JPH0366109B2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to an improvement in planar wrapping processing of a rectangular processed sample, and improves processing accuracy by uniformly applying a load to the processed sample. The present invention relates to a wrapping method and apparatus that reduce the number of processing steps and can cope with mass production.

[Prior art]

For example, in the case of magnetic heads, there is an urgent need to develop thin film magnetic heads in the current trend towards higher recording densities.

In parallel with this, the development of higher precision machining has become essential.

A thin film magnetic head will be explained below as an example.

An example of a thin film head for an electronic computer is shown in FIGS. 1 and 2, and its outline will be explained. In the figure, 1
2 is a substrate, and 2 is a thin film magnetic head element section. 1A
is the surface facing the magnetic plate (disc) in the floating state. In FIG. 2, which is an enlarged view of the thin film magnetic head element section 2 taken along the line A-A in FIG.
is a protective film, and 8 is a gap.

To manufacture such a thin film head, a plurality of thin film head elements 2, for example, 5 to 10, are aligned in the same direction and formed on a substrate block, and then the surface 1A facing the magnetic plate is polished together. , by cutting it into individual thin film heads.

One of the important points in manufacturing this thin film head is to ensure the gap depth D with high accuracy.

The accuracy of this gap depth is determined by the polishing accuracy of the surface 1A of the substrate block 1 on which the thin film magnetic head element is formed, facing the magnetic plate. Therefore, in order to manufacture a thin film magnetic head with high precision, it is necessary to increase the precision of the polishing process of the opposing surface 1A.

There are wrapping methods and polishing methods as the above-mentioned polishing methods that have been conventionally used.
With conventional processing methods, it is difficult to uniformize the amount of processing (amount of polishing) on the opposing surface over the entire surface, and there has been a problem in that it is not possible to manufacture high-precision thin-film magnetic heads.

A specific example thereof is shown in FIG. 3 and will be explained. As shown in the figure, in the conventional wrapping method, the processed sample 9
and a machining dummy 10 were pasted on a holding plate 11, so that the machining sample 9 and the machining dummy 10 were simultaneously polished.

In the wrapping method using this processing dummy 10, the machined surface accuracy (flatness) of the processed sample
In order to improve the
The rigidity of the retainer plate 11 becomes weaker, and the retainer plate 11 becomes easily deformed by holding it during grinding (for example, with a magnetic chuck). Also, when the holding plate 11 is deformed in this way, the processed sample 9 and the processing dummy 1 after the grinding process are
0 and will not be on the same plane, resulting in uneven contact during the wrapping process. the result,
There is a difference in the amount of surface processing of processed sample 9, and the gap D
The disadvantage was that the variation in depth was as large as several micrometers.

In addition, in order to solve the above drawbacks, increasing the rigidity of the holding plate 11 increases the size of the processing jig, and if the processing jig is made smaller, the load point becomes higher, making it impossible to perform stable rattupin processing. At that time, the planar accuracy was very poor at 0.03 to 0.3 .mu.m/4 mm, and the gap depth D varied greatly, making it impossible to achieve the accuracy required for a thin film magnetic head.

[Purpose of the invention]

The present invention solves the above-mentioned conventional drawbacks, applies a uniform load to a processed sample, improves processing accuracy, reduces the number of processing steps, and makes it suitable for mass production. The aim is to provide the equipment.

[Summary of the invention]

That is, the present invention eliminates the use of conventional machining dummies, applies a load uniformly to the entire surface of the machining sample, improves machining accuracy, and eliminates the number of man-hours required for machining the machining dummy. In order to reduce the number of man-hours for the wrapping process, the processed sample and the processing jig are arranged in an isosceles triangle shape with the rectangular processed sample as the base and the processing jig as the apex. By making the processing jig at the apex of the isosceles triangle movable within a free plane, the vertical load applied within the area of the isosceles triangle is uniformly distributed over the entire surface of the processed sample. This is the wrapping method.

As a device for carrying out this wrapping method, a processing jig is supported on a shaft whose tip is machined into a spherical shape so that it can rotate in a free plane, and an adhesive jig for bonding the processed sample is attached. A wrap jig is provided, and the shaft is attached to the processing jig so as to form an isosceles triangle with the adhesive jig provided on the wrap jig as the base and the processing tool jig as the apex. The device is characterized in that the wrap jig is connected to the wrap jig, and a vertical load is applied to the wrap jig by a load rod connected to the wrap jig. Further, in the connecting portion, the lap jig and the height adjustment ring are screwed together, making it possible to process an inclined surface forming a certain angle.

[Embodiments of the invention]

An embodiment of the present invention will be described in detail below.

First, an outline of the embodiment will be explained in detail. In FIG. 5, which shows the relative positional relationship between the processing jig and the processed sample in a plan view, the processed sample 21
The processing jig 25 and the processed sample 21 are arranged so as to form an isosceles triangle with the processing jig 25 as the base and the processing jig 25 as the apex. By arranging the machining jig 25 in this way and making it rotatable within the free plane, the load applied within the isosceles triangle is transferred between the machining jig 25 (vertex) and the machining jig 25 (vertex). The load distributed to the sample 21 (bottom side) and the processed sample 21 is applied as a uniform load to the entire surface of the processed sample 21.

As shown in FIG. 4, this specific device includes a shaft 25 whose tip is machined into a spherical shape, which rotatably supports a processing jig 24, while a processing jig 24 is rotatably supported to hold the processing sample 21 by adhesive. A wrap jig equipped with an adhesive jig 22 is provided, and the wrap jig 23 and the processing jig 24 are connected by a shaft 25.
A vertical load is applied to the lap jig 23 connected in this manner by a weighting rod 29, so that the load is uniformly applied to the processed sample 21 adhesively held on the adhesive jig 22. In this way, by polishing the lap surface plate 31 by reciprocating or rotating it so that a load is evenly applied to the processed sample 21, it is possible to obtain a highly accurate processed surface. Furthermore, by adjusting the height adjustment ring 26, a machined surface having a certain inclination angle can be obtained.

The details will be explained in more detail below. In FIG. 4, a processed sample 21 is adhesively held on a wrap jig 23 via an adhesive jig 22. In FIG. Reference numeral 24 denotes a processing jig, which is supported so as to be rotatable within a free plane by a shaft 25 whose tip is machined into a spherical shape. The processing jig 24 and the wrap 23 are connected via a shaft 25, and through this connection, the adhesive jig 2
2 (or the processed sample 21) and the center of the processing jig 24 (or the center of the shaft 25), as shown in FIG.
are arranged so as to form an isosceles triangle with the center as the apex.

The connecting portion of the shaft 25 is connected to the wrap jig 2.
A height adjustment ring 26 is screwed into the screw hole provided in 3, and the height of one end of the wrap jig 23 (the part corresponding to the apex of the isosceles triangle) is adjusted by the screw pitch. . 27 is a set screw for holding the adjusted height. Reference numeral 29 denotes a load rod that is supported so as to be vertically movable via a linear bearing 28. The load from this load rod 29 is transmitted to the lap jig 23 via a spherical bearing 30, and the load rod 29 is rotated or reciprocated (driving). The mechanism is designed to follow the movement of the lap surface plate 31 (the mechanism is not shown).

The operation of this embodiment configured as above will be explained below. First, the processed sample 21 is adhesively held on the adhesive jig 22, and then the height adjustment ring 26 is attached.
While rotating the wrap jig 23, adjust the height of one end of the wrap jig 23. For example, in order to make the processed surface of the processed sample 21 a horizontal surface, the height of the lap jig 23 is adjusted so that it becomes horizontal. Alternatively, in order to make the processed surface of the processed sample 21 a finished surface with a certain angle, the inclination of the lap jig 23 is adjusted so as to correspond to the processed angle. After adjusting the height in this way, it is fixed with the set screw 27. After adjusting the height in this way, a vertical load is applied using the load rod 29.

This vertical load is distributed between the center of the shaft 25 or the processing jig 24 (the apex of the isosceles triangle) and the processing sample 21 (the base of the isosceles triangle). At this time, the processing jig 24 which is in surface contact with the lap surface plate 31 is rotatable, and the processing sample 21 is placed at the base of an isosceles triangle with the center of the processing jig 24 as the apex. Therefore, the processed sample 21 is in complete surface contact with the lap surface plate 31, and the distributed load is applied over the entire surface of the processed sample 21. In this manner, the lap surface plate 31 is rotated or reciprocated with a uniform load applied to the entire surface of the processed sample 21 to perform polishing. During this polishing, the movement due to the flatness error of the lap surface plate 31 is caused by the movement of the spherical bearing 3.
0, and the load distribution applied to the processed sample 21 is maintained even during polishing.

Incidentally, an example of actual polishing processing is as follows. A lap jig was used in which the distance between the processed sample 21 and the processing jig 24 was 55 mm. As a usage condition, after adjusting the height between the processed sample 21 and the processing jig 24 on the optical flat, diamond abrasive grains of 0.5μ are placed on the tin lap surface plate 31.
It was processed using m diameter.

(1) Alumina ceramic 20mm x processed sample
When a 4 mm piece was processed, a flatness of 0.25 μm in the 20 mm direction and 0.05 μm in the 4 mm direction was obtained, and the variation in the amount of processing in the 20 mm direction was within 0.5 μm during 10 μm processing.

(2) Next, alumina ceramic 50 was used as a processed sample.
When a piece of mm x 4 mm was processed, the flatness in the 50 mm direction was less than 0.2 μm, and the variation in the amount of processing in the 50 mm direction was within 0.5 μm.

(3) Using the same jig, after flat processing is completed, lower the processing jig by 0.48mm below the processed sample, approximately 10μm.
As a result of processing, angle polishing of 0.5°±0.05° was possible.
We confirmed that this jig has good reproducibility.

〔Effect of the invention〕

As detailed above, according to the wrapping method and apparatus of the present invention, the processed sample and the processing jig are arranged in an isosceles triangle shape with the processed sample as the base and the processing jig as the apex, and the processing Since the processing jig is made rotatable in a free plane, the processing jig and the processed sample can be completely wrapped, and as a result, the load can be applied uniformly to the processed sample, and the amount of processing can be reduced. It was possible to reduce the variation in surface area and obtain a highly accurate finished surface.

Also, since we used a processing jig instead of a dummy, there was no need to make a dummy.
In addition, the reproducibility has improved, making it possible to handle mass production.

Furthermore, by making height adjustment possible, it is possible to perform slight inclination machining, and it is possible to process two planes that form a certain angle using the same processing jig and in the same process, which can significantly reduce the number of man-hours. It has excellent effects such as

[Brief explanation of drawings]

FIG. 1 is an explanatory perspective view showing an example of a thin film magnetic head, and FIG. 2 is an explanatory view taken along line A-A in FIG. be. FIG. 3 is a perspective view illustrating a conventional wrapping method. Fig. 4 shows an embodiment of the present invention, and Fig. 5 is a vertical sectional view showing its constituent parts, and Fig. 5 shows the positional relationship between the processing jig and the processed sample in Fig. 4 on a plane. It is an explanatory diagram. 21...Processed sample, 22...Adhesive jig, 23...
... Wrap jig, 24 ... Processing jig, 25 ... Shaft, 26 ... Height adjustment ring, 29 ... Load rod, 30 ... Spherical bearing.

Claims (1)

[Claims] 1. In a wrapping method for processing the surface of a rectangular processed sample, the processed sample and the processing jig are arranged in an isosceles triangle shape with the rectangular processed sample as the base and the processing jig as the apex. A wrapping method in which the processing jig serving as the apex is movable within a free plane, a vertical load is applied within the area of the isosceles triangle, and the vertical load is uniformly applied to the processed sample. . 2. In a wrapping device for processing the surface of a rectangular processed sample, a processing jig rotatably supported by a shaft having a spherical tip;
It consists of a wrap jig equipped with an adhesive jig for bonding processed samples, and a load rod for applying a vertical load to the wrap jig. A wrapping device comprising a processing jig and a wrapping jig connected through the shaft so as to form an equilateral triangle, and a load rod connected to the upper surface of the wrapping jig. 3. In a wrapping device for processing a rectangular processed sample, a processing jig rotatably supported by a shaft having a spherical tip;
It consists of a wrap jig equipped with an adhesive jig for bonding processed samples, a height adjustment ring for adjusting the height of the wrap jig, and a load rod for applying a vertical load to the wrap jig. , a height adjustment ring is screwed into a screw hole provided in a lap jig, and the height adjustment ring is fitted onto the shaft to form an isosceles with the adhesive jig as the base and the processing jig as the apex. A wrapping device comprising a processing jig and a wrapping jig connected to form a triangle, and a load rod connected to the top surface of the wrapping jig.