JPH0326046U - - Google Patents
Info
- Publication number
- JPH0326046U JPH0326046U JP8505789U JP8505789U JPH0326046U JP H0326046 U JPH0326046 U JP H0326046U JP 8505789 U JP8505789 U JP 8505789U JP 8505789 U JP8505789 U JP 8505789U JP H0326046 U JPH0326046 U JP H0326046U
- Authority
- JP
- Japan
- Prior art keywords
- tilt angle
- holder
- specimen
- sample
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本案による試料ホールダ傾斜角検出回
路と試料微動装置の構成を示す図である。
３……対物レンズ、４……試料台、６……試料
ホールダ、７……傾斜モータ、１０……傾斜角表
示機能、１１……傾斜角検出機構、１２……検出
回路、１３……制御回路。
FIG. 1 is a diagram showing the configuration of a sample holder inclination angle detection circuit and a sample fine movement device according to the present invention. 3...Objective lens, 4...Sample stage, 6...Sample holder, 7...Tilt motor, 10...Tilt angle display function, 11...Tilt angle detection mechanism, 12...Detection circuit, 13...Control circuit.
Claims (1)
料ホールダの傾斜角制限の為、検出回路を設ける
と共に各種の試料ホールダごとに許容される最大
の傾斜角を表示しこの表示内容を検出する事によ
り試料ホールダ挿入事に最大傾斜角の設定を行な
い、試料ホールダ傾斜時に発生する試料ホールダ
周辺部との接触や接触により起こる破損防止を図
る事を特徴とする電子顕微鏡等の試料微動装置。 In order to limit the tilt angle of a sample holder inserted into a sample fine movement device such as an electron microscope, a detection circuit is installed, the maximum tilt angle allowed for each type of sample holder is displayed, and this display content is detected. A specimen fine movement device for an electron microscope, etc., characterized by setting a maximum tilt angle when inserting a specimen holder to prevent damage caused by contact with or contact with the periphery of the specimen holder that occurs when the specimen holder is tilted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8505789U JPH0326046U (en) | 1989-07-21 | 1989-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8505789U JPH0326046U (en) | 1989-07-21 | 1989-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0326046U true JPH0326046U (en) | 1991-03-18 |
Family
ID=31633953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8505789U Pending JPH0326046U (en) | 1989-07-21 | 1989-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0326046U (en) |
-
1989
- 1989-07-21 JP JP8505789U patent/JPH0326046U/ja active Pending
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