JPH0360044U - - Google Patents

Info

Publication number
JPH0360044U
JPH0360044U JP12189989U JP12189989U JPH0360044U JP H0360044 U JPH0360044 U JP H0360044U JP 12189989 U JP12189989 U JP 12189989U JP 12189989 U JP12189989 U JP 12189989U JP H0360044 U JPH0360044 U JP H0360044U
Authority
JP
Japan
Prior art keywords
wall portion
thin wall
pressure
sensitive element
pressure sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12189989U
Other languages
English (en)
Other versions
JPH0733144Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12189989U priority Critical patent/JPH0733144Y2/ja
Publication of JPH0360044U publication Critical patent/JPH0360044U/ja
Application granted granted Critical
Publication of JPH0733144Y2 publication Critical patent/JPH0733144Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第１図は本考案が適用された圧力検出装置の一
例である脈波センサを示す図であつて、一部を切
り欠いて示す図である。第２図は第１図の要部を
拡大して示す図である。第３図は第１図の脈波セ
ンサにおいて検出される圧力の電気変換効率を示
す図であつて、従来と比較して示す図である。第
４図は本考案が適用された圧力検出装置の他の例
を示す図であつて、断面にして示す図である。 １０…脈波センサ（圧力検出装置）、１６，３
８…半導体基板、１８…ＬＥＤ（発光手段）、２
４，４６…薄肉部、２６，４８…感圧ダイオード
（感圧素子）。

Claims (1)

  1. 【実用新案登録請求の範囲】 薄肉部を有する半導体基板と、該薄肉部に形成
    された半導体材料製の感圧素子とを備え、該薄肉
    部に加えられた圧力により該薄肉部に生ずる歪を
    該感圧素子にて電気信号に変換して出力する形式
    の圧力検出装置において、 前記感圧素子に向つて光を照射するための発光
    手段を設けたことを特徴とする圧力検出装置。
JP12189989U 1989-10-18 1989-10-18 圧力検出装置 Expired - Fee Related JPH0733144Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12189989U JPH0733144Y2 (ja) 1989-10-18 1989-10-18 圧力検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12189989U JPH0733144Y2 (ja) 1989-10-18 1989-10-18 圧力検出装置

Publications (2)

Publication Number Publication Date
JPH0360044U true JPH0360044U (ja) 1991-06-13
JPH0733144Y2 JPH0733144Y2 (ja) 1995-07-31

Family

ID=31669921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12189989U Expired - Fee Related JPH0733144Y2 (ja) 1989-10-18 1989-10-18 圧力検出装置

Country Status (1)

Country Link
JP (1) JPH0733144Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007186856A (ja) * 2006-01-11 2007-07-26 Epia:Kk 太陽電池付き屋根材

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007186856A (ja) * 2006-01-11 2007-07-26 Epia:Kk 太陽電池付き屋根材

Also Published As

Publication number Publication date
JPH0733144Y2 (ja) 1995-07-31

Similar Documents

Publication Publication Date Title
JPH0360044U (ja)
JPS599358Y2 (ja) 警報装置
JPH0233386U (ja)
JPH0361356U (ja)
JPS6340829U (ja)
JPH0451909U (ja)
JPS61100162U (ja)
JPS6340830U (ja)
JPS6381278U (ja)
JPH0263474U (ja)
JPH0296104U (ja)
JPS6399322U (ja)
JPS6348296U (ja)
JPS6442427U (ja)
JPH0189323U (ja)
JPH0177709U (ja)
JPS6321543U (ja)
JPS6185565U (ja)
JPH0365915U (ja)
JPS62168528U (ja)
JPS588177U (ja) 被検出物の有無を検出する装置
JPS62155814U (ja)
JPS62158329U (ja)
JPH03110836U (ja)
JPH0159923U (ja)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees