JPH0363944A - Resist coating equipment for optical disc masters - Google Patents

Abstract

PURPOSE:To allow the free change of a resist diluting concn. and the arbitrary and easy change of the thickness of the film to be formed by constituting the device in such a manner that a resist liquid can be mixed and diluted in the device and the pressure to be applied on the resist liquid and resist diluting liquid is changed. CONSTITUTION:The stock resist soln. is put into a resist liquid supplying tank 14 and the resist diluting liquid into a resist diluting liquid supplying tank 16. The respective pressures thereof are set by regulators 15, 17 for pressure regulation. An optical master disk 11 is then placed on a turn table 12c and while the disk is rotated at a specified low speed by a motor 12d for revolution, a solenoid valve 13 for liquid discharge is opened and closed to discharge the diluted resist liquid onto the optical master disk 11; thereafter the disk is rotated at the specified angular speed corresponding to the thickness of the film to be formed, by which the formation of the resist film is executed. The resist films of any thicknesses are easily formed in this way.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a resist coating apparatus for optical disc masters for producing optical discs such as video discs, digital audio discs, and still image one-document films.

Conventional technology In general, optical discs are seen as promising information media because of their extremely high information density, high S/N ratio, and low noise, and have been commercialized as video discs and digital audio discs, and are used to transmit digital signals. In recent years, research and development has been conducted on optical discs for recording and reproducing information.

Hereinafter, an example of the above-described conventional resin coater for optical disc master will be explained with reference to the drawings. Figure 3 is a block diagram of a conventional resist coating device for optical disk masters, and Figure 4 is a block diagram of a resist coating device for a conventional optical disc master. Figure 6 shows the relationship between the number of revolutions and the resist film thickness when the resist solution concentration is constant. This is a graph showing.

In Fig. 3, 1 is an optical disk master, 2 is a rotating part consisting of a turn tape/L/a and a motor b, 3 is a solenoid valve for discharging a resist solution, and 4 is a tank for supplying a resist solution diluted to a constant level. It is. To apply the resist solution, the resist solution is diluted in advance according to the thickness of the film to be formed as shown in the graph of FIG. lv
A, the resist liquid is placed on the optical disc master 1, rotated at a constant low speed by the rotation motor b, and opened and closed by the electromagnetic valve 3 for discharging the liquid. The resist film is formed by rotating at a constant angular velocity according to the rotation speed.

Problems to be Solved by the Invention However, with the above configuration, the thickness of the film formed can be set within a narrow range (about 1 to 2 times) by changing the rotation speed, but it is possible to set the film thickness within a narrow range (about 1 to 2 times); When forming a film that is twice as thick (more than twice as thick), it is necessary to prepare a resist solution with a different resist concentration depending on the film thickness each time, and replace it with a resist solution with a different diluted concentration. It won't happen. Therefore, more resist solution button and resist diluent are required than necessary, and the resist solution must be replaced with one diluted to the required concentration according to the film thickness, which takes time.
Dust and dirt are generated during replacement, which can lead to defects.

In view of the above-mentioned problems, the present invention provides a resist coating apparatus for optical disc masters that is simpler and can form any resist film thickness.

Means for Solving the Problems In order to solve the above-mentioned problems, the resist coating device for optical disc masters of the present invention is capable of mixing and diluting the resist solution within the device when discharging it, and also reduces the pressure applied to the resist solution and the resist dilution solution. By changing the resist solution, the dilution concentration can be freely changed without replacing the resist solution.

Effects The present invention allows films of various thicknesses to be easily formed by simply adjusting the pressure applied to the resist solution and the resist dilution solution using the above-described configuration.

EXAMPLE Hereinafter, a resin coating apparatus for optical disk masters according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram of a resist coating apparatus for optical disk masters according to the first embodiment of the present invention, and FIG. 2 shows a discharge regime obtained with respect to the pressure ratio applied to the resist stock solution button and the resist diluted solution. This shows the relationship between dilution and concentration. 1st
In the figure, 11 is an optical disk master, 12 is a rotating part controlled by the turn tape tvc and motor d, 13 is a solenoid valve for discharging liquid, 14 is a tank for supplying resist liquid, 16 is a regulator for adjusting pressurization of resist liquid, 16 17 is a resist dilution liquid supply tank, and 17 is a resist dilution liquid pressure regulator.

The operation will be explained below using FIGS. 1 and 2.

Then, put the resist stock solution into the resist solution supply tank 14 and the resist dilution solution into the resist dilution solution supply tank 16.
The pressure regulating regulators 15 and 17 are set to each pressure (for example, when the dilution concentration is 50% as shown in FIG. 2, the pressure regulating regulators 15 and 17 are set to be equal).

Next, place the optical disc master 11 on the turntable C,
The rotation motor d rotates at a constant low speed, and then opens and closes the liquid discharge solenoid valve 13 to discharge the diluted resist liquid onto the optical disk master 11, and then at a constant speed according to the film thickness to be formed. By rotating at an angular velocity of , a resist film is formed.

Effects of the Invention As described above, in the present invention, the dilution concentration of the resist can be freely changed without replacing the resist solution, and therefore the thickness of the formed film can also be changed arbitrarily and easily.

Furthermore, since there is no need to change the resist solution every time the film thickness is changed, it is possible to prevent dust and dirt from being generated during replacement, and it is possible to produce high-quality optical discs.

[Brief explanation of drawings]

FIG. 1 is a block diagram of a resist coating apparatus for optical disk masters according to the first embodiment of the present invention, FIG. 2 is a graph showing the relationship between the dilution concentration of the obtained resist solution and the pressure ratio applied to each tank, and FIG. Figure 3 is a block diagram of a conventional resist coating device for optical disc masters, Figure 4 is a graph showing the relationship between resist concentration and film thickness formed, and Figure 5 is a graph showing the relationship between rotation speed and film thickness formed. It is. DESCRIPTION OF SYMBOLS 11...Optical disc master, 12...Rotating unit, 13...Solenoid valve, 14...Resist liquid supply tank, 5... Pressure adjustment regulator, 6... Resist dilution liquid supply tank, 7... Pressure adjustment regulator.

Claims (1)

[Claims] It is characterized by comprising a resist solution supply tank, a resist dilution solution supply tank, a regulator for adjusting the pressure applied to each tank, a solenoid valve for mixing and discharging the solutions, and a rotating part for the optical disc master. Resist coating equipment for optical disc masters.