JPH0363935U - - Google Patents
Info
- Publication number
- JPH0363935U JPH0363935U JP12635689U JP12635689U JPH0363935U JP H0363935 U JPH0363935 U JP H0363935U JP 12635689 U JP12635689 U JP 12635689U JP 12635689 U JP12635689 U JP 12635689U JP H0363935 U JPH0363935 U JP H0363935U
- Authority
- JP
- Japan
- Prior art keywords
- socket
- information recording
- attached
- probe
- card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 5
- 239000008188 pellet Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案に係る特性測定装置の実施例を
示す要部平面図、第２図はペレツトウエーハの平
面図、第３図は従来の特性測定装置の一具体例を
示す概略側面図、第４図と第５図は第３図装置の
要部であるプローブカードの要部側断面図と平面
図である。
６……プローブカード、７……ソケツト、８…
…情報記録部、９……記録情報取り出し部。
FIG. 1 is a plan view of essential parts showing an embodiment of a characteristic measuring device according to the present invention, FIG. 2 is a plan view of a pellet wafer, and FIG. 3 is a schematic side view showing a specific example of a conventional characteristic measuring device. 4 and 5 are a sectional side view and a plan view of a main part of a probe card, which is a main part of the apparatus shown in FIG. 3. 6...probe card, 7...socket, 8...
... Information recording section, 9... Recorded information retrieval section.
Claims (1)
各々に配設した１又は多数の電極パツドに対応す
る測定ピンを下方に植設したプローブカードと、
上記プローブカードの固定用ソケツトと、上記ソ
ケツトに接続した計測器とを有し、上記測定ピン
を各ペレツト毎の電極パツドに一度に接触させて
ペレツトの電気的特性を測定する装置において、 上記プローブカード及びソケツトに位置決めし
てそれぞれ付加された情報記録部及びその取り出
し部と、上記計測器に付加された上記情報記録部
の読取機構とを具備したことを特徴とする特性測
定装置。[Claims for Utility Model Registration] A probe card in which measurement pins corresponding to one or more electrode pads arranged on each of a plurality of pellets formed on a semiconductor wafer are implanted downward;
In an apparatus comprising a socket for fixing the probe card and a measuring instrument connected to the socket, the measuring pin is brought into contact with the electrode pad of each pellet at once to measure the electrical characteristics of the pellets, the probe What is claimed is: 1. A characteristic measuring device comprising: an information recording section and a retrieval section thereof, which are positioned and attached to a card and a socket; and a reading mechanism for the information recording section, which is attached to the measuring instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12635689U JPH0363935U (en) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12635689U JPH0363935U (en) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0363935U true JPH0363935U (en) | 1991-06-21 |
Family
ID=31674170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12635689U Pending JPH0363935U (en) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0363935U (en) |
-
1989
- 1989-10-26 JP JP12635689U patent/JPH0363935U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6276273A (en) | Ic socket | |
| JPH0363935U (en) | ||
| JPS6276274A (en) | Ic socket | |
| JPH04115545A (en) | Probe card | |
| JPS61136542U (en) | ||
| JPH01121867U (en) | ||
| JPH0328465U (en) | ||
| JPS60183877U (en) | IC handler measurement socket | |
| JPH02309260A (en) | Probe pin | |
| JPH0390081U (en) | ||
| JPS62134244U (en) | ||
| JPS60191978U (en) | IC inspection equipment | |
| JPH0463133U (en) | ||
| JPH0428442U (en) | ||
| JPS58164236U (en) | Semiconductor wafer characteristic measurement equipment | |
| JPH028037U (en) | ||
| JPS58148933U (en) | integrated circuit measurement equipment | |
| JPS5868036U (en) | Semiconductor integrated circuit measurement equipment | |
| JPS60183442U (en) | Integrated circuit measurement jig | |
| JPS62295426A (en) | Probe card | |
| JPS62170543U (en) | ||
| JPH044754U (en) | ||
| JPS63109674U (en) | ||
| JPH02729U (en) | ||
| JPS58148934U (en) | integrated circuit measurement equipment |