JPH0359984B2 - - Google Patents

Info

Publication number
JPH0359984B2
JPH0359984B2 JP8657785A JP8657785A JPH0359984B2 JP H0359984 B2 JPH0359984 B2 JP H0359984B2 JP 8657785 A JP8657785 A JP 8657785A JP 8657785 A JP8657785 A JP 8657785A JP H0359984 B2 JPH0359984 B2 JP H0359984B2
Authority
JP
Japan
Prior art keywords
crucible
filament
thin film
film forming
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8657785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61246359A (ja
Inventor
Eisaku Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8657785A priority Critical patent/JPS61246359A/ja
Publication of JPS61246359A publication Critical patent/JPS61246359A/ja
Publication of JPH0359984B2 publication Critical patent/JPH0359984B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8657785A 1985-04-24 1985-04-24 薄膜形成装置 Granted JPS61246359A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8657785A JPS61246359A (ja) 1985-04-24 1985-04-24 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8657785A JPS61246359A (ja) 1985-04-24 1985-04-24 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS61246359A JPS61246359A (ja) 1986-11-01
JPH0359984B2 true JPH0359984B2 ( ) 1991-09-12

Family

ID=13890859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8657785A Granted JPS61246359A (ja) 1985-04-24 1985-04-24 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS61246359A ( )

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100719664B1 (ko) 2005-08-30 2007-05-17 삼성에스디아이 주식회사 도가니를 채용한 증발원

Also Published As

Publication number Publication date
JPS61246359A (ja) 1986-11-01

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