A has a tip 62a at the lower end in FIG.
6 2 a, is a shape that protrudes downward from the tip 60b of the main body 60a in Fig. 5, and is connected to the reference plane P perpendicular to the reference axis CAL''.
On the same radius on L, as shown in FIG.
They are arranged around the tip 61a of the reference optical fiber 61 at equal angular intervals, that is, at 120° intervals with respect to L'. Then, the measurement laser beam LS output from each laser oscillator 63A is transmitted from each tip 62a to the reference axis C.
It can be emitted parallel to L'. Also, the end of each light emitting optical fiber 62A? On the reference plane PL defined by the reference axis 62a, light receiving optical fibers 62B, . 62B,
, 62B. As shown in FIG. 16, the tips 62b■, 62b■, 62b,
62A2, beyond 62A, @62a,, 6 2 a, . 6
2a, and in the same radial direction with respect to the reference axis CL', that is, .
They are provided at intervals of 120'', adjacent to each of the tips 62a, and on the same radius from the reference axis CL'.
The light receiving optical fibers 62B, . 62B, , 62B are light receiving elements 63B which are guided from inside the main body 60a to the outside of the main body 60a and can output a signal according to the amount of light received by a photodiode or the like provided outside the main body 60a.
63B2, 63B, are connected. Further, similarly to the normal direction measuring devices 40 and 50 described above, each modulator 47b or each driver 47a shown in FIG. 6, FIG. 8, or FIG. 18 is connected to each laser oscillator 63A. , each of the light-receiving elements 42B is connected to each bandpass filter 46a or multiplexer 46c shown in FIG. 6, FIG. 8, or FIG. 18. Normal direction measuring device i! Since the normal direction measuring device 60 has the above configuration, in order to measure the normal direction at an arbitrary point on the processing surface 66a using the normal direction measuring device 60, the operator first operates the teaching device 22 to set the torch. The normal direction measuring device 60 provided at the tip of the portion 20' is connected to the machined surface 66a.
is output from the reference laser oscillator 5l,
The reference laser beam LB is guided to the main body 60a by the reference optical fiber 61 and emitted from the tip 61a of the reference optical fiber 6 in a manner consistent with the reference axis CL'.
Set the reference point CP by irradiating the normal direction on a to the predetermined position to be measured. Then, the measurement laser beam LS output from each laser oscillator 63A and emitted from the tip 62a of the light projection optical fiber 62A in parallel to the reference axis CL' is diffusely reflected at each measurement point P on the processing surface 66a. The measured laser beam LS is transmitted to the tip 6 of each light-receiving optical fiber 62B.
2b into each light-receiving optical fiber 62B, and is received by each light-receiving element 63B via each light-receiving optical fiber 62B. At this time, as shown in FIG.
Since the light emitting conical surface CNA indicating the range in which S spreads and the light receiving conical surface CNB indicating the light receiving range of the tip 62b of the light receiving optical fiber 62B do not match, each measurement point P (micro area ) of the measurement laser beam LS diffusely reflected by the light emitting conical surface CNA and the light receiving conical surface CNB shown by diagonal lines in FIG.
The measurement laser beam LS reflected at AB is transferred from the tip 62b of the light receiving optical fiber 62B to the light receiving optical fiber 62B.
and is received by the light-receiving element 63B via the light-receiving optical fiber 62B. And @@CNAB, where the light emitting conical surface CNA and the light receiving conical surface CNB overlap, is the tip 62a of the light emitting optical fiber 62A and the light receiving optical fiber 6.
The distance il1tL from the tip 82a of the light emitting optical fiber 62A and the tip 62b of the light receiving optical fiber 62B to the measuring point P changes depending on the distance il1tL from the tip 62b of the light emitting optical fiber 62A to the measuring point P. The light intensity of the measurement laser beam LS changes. Then, each light receiving element 63B outputs a signal corresponding to the light intensity of the received measurement laser beam LS to the normal direction calculation section 46, and the normal direction calculation section 4
6, the position of each measurement point P on the machined surface 66a is determined. At this time, each laser oscillator 63A is
Either frequency modulation is applied to the power supply of each laser oscillator 63A to apply a predetermined modulation to the measurement laser beam LS emitted from each laser oscillator 63A, or each laser oscillator 63A is driven in a time-division manner to By eliminating the influence of the emitted measurement laser beams LS on each other, the position of each measurement point P can be accurately determined. A virtual plane 65 is defined by each measurement point P, and by calculating the normal vector N of the virtual thousand planes 65, the machined surface 65 is
The normal direction at the reference point CP on 6a is determined. In addition, in each of the above-mentioned embodiments, the measurement laser beam LS
The case has been described in which the emission direction of the measurement laser beam LS is made parallel to the reference axis CL' to simplify the calculation for determining the position coordinates of each measurement point P in the normal direction calculation unit 46. does not necessarily have to be parallel to the reference axis CL'. That is, by setting the angle of the emission direction of the measurement laser beam LS with respect to the reference axis CL' in the normal direction calculation section 46 in advance, the position coordinates of each measurement point P can be determined. At this time, the measurement laser beam LS
If the measurement laser beam LS is emitted at an angle toward the reference axis CL'', each measurement point P can be set closer to the reference axis CP than when the measurement laser beam LS is emitted parallel to the reference axis CL'. , the normal direction at the reference point CP on the machined surface 66a can be determined more accurately.In addition, in each of the above embodiments, the reference point CP is set, and furthermore, the reference point CP is set in the vicinity of the reference point CP. Although we have described the case where three measurement points P other than Of course, the distance measuring means for measuring the position of the measurement point P may also be used as the reference point setting means for setting the reference point CP.In addition, in each of the above embodiments, the normal direction measurement A case has been described in which the devices 40, 50, 55, 56, 60 are provided in the teaching device 22 to create the machining program PRO in the laser processing machine 1. Of course, the 60 can be used not only for teaching to create a machining program for a machine tool such as the laser processing machine 1, but also for positioning in various machine tools. (g). More than the effects of the invention, As described, according to the present invention, the filler 41, the reference laser oscillator 51, the reference optical fibers 57, 61, etc., which set the reference point apt on the curved surface such as the processed surface 66a of the workpiece 66, etc. A point setting means is provided, and at least three measurement points P are provided near the reference point CP on the curved surface.
a laser oscillator 42A, a light receiving element 42B, a measuring optical fiber 59A, a light emitting optical fiber 62A, a light receiving optical fiber 62B, and a laser oscillator 63A. , a distance measuring means such as a light receiving element 63B is provided, and a virtual plane 65 including the measuring points P is set based on the positions of the respective measuring points P measured by the distance measuring means. normal vector N
Since the configuration is provided with a normal direction calculation unit that calculates the normal direction of It is approximately calculated as the normal direction of the virtual plane 65 defined by each measurement point P set by the means.
Therefore, by moving the reference point setting means along with the distance measuring means on the curved surface and setting the reference point CP at a predetermined position on the curved surface whose normal direction is to be measured, the normal direction at a predetermined position on the curved surface can be determined. can be found. Further, the present invention provides a reference laser beam L in the direction of the reference axis CL'.
A reference laser oscillator 5 that emits laser beam B and sets a reference point CP on a curved surface such as a processing surface 66a of an object such as a workpiece 66.
l. A reference laser beam emitting means such as a reference optical fiber 57, 6 is provided, and a measurement laser beam LS is emitted to form at least three measurement points P near the reference point CP on the curved surface.
The laser oscillator 42A. Measurement optical fiber 59
A. A measurement laser beam emitting means such as a light projection optical fiber 62A and a laser oscillator 63A is provided, and the measurement laser beam LS reflected at each measurement point P is received, and the distance L between each measurement point P is determined. A light-receiving element 42B, a light-receiving optical fiber 62B, and a light-receiving element 6 that can output signals corresponding to the positions of
A measuring laser beam receiving means such as 3B is provided, and a virtual plane 65 including the measuring points P is set based on a signal corresponding to the position of each measuring point P outputted from the measuring laser beam receiving means. However, since the configuration is provided with a normal direction calculation unit 46 that calculates the normal direction of the normal vector N of the virtual plane 65, etc., the reference laser beam emitted from the reference laser beam emitting means on the curved surface of the object A virtual plane in which the normal direction at the reference point CP set by the laser beam LB is defined by each measurement point P set by the measurement laser beam LS emitted from the measurement laser beam emitting means near the reference point CP. 65
It is approximately calculated as the normal direction of . Therefore, the reference laser beam emitting means is moved along the curved surface together with the measuring laser beam emitting means and the measuring laser beam receiving means, and the reference laser beam LB is irradiated to a predetermined position on the curved surface whose normal direction is to be measured. By setting the reference point CP, the normal direction at a predetermined position on the curved surface can be determined. Further, the present invention provides a main body 55a consisting of a large-diameter light receiving section 55b and a small-diameter light projecting section 55c connected to the light receiving section 55b. A reference laser beam emitting means such as a reference laser oscillator 51 for emitting a laser beam LB to set a reference point CP on a curved surface such as a processing surface 66a of an object such as a workpiece 66 is provided, and the light projecting section 55c A measuring laser beam emitting means such as a measuring laser oscillator 42A is provided for emitting a measuring laser beam LS to set at least three measuring points P near the reference point CP on the curved surface, and The portion 55b is provided with a light receiving element 42B capable of receiving the measurement laser beam LS reflected at each measurement point P and outputting a signal corresponding to a position such as a distance L of each measurement point P. Element 42B
A virtual plane 65 including the measurement points P is set based on the signal corresponding to the position of each measurement point P outputted from the , and the normal direction such as the normal vector N of the virtual plane 65 is calculated. Since the configuration includes the normal direction calculation unit 46, the normal direction at the reference point cp set by the reference laser beam LB emitted from the reference laser beam emitting means on the curved surface of the object is the reference point cp. It is approximately calculated as the normal direction of the virtual plane 65 defined by each measuring point P set by the measuring laser beam LS emitted from the nearby measuring laser beam emitting means. Therefore, the main body 55a provided with the reference laser beam emitting means, the measuring laser beam emitting means, and the light receiving element 42B is moved on the curved surface, and the reference laser beam LB is directed in the normal direction to a predetermined point on the curved surface to be measured. The normal direction at a predetermined position on the curved surface can be determined by irradiating the light onto the position and determining the reference points CP&H. and. By separating the light receiving element 42B from the light projecting part 55c, the light projecting part 55c emits the reference laser beam LB.
Because it is compact, when the worker irradiates the reference laser beam LB to a predetermined position on the curved surface of the object,
It is easy to recognize the irradiation position of the reference laser beam LB, and
The operability when moving the main body 55a on a curved surface is improved.

Further, the present invention provides a main body 56a, and a reference laser oscillator 5 that outputs a reference laser beam LB outside the main body 56a.
The reference laser beam LB output from the reference laser oscillator 51 is directed to the reference axis CL' on the main body 56a.
The machining surface 66a of the object such as the workpiece 66 is
A reference optical fiber 5 for setting a reference point CP on a curved surface such as
A measurement laser oscillator 42A that outputs a measurement laser beam LS is provided outside the main body 56a, and a measurement laser oscillator 42A is provided outside the main body 56a.
6a is provided with a measurement optical fiber 59A that emits the measurement laser beam LS output from the measurement laser oscillator 42A and sets at least three measurement points P near the reference point CP on the curved surface. , the main body 56a is provided with a light receiving element 42B capable of receiving the measurement laser beam LS reflected at each measurement point P and outputting a signal corresponding to a position such as a distance L of each measurement point P, The light receiving element 4
Based on the signal corresponding to the position of each measurement point P output from 2B, a virtual thousand plane 65 including those measurement points P is set, and the normal direction of the normal vector N of the virtual plane 65 is determined. Since the configuration includes the normal direction calculation section 46 for calculation, the normal direction at the reference point CP set by the reference laser beam LB emitted from the reference optical fiber 57 on the curved surface of the object is . Measurement optical fiber 59A near reference point CP
It is approximately calculated as the normal direction of the virtual plane 65 defined by each measurement point P set by the measurement laser beam LS emitted from the . Therefore, the reference optical fiber 5
7. Move the main body 56a provided with the measuring optical fiber 59A and the light receiving element 42B on the curved surface, and irradiate the reference laser beam LB to a predetermined position on the curved surface whose normal direction is to be measured, thereby setting the reference point CP. By setting , you can find the normal direction at a given position on the curved surface. By separating the reference laser oscillator 5l and the measurement laser oscillator 42A from the main body 56a, the main body 56a from which the reference laser beam LB is emitted is made smaller, so that an operator can When irradiating the LB to a predetermined position on the curved surface of the object, the irradiation position of the reference laser beam LB is easily recognized, and the operability when moving the main body 56a on the curved surface is improved. Further, the present invention provides a main body 60a, and a reference laser oscillator 5 that outputs a reference laser beam LB outside the main body 60a.
1 to the main body 60a. The reference laser beam LB output from the reference laser oscillator 51 is aligned with the reference axis CL'.
The machined surface 66a of the object such as the workpiece 66 is
A reference optical fiber 6 for setting a reference point cp on a curved surface such as
1, and a measurement laser oscillator 63A that outputs a measurement laser beam LS is provided outside the main body 60a.
0a, a light projection optical fiber 62A that emits the measurement laser beam LS output from the measurement laser oscillator 63A and sets at least three measurement points P near the reference point CP on the curved surface 66a; is provided in the main body 60a,
The measurement laser beam L reflected at each measurement point P
A light receiving optical fiber 62B for receiving S is provided outside the main body 60a. A light receiving element 6 capable of outputting a signal corresponding to a position such as a distance L of each measurement point P based on the light intensity of the measurement laser beam LS received by the light receiving optical fiber 62B.
3B, and based on the signal corresponding to the position of each measurement point P output from the light receiving element 63B, a virtual plane 65 including the measurement points P is set, and a normal vector N of the virtual plane 65 is set. Normal direction calculation unit 4 that calculates the normal direction of
6, the normal direction at the reference point CP set by the reference laser beam LB emitted from the reference optical fiber 6 on the curved surface of the object is the same as that for light projection near the reference point CP. It is approximately calculated as the normal direction of the virtual plane 65 defined by each measurement point P set by the measurement laser beam LS emitted from the optical fiber 62A.
Therefore, there are 6 optical fibers for reference and 62 optical fibers for light projection.
The main body 60a provided with the optical fiber A and the light receiving optical fiber 62B is moved on a curved surface, and the reference laser beam LB is irradiated to a predetermined position on the curved surface whose normal direction is to be measured to set a reference point CP. The normal direction at a given position on the curved surface can be found by Then, the reference laser oscillator 51. By separating the measurement laser oscillator 63A and the light receiving element 63B, the main body 60a from which the reference laser beam LB is emitted is formed in a small size, so that the operator can direct the reference laser beam LB onto the curved surface of the object. When irradiating a predetermined position, it is easy to recognize the irradiation position of the reference laser beam LB, and the operability when moving the main body 60a on a curved surface is improved. Further, the present invention emits the reference laser beam LB in the direction of the reference axis CL' to
A reference laser oscillator 51 for setting a reference point cp on a curved surface such as a processed surface 66a of an object such as 6 or the like. Reference optical fiber 5
A reference laser beam emitting means such as 7 or 6L is provided, and the measurement laser beam LS is emitted in a predetermined modulated form to locate at least three measurement points P near the reference point CP on the curved surface.
A modulator 47b for setting, a laser oscillator 42A, a measurement optical fiber 59A, a light projection optical fiber 62A, a laser oscillator 63A, and other measurement laser beam modulation and emission means are provided,
The measurement laser beam L reflected at each measurement point P
a light-receiving element 42B that receives light containing S and outputs a light-receiving signal corresponding to the received light; a light-receiving optical fiber 62B;
A measuring laser beam receiving means such as a light receiving element 63B is provided, and the measuring laser beam L is subjected to a predetermined modulation from among the light reception signals outputted from the measuring laser beam receiving means.
The component corresponding to S is extracted and demodulated, and each of the measurement points P
Noise removal means such as a bandpass filter 46a and a demodulator 46b are provided to output a position signal corresponding to a position such as a distance L, and a position signal corresponding to the position of each measurement point P outputted from the noise removal means A normal direction calculation unit 4 that sets a virtual plane 65 including the measurement points P based on the above, and calculates the normal direction such as the normal vector N of the virtual plane 65.
6, the normal direction at the reference point cp set by the reference laser beam LB emitted from the reference laser beam emitting means on the curved surface of the object is the reference point cp.
It is approximately calculated as the normal direction of the virtual plane 65 defined by each measuring point P set by the measuring laser beam LS emitted from the nearby measuring laser beam emitting means. Therefore, the reference laser beam emitting means is moved along the curved surface together with the measuring laser beam emitting means and the measuring laser beam receiving means, and the reference laser beam LB is irradiated to a predetermined position on the curved surface whose normal direction is to be measured. By setting the reference point CP in this manner, the normal direction at a predetermined position on the curved surface can be determined. Furthermore, even if the noise removal means receives light other than the measurement laser beam LS, only the position signal corresponding to the measurement laser beam LS is output to the normal direction calculation unit 46, so that each measurement point is The position of P is accurately measured and therefore the normal direction of the curved surface is accurately determined.

Further, the present invention provides a reference laser beam L in the direction of the reference axis CL'.
A reference laser oscillator 5 that emits laser beam B and sets a reference point CP on a curved surface such as a processing surface 66a of an object such as a workpiece 66.
1. A reference laser beam emitting means such as reference optical fibers 57 and 61 is provided, and the measurement laser beam LS is emitted to each different measurement point P near the reference point CP on the curved surface.
At least three measuring laser beam emitting means such as a laser oscillator 42A, a measuring optical fiber 59A, a light projecting optical fiber 62A, and a laser oscillator 63A are provided, and t pieces of each measuring laser beam emitting means are provided. , a time-division driving means such as a driver 47a and a signal switch 47c, which are driven in a time-division manner, receive the measurement laser beam LS reflected at the measurement point P, and determine the distance L of the measurement point P, etc. At least three measurement laser beam receiving means such as a light receiving element 42B, a light receiving optical fiber 62B, and a light receiving element 63B capable of outputting a signal corresponding to the position of are provided in a form corresponding to each of the measuring laser beam emitting means. , selecting in a time-division manner l measurement laser beam receiving means corresponding to the measuring laser beam emitting means driven by the time division driving means among the respective measuring laser beam receiving means; A time-division selection means such as a multiplexer 46c and a signal switch 47c for outputting a signal corresponding to the position of the measurement point P only from the selected measuring laser beam receiving means is provided, and the time-division selection means selected by the time-division selection means is provided. Based on the signals corresponding to the positions of the measurement points P output from each of the measurement laser beam receiving means, the positions of at least three measurement points P are determined, and a virtual plane 65 including the measurement points P is set. However, since the configuration is provided with a normal direction calculation unit 46 that calculates the normal direction of the normal vector N of the virtual plane 65, etc., the reference laser beam emitted from the reference laser beam emitting means on the curved surface of the object The normal direction at the reference point cp set by the laser beam LB is the reference point C
It is approximately calculated as the normal direction of the virtual plane 65 defined by each measuring point P set by the measuring laser beam LS emitted from the measuring laser beam emitting means near P. Therefore, the reference laser beam emitting means is used as the measuring laser beam emitting means. A predetermined point on the curved surface is set by moving the measuring laser beam together with the measuring laser beam receiving means on the curved surface and irradiating the reference laser beam LB to a predetermined position on the curved surface whose normal direction is to be measured. The normal direction at a position can be determined. Furthermore, since a plurality of measuring laser beam emitting means 5 or a plurality of measuring laser beam receiving means are not used at the same time, one measuring laser beam emitting means and a single measuring laser beam receiving means can be reliably used. Correspondingly, since each measuring laser beam receiving means does not receive the measuring laser beam LS emitted from the measuring laser beam emitting means that does not correspond to the measuring laser beam receiving means, the measurement laser beam LS of each measuring point P is The position is accurately measured and therefore the normal direction of the curved surface is accurately determined.

Further, the present invention includes a filler 4l, a reference laser oscillator 5
reference point setting means such as reference optical fibers 57 and 61, laser oscillator 42A, light receiving element 42B, measuring optical fiber 59A, light emitting optical fiber/<62A, light receiving optical fiber 62B, laser oscillator 63A. A distance measuring means such as a light receiving element 63B is provided, and the workpiece 6 is set by the reference point setting means.
A reference point CP is set on a curved surface such as a processed surface 66a of an object such as No. 6, and at least three measurement points P are set near the reference point CP on the curved surface by the distance measuring means. The distance 1aL, etc. of each measurement point P is measured, and based on the measured position of each measurement point P, a virtual plane 65 including the measurement points P is set, and the normal direction of the virtual plane 65 is set. N is calculated and the calculated normal direction is set as the normal direction of the reference point CP, so that the normal at the reference point CP set by the reference point setting means on the curved surface of the object. The direction is approximately calculated as the normal direction of the virtual plane 65 defined by each measurement point P set by the distance measuring means in the vicinity of the reference point CP. Therefore, by moving the reference point setting means along with the distance measuring means on the curved surface and setting the reference point CP at a predetermined position on the curved surface whose normal direction is to be measured, the normal direction at a predetermined position on the curved surface can be determined. can be found.

[Brief explanation of drawings]

FIG. 1 is a front view showing an example of a teaching device to which the normal direction measuring device and normal direction measuring method according to the present invention are applied; FIG. 2 is a perspective view showing an example of a three-dimensional laser processing machine; 3 is an enlarged view of the torch portion of the laser processing machine shown in FIG. 2, FIG. 4 is a view showing an example of the normal direction measuring device according to the present invention, and FIG. 5 is a view of the normal direction shown in FIG. 4. Figure 6 is a block diagram showing an example of the control device in the teaching device, Figure 7 is a schematic diagram for determining the rotation angle of the torch and the rotating torch, and Figure 8 is the control in the teaching device. A block diagram showing another example of the device; FIG. 9 is a diagram showing another example of the normal direction measuring device according to the present invention; FIG. 10 is a bottom view of the normal direction measuring device shown in FIG. 9; Fig. 1l is a diagram showing another example of the normal direction measuring device according to the present invention, Fig. 12 is a bottom view of the normal direction measuring device shown in Fig. 11, and Fig. 3 is a diagram showing another example of the normal direction measuring device according to the present invention. FIG. 14 is a bottom view of the normal direction measuring device shown in FIG. 3; FIG. 5 is another example of the normal direction measuring device according to the present invention. Figure 6 is a bottom view of the normal direction measuring device shown in Figure 15, Figure 17 is a diagram showing the principle of distance measurement in the normal direction measuring device shown in Figures 15 and 16. FIG. 8 is a block diagram showing another example of the control device in the teaching device. 40...Normal direction measuring device 4l...Reference point setting means (filler) 42A.
... Distance measuring means, measuring laser beam emitting means, measuring laser oscillator 42B... Distance measuring means, measuring laser beam receiving means, light receiving element 46 ... normal direction Arithmetic unit 46a... Noise removal means (band pass filter) 46b... Noise removal means (demodulator) 46c.
...Time division selection means (multiplexer) 47a... Time division operation means (driver) 47b
...Modulation means (modulator) 47c ...Time division active means (signal switch) 50 ...Normal direction measuring device 51 ...Reference point setting Means, reference laser beam emitting means, reference laser oscillator 55...Normal direction measuring device 55a...Main body 55b...Light receiving section 55c...Emission Optical section 56...Normal direction measuring device 56a...Main body 57...Reference point setting means, reference laser beam emitting means, reference optical fiber 59A... ...Distance measuring means, measurement laser beam emitting means, measurement optical fiber 60...Normal direction measuring device 60a...Main body 61...Reference point setting means, standard reference optical fiber 62A... distance measuring means, measuring laser beam emitting means, light projecting optical fiber 62B... distance measuring means, measuring laser beam receiving means , Light-receiving optical fiber 63A... Distance measuring means, Measurement laser beam emitting means, Laser oscillator 63B... Distance measuring means, Measurement laser beam receiving means, Light receiving element 66... ...Target (work) 66a...Curved surface (machined surface) cp...Reference point P...Measurement point L...Position (distance) N. ...Normal direction (Normal vector CL'...Reference axis LB...Reference laser beam LS...Measurement laser light torque)

Claims (8)

[Claims] (1) Providing a reference point setting means for setting a reference point on a curved surface of the object, setting at least three measurement points near the reference point on the curved surface, and measuring the position of each of the measurement points. normal direction calculation for calculating a normal direction of the virtual plane by providing a distance measuring means, setting a virtual plane including the measurement points based on the position of each of the measurement points measured by the distance measuring means; A normal direction measuring device configured by providing a section. (2) A reference laser beam emitting means is provided for emitting a reference laser beam in the direction of the reference axis to set a reference point on the curved surface of the object, and emitting a measurement laser beam to set a reference point on the curved surface of the object. A measurement laser beam emitting means for setting at least three measurement points near the reference point is provided, and the measurement laser beam reflected at each measurement point is received to generate a signal corresponding to the position of each measurement point. and setting a virtual plane including the measurement points based on a signal corresponding to the position of each of the measurement points outputted from the measurement laser beam reception means, A normal direction measuring device configured by providing a normal direction calculation section for calculating the normal direction of the virtual plane. (3) A main body consisting of a large-diameter light-receiving section and a small-diameter light-emitting section connected to the light-receiving section is provided, and a reference laser beam is emitted to the light-emitting section in the direction of the reference axis to illuminate the target object. A reference laser beam emitting means for setting a reference point on the curved surface is provided, and a measurement laser beam is emitted to the light projecting section to set at least three measurement points near the reference point on the curved surface. a measuring laser beam emitting means for emitting a measuring laser beam, and the light receiving section is provided with a light receiving element capable of receiving the measuring laser beam reflected at each of the measuring points and outputting a signal corresponding to the position of each of the measuring points. , a normal direction calculation unit that sets a virtual plane including the measurement points based on a signal corresponding to the position of each measurement point output from the light receiving element, and calculates a normal direction of the virtual plane. A normal direction measuring device provided and configured. (4) A main body is provided, and a reference laser oscillator that outputs a reference laser beam is provided outside the main body, and the reference laser beam output from the reference laser oscillator is emitted into the main body in the reference axis direction. a reference optical fiber for setting a reference point on the curved surface of the object; a measurement laser oscillator for outputting a measurement laser beam is provided outside the main body; A measurement optical fiber is provided for emitting an output measurement laser beam to set at least three measurement points on the curved surface near the reference point, and the measurement optical fiber reflected at each measurement point is provided on the main body. a light-receiving element capable of receiving a laser beam and outputting a signal corresponding to the position of each of the measurement points; A normal direction measuring device configured by setting a virtual plane including a measurement point and including a normal direction calculation unit that calculates a normal direction of the virtual plane. (5) A main body is provided, and a reference laser oscillator that outputs a reference laser beam is provided outside the main body, and the reference laser beam output from the reference laser oscillator is emitted into the main body in a reference axis direction. a reference optical fiber for setting a reference point on the curved surface of the object; a measurement laser oscillator for outputting a measurement laser beam is provided outside the main body; A light projecting optical fiber is provided for emitting an output measurement laser beam to set at least three measurement points on the curved surface in the vicinity of the reference point, A light-receiving optical fiber is provided to receive the measurement laser beam, and a signal corresponding to the position of each measurement point is outputted outside the main body based on the amount of the measurement laser beam received by the light-receiving optical fiber. A method in which a virtual plane including the measurement points is set based on a signal corresponding to the position of each measurement point output from the light reception element, and a normal direction of the virtual plane is calculated. A normal direction measuring device configured with a line direction calculation section. (6) A reference laser beam emitting means is provided that emits a reference laser beam in the direction of the reference axis to set a reference point on the curved surface of the object, and the measurement laser beam is modulated in a predetermined manner. inject at least 3 points near the reference point on the curved surface.
a measuring laser beam modulating and emitting means for setting measurement points, receiving light including the measuring laser beam reflected at each of the measuring points, and outputting a light reception signal corresponding to the received light; A laser beam receiving means is provided, and a component corresponding to the measuring laser beam is extracted from the light receiving signal outputted from the measuring laser beam receiving means, and a component corresponding to the measuring laser beam is demodulated to generate a position signal corresponding to the position of each of the measuring points. A virtual plane including the measurement points is set based on a position signal corresponding to the position of each measurement point outputted from the noise removal means, and a normal line of the virtual plane is set. A normal direction measuring device that includes a normal direction calculation section that calculates a direction. (7) A reference laser beam emitting means is provided for emitting a reference laser beam in the direction of the reference axis to set a reference point on the curved surface of the object, and emitting a measurement laser beam to set a reference point on the curved surface of the object. At least three measuring laser beam emitting means each setting a different measuring point in the vicinity of the reference point are provided, and time-sharing driving means for driving each of the measuring laser beam emitting means one by one in a time-divided manner. and at least three measuring laser beam receiving means capable of receiving the measuring laser beam reflected at the measuring point and outputting a signal corresponding to the position of the measuring point; each of the measuring laser beam emitting means; of the measurement laser beam receiving means, one measuring laser beam receiving means corresponding to the measuring laser beam emitting means driven by the time division driving means is time-divided. and a time-division selection means for outputting a signal corresponding to the position of the measurement point only from the selected measurement laser beam receiving means, and each of the measurement lasers selected by the time-division selection means Based on the signal corresponding to the position of the measurement point outputted from the light receiving means, the positions of at least three measurement points are determined, a virtual plane including the measurement points is set, and the normal direction of the virtual plane is determined. A normal direction measuring device configured by providing a normal direction calculation section that calculates. (8) A reference point setting means and a distance measuring means are provided, the reference point setting means sets a reference point on a curved surface of the object, and the distance measuring means sets at least a reference point on the curved surface in the vicinity of the reference point. Setting three measurement points, measuring the position of each measurement point, setting a virtual plane including the measurement points based on the measured position of each measurement point, and determining the modulus of the virtual plane. A normal direction measuring method configured to calculate a line direction and set the calculated normal direction as the normal direction of the reference point.