JPH0357930U - - Google Patents
Info
- Publication number
- JPH0357930U JPH0357930U JP11907789U JP11907789U JPH0357930U JP H0357930 U JPH0357930 U JP H0357930U JP 11907789 U JP11907789 U JP 11907789U JP 11907789 U JP11907789 U JP 11907789U JP H0357930 U JPH0357930 U JP H0357930U
- Authority
- JP
- Japan
- Prior art keywords
- oxide superconductors
- burner
- tube burner
- oxide
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案の多重管バーナの断面図、第２
図及び第３図は本考案の多重管バーナの他の実施
例を示す断面図、第４図は本考案の多重管バーナ
を使用した火炎生成装置の構成図、第５図は従来
の多重管バーナの断面図、第６図は従来の多重管
バーナを使用した火炎発生装置の構成図である。
１…Ｈ２管、２…Ａｒ管、３…Ｏ２管、４…多
重管、５…キヤリアガス管、６…キヤリアガス管
出口、７…原料管、８…接続部、９…原料物質溶
液、１０…第一原料容器、１１…ポンプ、１２…
第２原料容器。
Figure 1 is a sectional view of the multi-tube burner of the present invention, Figure 2
3 and 3 are cross-sectional views showing other embodiments of the multi-tube burner of the present invention, FIG. 4 is a block diagram of a flame generating device using the multi-tube burner of the present invention, and FIG. 5 is a conventional multi-tube burner. A cross-sectional view of the burner, FIG. 6, is a configuration diagram of a flame generator using a conventional multi-tube burner. 1...H 2 pipe, 2...Ar pipe, 3...O 2 pipe, 4...multiple pipe, 5...carrier gas pipe, 6...carrier gas pipe outlet, 7...raw material pipe, 8...connection part, 9...raw material solution, 10 ...First raw material container, 11...Pump, 12...
Second raw material container.
Claims (1)
火炎中で反応させ、基材上に酸化物超電導体の前
駆物質を膜状または粉末として堆積させるための
酸化物超電導体製造用の同心円管状多重管バーナ
で前記多重管バーナの最も中心に位置するキヤリ
アガス管に、多重管バーナの外周側壁を貫通挿入
させて原料管を接続したことを特徴とする酸化物
超電導体製造用バーナ。 Concentric tubes for the production of oxide superconductors for reacting droplets of a solution containing raw materials for oxide superconductors in a flame to deposit precursors of oxide superconductors on a substrate in the form of a film or powder. A burner for producing an oxide superconductor, characterized in that a raw material pipe is connected to a carrier gas pipe located at the center of the multi-tube burner by penetrating the outer peripheral side wall of the multi-tube burner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11907789U JPH0357930U (en) | 1989-10-11 | 1989-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11907789U JPH0357930U (en) | 1989-10-11 | 1989-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0357930U true JPH0357930U (en) | 1991-06-05 |
Family
ID=31667218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11907789U Pending JPH0357930U (en) | 1989-10-11 | 1989-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0357930U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06244120A (en) * | 1993-02-19 | 1994-09-02 | Sony Corp | Gas feeding equipment in wafer process equipment |
-
1989
- 1989-10-11 JP JP11907789U patent/JPH0357930U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06244120A (en) * | 1993-02-19 | 1994-09-02 | Sony Corp | Gas feeding equipment in wafer process equipment |