JPH0359933A - Fluorescent character display tube - Google Patents
Fluorescent character display tubeInfo
- Publication number
- JPH0359933A JPH0359933A JP19259789A JP19259789A JPH0359933A JP H0359933 A JPH0359933 A JP H0359933A JP 19259789 A JP19259789 A JP 19259789A JP 19259789 A JP19259789 A JP 19259789A JP H0359933 A JPH0359933 A JP H0359933A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- face glass
- film filter
- display tube
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims abstract description 44
- 239000010409 thin film Substances 0.000 claims abstract description 35
- 239000010408 film Substances 0.000 abstract description 13
- 239000002184 metal Substances 0.000 abstract description 10
- 229910052751 metal Inorganic materials 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 6
- 230000006866 deterioration Effects 0.000 abstract description 4
- 238000002845 discoloration Methods 0.000 abstract description 4
- 238000005477 sputtering target Methods 0.000 abstract description 2
- 230000032683 aging Effects 0.000 abstract 2
- 230000005855 radiation Effects 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000002131 composite material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 210000000496 pancreas Anatomy 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は螢光表示管に係わジ、特にフェースガラスの反
射防止構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fluorescent display tube, and particularly to an antireflection structure of a face glass.
通常、フェースガラス側から表示情報を観察するタイプ
の螢光表示管は、第４図に示すように例えばガラス基板
１上に導電層２．絶縁層３．アノード電極４１螢光体層
５．グリッド電極６およびフイラメン）７などの主要構
成部材を搭載した基板組立体８と、透光性フェースガラ
ス９にスペーサガラス１０を接着させたフェースガラス
組立体１１とを対向させ、７リツトガラス１２によシ封
着させた後、排気管１３から排気を行ない、内部を真空
状態に保持して排気管１３のチップオフを行なって製作
していた。オた、上述した透光性フェースガラス９の内
面側（真空側）には、静電気の帯電による螢光体層５の
発光不良を防止するために例えばネサ膜もしくはＩＴＯ
（Ｉｎｄｉｕｍ −Ｔｉｎ −０ｘｉｄｅ ）膜などの
透明導電膜１４が形成されている。ｉお、１５はリード
ビン、１６は導電パッドである。Normally, a type of fluorescent display tube in which display information is observed from the face glass side has a conductive layer 2 on a glass substrate 1, for example, as shown in FIG. Insulating layer 3. Anode electrode 41 phosphor layer 5. A substrate assembly 8 on which main components such as a grid electrode 6 and a filament 7 are mounted, and a face glass assembly 11 in which a spacer glass 10 is bonded to a translucent face glass 9 are placed facing each other. After sealing, the exhaust pipe 13 is evacuated, the inside is maintained in a vacuum state, and the exhaust pipe 13 is tipped off. Additionally, on the inner surface side (vacuum side) of the above-mentioned translucent face glass 9, for example, a Nesa film or an ITO film is coated on the inner surface side (vacuum side) to prevent poor light emission of the phosphor layer 5 due to static electricity charging.
A transparent conductive film 14 such as an (Indium-Tin-Oxide) film is formed. 15 is a lead bin, and 16 is a conductive pad.
このようにＳ威される螢光表示管は、ユーザが使用する
場合、フェースガラス９が透光性であることから、表示
領域以外に内部の構成部材が筏認できない程度に有色の
極めて濃いフィルタを用いて表示内容の鮮明度を出現さ
せるとともに外部光の反射による表示の視認性の低下を
軽減させていた。When a user uses a fluorescent display tube that is threatened in this way, since the face glass 9 is translucent, a very dark colored filter is used so that the internal components other than the display area cannot be seen. This was used to increase the clarity of the displayed content and to reduce the reduction in visibility of the display due to reflection of external light.
しかしながら、従来の螢光表示管は、実際の使用におい
て、フィルタの使用が不可欠であるが、通常用いられる
低コストのプラスチック系のフィルタでは、紫外線、熱
線などによる退色や素材の脆化が発生するために例えば
公衆電話器などの屋外に常設される設備の表示素子とし
て使用できないという問題があった。However, in actual use, conventional fluorescent display tubes require the use of filters, but the commonly used low-cost plastic filters suffer from discoloration and embrittlement of the material due to ultraviolet rays, heat rays, etc. Therefore, there was a problem in that it could not be used as a display element for equipment permanently installed outdoors, such as a public telephone.
したがって本発明は、上述したプラスチック系フィルタ
の欠陥に起因する螢光表示管利用上の範囲の制約を改善
するためになされたもので、その目的は、紫外線や熱線
による退色や素材の劣化が極めて少ないフィルタ効果を
有する螢光表示管を提供することにある。Therefore, the present invention has been made in order to improve the limitations on the range of use of fluorescent display tubes caused by the above-mentioned defects in plastic filters. An object of the present invention is to provide a fluorescent display tube having a reduced filter effect.
本発明は透光性ガラスを通して表示情報を観察する螢光
表示管にかいて、この透光性ガラス面に耐熱性薄膜フィ
ルタを形成するものである。The present invention is a fluorescent display tube in which display information is observed through a light-transmitting glass, and a heat-resistant thin film filter is formed on the surface of the light-transmitting glass.
本発明における耐熱性薄膜フィルタは、紫外線や熱線力
どによる退色や素材の劣化を著しく低減させる。The heat-resistant thin film filter of the present invention significantly reduces discoloration and material deterioration caused by ultraviolet rays, heat rays, etc.
〔実施例〕 以下、図面を用いて本発明の実施例を詳細に説明する。〔Example〕 Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明による螢光表示管の一実施例を説明する
ためのフェースガラスの要部拡大断面図である。同図に
おいて、矢印Ａ方向から表示情報を観察する透光性フェ
ースガラス２０の真空容器の内側となる内面には金属も
しくは複合金属の低級酸化物からなる薄膜フィルタ２１
が形成されている。この薄膜フィルタ２１は、第２図に
示すようにスパッタリングターゲットとしてＡｔ板３０
にＷ酸化物３１を占有面積比で約２５％の割合で埋め込
んだ複合ターゲット３２を用いて通常のスパッタリング
法によシ透光性フェースガラス２０の真空容器の内側と
なる面上に約８０ＯＡ の厚さに堆積してＡ Ｌ ：
ＷＯ３膜を形成する。この透光性フェースガラス２０に
薄膜フィルタ２１を形成したフェースガラスを用いて従
来と同様の螢光表示管製造工程によシ螢光表示管を製作
したところ、上記透光性フェースガラス２０面に薄膜フ
ィルタ２１を形成したフェースガラスの透過率は約３０
３
嘩であった。この透過率の値は、フェースガラス２０に
薄膜フィルタ２１を形成した直後の値（約２２多）の約
１．５倍以内であシ、螢光表示管組立工程におけるフリ
ットガラス１２（第４図参照）の仮焼成工程（空気巾約
４１０℃）、封止工程（窒素巾約４５０℃）および排気
工程（真空巾約３５０℃）の各熱工程における透過率の
変化はそれぞれ僅かであｊｌ） 、Ａ ｔ ： Ｗ Ｏ
３薄膜フイルタ２１は、螢光表示管製造の熱工程に対し
て充分な耐熱性を有することが判明した。着た、同時に
帯電防止機能が得られた。FIG. 1 is an enlarged sectional view of a main part of a face glass for explaining one embodiment of a fluorescent display tube according to the present invention. In the figure, a thin film filter 21 made of a lower oxide of metal or composite metal is provided on the inner surface of the vacuum container of a translucent face glass 20 through which display information is observed from the direction of arrow A.
is formed. This thin film filter 21 is attached to an At plate 30 as a sputtering target as shown in FIG.
A composite target 32 in which W oxide 31 is embedded at a ratio of approximately 25% of the occupied area is used to deposit approximately 80 OA onto the surface of the translucent face glass 20 that will become the inside of the vacuum chamber by a normal sputtering method. Deposited to thickness AL:
Form a WO3 film. When a fluorescent display tube was manufactured using a face glass in which a thin film filter 21 was formed on the transparent face glass 20 using the same conventional fluorescent display tube manufacturing process, it was found that the surface of the transparent face glass 20 was The transmittance of the face glass on which the thin film filter 21 is formed is approximately 30.
3. There was a fight. The value of this transmittance must be within about 1.5 times the value immediately after forming the thin film filter 21 on the face glass 20 (approximately 22 times). The change in transmittance during each thermal process of the pre-firing process (air width approx. 410℃), sealing process (nitrogen width approx. 450℃), and evacuation process (vacuum width approx. 350℃) (see) is slight. , At: W O
It has been found that the 3 thin film filter 21 has sufficient heat resistance for the thermal process of manufacturing fluorescent display tubes. At the same time, anti-static function was obtained.
なお、この薄膜フィルタの透過率は、Ａｔ板３０に対す
るＷ酸化物３１の占有面積比を変化させることにより（
酸化の程度を変化させることによシ）、５〜９０％の間
の任意の値を得ることが可能である。會た、内面に薄膜
フィルタ２１を形成したフェースガラス２０の表面から
見た外部光の反射率は、薄膜フィルタ２１の透過率によ
シ変るが、６〜２０％程度であり、通常の内面側に帯電
防止用透明導電膜１４を形成したフェースガラス９（第
４−
４図参照）の１３〜１４嘩に比較してほとんど遜色女＜
、条件によってはむしろ良い結果が得られた。Note that the transmittance of this thin film filter can be changed by changing the occupied area ratio of the W oxide 31 to the At plate 30 (
By varying the degree of oxidation, it is possible to obtain any value between 5 and 90%. The reflectance of external light seen from the surface of the face glass 20 with the thin film filter 21 formed on the inner surface varies depending on the transmittance of the thin film filter 21, but is about 6 to 20%, It is almost inferior to the face glass 9 (see Fig. 4-4) with the antistatic transparent conductive film 14 formed on it (see Figure 4-4).
, rather good results were obtained depending on the conditions.
第３図は本発明による螢光表示管の他の実施例を説明す
るための７エースガラス基板の要部拡大断面図である。FIG. 3 is an enlarged sectional view of a main part of a 7Ace glass substrate for explaining another embodiment of a fluorescent display tube according to the present invention.
同図に訃いて、矢印Ａ方向から表示情報を観察する透光
性フェースガラス２０の真空容器の内側となる内面には
誘電体（Ｚｒ０２）をスパッタリング法によシ約８０Ｏ
Ａの厚さに堆積して誘電体薄膜２２が形成され、さらに
この誘電体薄膜２２上にはＡｔ板にＴｉ酸化物の小片を
占有面積比で約２５嘩の割合で埋め込んだ複合ターゲッ
トを用いてスパッタリング法によう約６０ＯＡの厚さの
Ａ Ｌ ： Ｔ ｉ Ｏｚ膜２３が堆積されて透光性フ
ェースガラス２０面上に誘電体薄膜２２とＡｔ： Ｔ
ｉＯＺ膜２３との２層構造からなる薄膜フィルタ２４が
形成されている。この２層構造の薄膜フィルタ２４にお
いても、その透過率はＡ４板に対するＴｉ酸化物の占有
面積比を変化させることにより、５〜９０％の間の任意
の値を得ることが可能であり、ｔた、このフェースガラ
ス２ｏの表面側から見た外部光の反射率は５〜６％と低
減させることができるとともに反射率のばらつきを最小
限に抑えることができた。Turning to the same figure, a dielectric material (Zr02) is applied to the inner surface of the vacuum container of the translucent face glass 20 through which display information is observed from the direction of arrow A by sputtering.
A dielectric thin film 22 is formed by depositing it to a thickness of A, and on this dielectric thin film 22, a composite target is used, in which small pieces of Ti oxide are embedded in an At plate at an occupied area ratio of about 25 mm. Then, an A L:TiOz film 23 with a thickness of about 60 OA is deposited by sputtering, and a dielectric thin film 22 and an At:T film are deposited on the light-transmitting face glass 20 surface.
A thin film filter 24 having a two-layer structure with an iOZ film 23 is formed. Even in this two-layer structure thin film filter 24, its transmittance can be set to any value between 5 and 90% by changing the area ratio occupied by Ti oxide to the A4 plate. In addition, the reflectance of external light viewed from the surface side of the face glass 2o could be reduced to 5 to 6%, and variations in reflectance could be minimized.
このように透光性フェースガラス２０の内面に薄膜フィ
ルタ２１．２４を形成した螢光表示管では、従来の帯電
防止用透明導電膜１４（第４図参照）を形成した螢光表
示管と比較すると、高温度（＋８５℃）での螢光体層５
の輝度劣化がほとんどなく、螢光表示管自体の耐環境性
を大幅に向上させることができた。In this way, a fluorescent display tube in which thin film filters 21 and 24 are formed on the inner surface of the translucent face glass 20 is compared with a fluorescent display tube in which a conventional antistatic transparent conductive film 14 (see FIG. 4) is formed. Then, the phosphor layer 5 at high temperature (+85°C)
There was almost no deterioration in brightness, and the environmental resistance of the fluorescent display tube itself was significantly improved.
寸た、発明者らの実験によれば、上記フェースガラス２
００代シに通常のブラウン管に用いるノングレアガラス
を用しることによシ、上述した各実施例におして、反射
率をさらに４０〜５０％程度に低減が可能となった。さ
らに通常用いられているようにフェースガラス２０の表
面側にＭｇＦ２をコーティングすることによシ、内面側
に薄膜フィルタ２１もしくは薄膜フィルタ２４を形成し
たフェースガラス２００反射率の内のフェースガラ２２
０表面からの反射率成分約４％を、約１．５嘩に低減、
すなわち上記各実施例において、さらに約２．５％程度
の反射率を低減させることができた。According to experiments conducted by the inventors, the above-mentioned face glass 2
By using non-glare glass used in ordinary cathode ray tubes, it became possible to further reduce the reflectance to about 40 to 50% in each of the above-mentioned examples. Furthermore, by coating MgF2 on the surface side of the face glass 20 as is commonly used, the face glass 22 of the face glass 200 has a thin film filter 21 or a thin film filter 24 formed on the inner surface side.
The reflectance component from the zero surface is reduced to about 1.5%,
That is, in each of the above examples, it was possible to further reduce the reflectance by about 2.5%.
豊た、薄膜フィルタの材料としてＳｔもしくはＳｌの低
級酸化物（ＳｉＯｘ） を用いることにょｂ１ガラス基
板側から表示情報を観察する構成の螢光表示管において
も、ガラス基板の内面への薄膜フィルタの形成が可能で
ある。なお、ガラス基板側から表示情報を観察する構成
の螢光表示管では、その構造上、薄膜フィルタは帯電防
止機能を兼用する必要性がないので、薄膜フィルタは真
空容器の外側となるガラス基板面に形成し°Ｃも良い。By using a lower oxide of St or Sl (SiOx) as the material for the thin film filter, it is possible to use a thin film filter on the inner surface of the glass substrate even in a fluorescent display tube configured to observe displayed information from the glass substrate side. Formation is possible. In addition, in a fluorescent display tube configured to observe display information from the glass substrate side, there is no need for the thin film filter to also have an antistatic function due to its structure, so the thin film filter is attached to the glass substrate surface which is the outside of the vacuum container. The temperature is good.
なか、上述した実施例においては、耐熱導電性薄膜フィ
ルタとして金属もしくは複合金属の低級酸化物のみにつ
いて説明したが、金属もしくは複合金属の低級窒化膜に
おいても導電性を有することが知られているので、これ
らについても螢光表示管の製造上の熱工程に耐え得るも
のであれば、上記実施例で説明した帯電防止用膜を兼用
する薄膜フィルタとして用いることが可能である。さら
に上述した螢光表示管の製造工程における熱工程に耐え
得るものであれば、金属もしくは複合金属の炭化物も薄
膜フィルタとして用いることができることは言う笠でも
ない。In the above embodiments, only lower oxides of metals or composite metals were described as heat-resistant conductive thin film filters, but it is known that lower nitride films of metals or composite metals also have conductivity. As long as these materials can withstand the thermal process of manufacturing fluorescent display tubes, they can be used as thin film filters that also serve as the antistatic film described in the above embodiments. Furthermore, it is needless to say that carbides of metals or composite metals can also be used as thin film filters, as long as they can withstand the heat process in the above-mentioned fluorescent display tube manufacturing process.
以上説明したように本発明による螢光表示管は、表示情
報を観察する透光性ガラス面に耐熱性薄膜フィルタを形
成したことにより、従来螢光表示管の利用が阻せれてい
た戸外での螢光表示管の使用が可能となり、螢光表示管
の利用範囲の拡大とともに螢光表示管自体の耐環境性を
大幅に向上できるなどの極めて優れた効果が得られる。As explained above, the fluorescent display tube according to the present invention has a heat-resistant thin film filter formed on the transparent glass surface on which display information is observed, so that it can be used outdoors, where the use of fluorescent display tubes has traditionally been prohibited. It becomes possible to use a fluorescent display tube, and extremely excellent effects such as expanding the range of use of the fluorescent display tube and greatly improving the environmental resistance of the fluorescent display tube itself can be obtained.
第１図は本発明による螢光表示管の一実施例を説明する
ためのフェースガラスの要部拡大断面図、第２図（ａ）
、 （ｂ）は耐熱導電性薄膜フィルタを形成する複合タ
ーゲットを示すその平面図、そのＢ−Ｂ’線断面図、第
３図は本発明による螢光表示管の他の実施例を説明する
ためのフェースガラスの要部拡大断面図、第４図は従来
の螢光表示管を示す断面図である。
２０・・・・透光性フェースガラス、２１・・・・薄膜
フィルタ、２２・・・・誘電体薄膜、２３◆・・・Ａ
Ｚ ： Ｔ ｓ Ｏ２膵、２４・・・・薄膜フィルタ。FIG. 1 is an enlarged sectional view of the main part of the face glass for explaining one embodiment of the fluorescent display tube according to the present invention, and FIG. 2(a)
, (b) is a plan view showing a composite target forming a heat-resistant conductive thin film filter, and a sectional view taken along the line B-B', and FIG. 3 is for explaining another embodiment of the fluorescent display tube according to the present invention. FIG. 4 is an enlarged cross-sectional view of a main part of the face glass of FIG. 4, and FIG. 4 is a cross-sectional view showing a conventional fluorescent display tube. 20... Translucent face glass, 21... Thin film filter, 22... Dielectric thin film, 23◆...A
Z: T s O2 pancreas, 24...thin film filter.
Claims (1)
おいて、上記透光性ガラス面に耐熱性薄膜フィルタを形
成したことを特徴とする螢光表示管。1. A fluorescent display tube for observing displayed information through transparent glass, characterized in that a heat-resistant thin film filter is formed on the surface of the transparent glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19259789A JPH0359933A (en) | 1989-07-27 | 1989-07-27 | Fluorescent character display tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19259789A JPH0359933A (en) | 1989-07-27 | 1989-07-27 | Fluorescent character display tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0359933A true JPH0359933A (en) | 1991-03-14 |
Family
ID=16293915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19259789A Pending JPH0359933A (en) | 1989-07-27 | 1989-07-27 | Fluorescent character display tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0359933A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5736658B2 (en) * | 1978-05-25 | 1982-08-05 |
-
1989
- 1989-07-27 JP JP19259789A patent/JPH0359933A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5736658B2 (en) * | 1978-05-25 | 1982-08-05 |
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