JPH0366203U - - Google Patents
Info
- Publication number
- JPH0366203U JPH0366203U JP12532889U JP12532889U JPH0366203U JP H0366203 U JPH0366203 U JP H0366203U JP 12532889 U JP12532889 U JP 12532889U JP 12532889 U JP12532889 U JP 12532889U JP H0366203 U JPH0366203 U JP H0366203U
- Authority
- JP
- Japan
- Prior art keywords
- main line
- line
- capacitor
- sub
- microwave amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Microwave Amplifiers (AREA)
Description
第１図は本考案の一実施例によるマイクロ波増
幅器中に存在するＭＩＭキヤパシタの平面図、第
２図は本増幅器の電気的特性の修正方法について
示したエアブリツジ断面図、第３図は上記回路の
修正作業の工程図、第４図は従来のマイクロ波増
幅器修正作業の工程図、第５図ａ，ｂは各々従来
の修正方法による修正前、修正後の整合回路中Ｍ
ＩＭキヤパシタの平面図である。
１……副線路、２……副線路１を押圧すること
により主線路３に対して並列接続されるＭＩＭキ
ヤパシタ、３……主線路、４……主線路に接続さ
れているＭＩＭキヤパシタ、５……半導体基板、
６〜８……本考案によるモノリシツクマイクロ波
増幅器修正作業の各工程、９〜１２……従来のモ
ノリシツクマイクロ波増幅器修正作業の各工程、
１３……従来の修正前ＭＩＭキヤパシタ、１４…
…従来の修正後ＭＩＭキヤパシタ、１５……ＭＩ
Ｍキヤパシタを形成するのに必要な誘電体膜を示
す。なお、図中、同一あるいは相当部分には同一
符号を付して示してある。
Fig. 1 is a plan view of an MIM capacitor present in a microwave amplifier according to an embodiment of the present invention, Fig. 2 is a cross-sectional view of an air bridge showing a method for modifying the electrical characteristics of this amplifier, and Fig. 3 is the circuit described above. Fig. 4 is a process diagram of a conventional microwave amplifier repair work, and Fig. 5 a and b show M in the matching circuit before and after modification by the conventional repair method
FIG. 3 is a plan view of an IM capacitor. 1... Sub line, 2... MIM capacitor connected in parallel to the main line 3 by pressing the sub line 1, 3... Main line, 4... MIM capacitor connected to the main line, 5 ...semiconductor substrate,
6-8...Each step of the monolithic microwave amplifier repair work according to the present invention, 9-12...Each step of the conventional monolithic microwave amplifier repair work,
13... Conventional MIM capacitor before modification, 14...
...Conventional modified MIM capacitor, 15...MI
The dielectric film required to form the M capacitor is shown. In the drawings, the same or corresponding parts are denoted by the same reference numerals.
Claims (1)
Ｍ（Ｍｅｔａｌ Ｉｎｓｕｌａｔｅｄ Ｍｅｔａ
ｌ）キヤパシタと、上記半導体基板上に上記主線
路をまたいで設けられ上記主線路とともに上記マ
イクロ波集積回路本体に対する整合回路を構成す
る副線路と、上記副線路上に形成される調整用Ｍ
ＩＭキヤパシタとを有するモノリシツクマイクロ
波増幅器。 MI formed on the main line of the microwave amplifier
M( M etal Insulated M eta
l) a capacitor, a sub-line provided on the semiconductor substrate across the main line and forming a matching circuit for the microwave integrated circuit body together with the main line, and an adjustment M formed on the sub-line;
Monolithic microwave amplifier with IM capacitor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12532889U JPH0366203U (en) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12532889U JPH0366203U (en) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0366203U true JPH0366203U (en) | 1991-06-27 |
Family
ID=31673205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12532889U Pending JPH0366203U (en) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0366203U (en) |
-
1989
- 1989-10-26 JP JP12532889U patent/JPH0366203U/ja active Pending
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