JPH0360044U - - Google Patents
Info
- Publication number
- JPH0360044U JPH0360044U JP12189989U JP12189989U JPH0360044U JP H0360044 U JPH0360044 U JP H0360044U JP 12189989 U JP12189989 U JP 12189989U JP 12189989 U JP12189989 U JP 12189989U JP H0360044 U JPH0360044 U JP H0360044U
- Authority
- JP
- Japan
- Prior art keywords
- wall portion
- thin wall
- pressure
- sensitive element
- pressure sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案が適用された圧力検出装置の一
例である脈波センサを示す図であつて、一部を切
り欠いて示す図である。第２図は第１図の要部を
拡大して示す図である。第３図は第１図の脈波セ
ンサにおいて検出される圧力の電気変換効率を示
す図であつて、従来と比較して示す図である。第
４図は本考案が適用された圧力検出装置の他の例
を示す図であつて、断面にして示す図である。
１０…脈波センサ（圧力検出装置）、１６，３
８…半導体基板、１８…ＬＥＤ（発光手段）、２
４，４６…薄肉部、２６，４８…感圧ダイオード
（感圧素子）。
FIG. 1 is a partially cutaway diagram showing a pulse wave sensor which is an example of a pressure detection device to which the present invention is applied. FIG. 2 is an enlarged view of the main part of FIG. 1. FIG. 3 is a diagram showing the electrical conversion efficiency of the pressure detected in the pulse wave sensor of FIG. 1, and is a diagram comparing it with the conventional one. FIG. 4 is a cross-sectional view showing another example of the pressure detection device to which the present invention is applied. 10...Pulse wave sensor (pressure detection device), 16,3
8... Semiconductor substrate, 18... LED (light emitting means), 2
4, 46... Thin wall portion, 26, 48... Pressure sensitive diode (pressure sensitive element).
Claims (1)
された半導体材料製の感圧素子とを備え、該薄肉
部に加えられた圧力により該薄肉部に生ずる歪を
該感圧素子にて電気信号に変換して出力する形式
の圧力検出装置において、 前記感圧素子に向つて光を照射するための発光
手段を設けたことを特徴とする圧力検出装置。[Claims for Utility Model Registration] A semiconductor substrate having a thin wall portion and a pressure-sensitive element made of a semiconductor material formed on the thin wall portion, which is capable of suppressing strain caused in the thin wall portion by pressure applied to the thin wall portion. A pressure detecting device of a type in which the pressure sensitive element converts the signal into an electrical signal and outputs the same, characterized in that a light emitting means for irradiating light toward the pressure sensitive element is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12189989U JPH0733144Y2 (en) | 1989-10-18 | 1989-10-18 | Pressure detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12189989U JPH0733144Y2 (en) | 1989-10-18 | 1989-10-18 | Pressure detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0360044U true JPH0360044U (en) | 1991-06-13 |
| JPH0733144Y2 JPH0733144Y2 (en) | 1995-07-31 |
Family
ID=31669921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12189989U Expired - Fee Related JPH0733144Y2 (en) | 1989-10-18 | 1989-10-18 | Pressure detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733144Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007186856A (en) * | 2006-01-11 | 2007-07-26 | Epia:Kk | Roofing with solar cells |
-
1989
- 1989-10-18 JP JP12189989U patent/JPH0733144Y2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007186856A (en) * | 2006-01-11 | 2007-07-26 | Epia:Kk | Roofing with solar cells |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733144Y2 (en) | 1995-07-31 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |