JPH0361339U - - Google Patents
Info
- Publication number
- JPH0361339U JPH0361339U JP12223389U JP12223389U JPH0361339U JP H0361339 U JPH0361339 U JP H0361339U JP 12223389 U JP12223389 U JP 12223389U JP 12223389 U JP12223389 U JP 12223389U JP H0361339 U JPH0361339 U JP H0361339U
- Authority
- JP
- Japan
- Prior art keywords
- performance board
- prober
- semiconductor wafer
- test head
- wafer inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 4
- 239000000523 sample Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例を示す半導体ウエハ
ー検査装置の構成図で、Ａは要部側面図、Ｂは顕
微鏡の覗き穴の上部から見た要部平面図、第２図
は本考案の半導体ウエハー検査装置の信号の流れ
を示す説明図である。
１１……ＩＣウエハー、１２……プローブピン
、１５……パフオーマンスボード、１６……可動
プローブプレート、１９……テストヘツド、２０
……中継リング、２３……補助パフオーマンスボ
ード。
Fig. 1 is a configuration diagram of a semiconductor wafer inspection system showing an embodiment of the present invention, in which A is a side view of the main parts, B is a plan view of the main parts as seen from the top of the peephole of the microscope, and Fig. 2 is a diagram of the present invention. FIG. 2 is an explanatory diagram showing the flow of signals in the semiconductor wafer inspection apparatus of FIG. 11...IC wafer, 12...probe pin, 15...performance board, 16...movable probe plate, 19...test head, 20
...Relay ring, 23...Auxiliary performance board.
Claims (1)
を単位チツプ毎に検査するプローバーと、このプ
ローバーと電気信号を授受するテストヘツドを備
えた半導体ウエハー検査装置において、 前記プローバーと前記テストヘツドの間に、 前記プローバーのプローブソツケトカードが電
気的に接続されるパフオーマンスボードと、 このパフオーマンスボード上に重層固定されて
、前記プローバーに近接するように設けられた補
助パフオーマンスボードとを設けるとともに、 前記テストヘツドは、 前記補助パフオーマンスボード上に実装された
電子部品に近接した距離にテストヘツドを設ける
ように、前記パフオーマンスボードと電気的及び
機械的に接続された中継リングと、 を有したことを特徴とする半導体ウエハー検査装
置。[Claims for Utility Model Registration] A semiconductor wafer inspection apparatus comprising a prober for inspecting each semiconductor chip formed in a semiconductor wafer unit by unit, and a test head for transmitting and receiving electrical signals to and from the prober, comprising: A performance board to which a probe socket card of the prober is electrically connected is provided between the test heads, and an auxiliary performance board is fixed to the performance board in a layered manner and is provided close to the prober. , the test head comprises: a relay ring electrically and mechanically connected to the performance board so that the test head is located close to the electronic components mounted on the auxiliary performance board. Semiconductor wafer inspection equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12223389U JPH079380Y2 (en) | 1989-10-20 | 1989-10-20 | Semiconductor wafer inspection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12223389U JPH079380Y2 (en) | 1989-10-20 | 1989-10-20 | Semiconductor wafer inspection system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0361339U true JPH0361339U (en) | 1991-06-17 |
| JPH079380Y2 JPH079380Y2 (en) | 1995-03-06 |
Family
ID=31670243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12223389U Expired - Lifetime JPH079380Y2 (en) | 1989-10-20 | 1989-10-20 | Semiconductor wafer inspection system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079380Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007322372A (en) * | 2006-06-05 | 2007-12-13 | Yokogawa Electric Corp | IC tester |
| JP2010074091A (en) * | 2008-09-22 | 2010-04-02 | Tokyo Electron Ltd | Probe device |
| JP2012135441A (en) * | 2010-12-27 | 2012-07-19 | Tadashi Iwata | Swingable nursing care bed |
-
1989
- 1989-10-20 JP JP12223389U patent/JPH079380Y2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007322372A (en) * | 2006-06-05 | 2007-12-13 | Yokogawa Electric Corp | IC tester |
| JP2010074091A (en) * | 2008-09-22 | 2010-04-02 | Tokyo Electron Ltd | Probe device |
| JP2012135441A (en) * | 2010-12-27 | 2012-07-19 | Tadashi Iwata | Swingable nursing care bed |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079380Y2 (en) | 1995-03-06 |
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