JPH0357954U - - Google Patents
Info
- Publication number
- JPH0357954U JPH0357954U JP11892789U JP11892789U JPH0357954U JP H0357954 U JPH0357954 U JP H0357954U JP 11892789 U JP11892789 U JP 11892789U JP 11892789 U JP11892789 U JP 11892789U JP H0357954 U JPH0357954 U JP H0357954U
- Authority
- JP
- Japan
- Prior art keywords
- masking member
- utility
- model registration
- substrate
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000873 masking effect Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
Landscapes
- Structure Of Printed Boards (AREA)
Description
第１図は本考案のマスキング部材を使用したマ
グネトロンスパツタリング装置の概略断面図、第
２図は本考案のマスキング部材の一実施例を示す
一部平面図である。
１……真空チヤンバー、３……マグネトロンカ
ソード、５……ターゲツト、６……透明基板、８
……マスキング部材、９……透孔。
FIG. 1 is a schematic sectional view of a magnetron sputtering device using the masking member of the present invention, and FIG. 2 is a partial plan view showing an embodiment of the masking member of the present invention. 1... Vacuum chamber, 3... Magnetron cathode, 5... Target, 6... Transparent substrate, 8
...Masking member, 9...Through hole.
Claims (1)
真空蒸着法により該基板上に選択的に薄膜を形成
するためのマスキング部材であつて、前記基板側
を絞つた構造の透孔を設けたことを特徴とするマ
スキング部材。 (2) 透孔は断面積の異なるものを複数個設け、
断面積の大なるものから小なるものへ順次配設し
たことを特徴とする実用新案登録請求の範囲第１
項記載のマスキング部材。[Scope of claims for utility model registration] (1) Adhesion to a transparent substrate, sputtering method,
1. A masking member for selectively forming a thin film on a substrate by a vacuum evaporation method, the masking member comprising a through hole having a narrow structure on the substrate side. (2) Provide multiple through holes with different cross-sectional areas,
Utility model registration claim 1 characterized in that the cross-sectional area is arranged in order from larger to smaller.
Masking member described in section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11892789U JPH0357954U (en) | 1989-10-11 | 1989-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11892789U JPH0357954U (en) | 1989-10-11 | 1989-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0357954U true JPH0357954U (en) | 1991-06-05 |
Family
ID=31667068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11892789U Pending JPH0357954U (en) | 1989-10-11 | 1989-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0357954U (en) |
-
1989
- 1989-10-11 JP JP11892789U patent/JPH0357954U/ja active Pending
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