JPH0366674U - - Google Patents
Info
- Publication number
- JPH0366674U JPH0366674U JP12908389U JP12908389U JPH0366674U JP H0366674 U JPH0366674 U JP H0366674U JP 12908389 U JP12908389 U JP 12908389U JP 12908389 U JP12908389 U JP 12908389U JP H0366674 U JPH0366674 U JP H0366674U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- coating agent
- substrate
- rotating plate
- coating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000004528 spin coating Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
第１図は本考案に係るスピンコート装置の原理
を説明する図である。第２図は本考案にかかるス
ピンコート装置の具体例を示す図である。
１……基体、２……回転板、３……真空チヤン
バ、４……基体ホルダ、６……真空ポンプ、６…
…コート剤供給手段、７……加熱手段、８……電
源、９……圧力流体供給手段、１０……コート剤
、１１……コート剤供給手段。
FIG. 1 is a diagram illustrating the principle of a spin coating apparatus according to the present invention. FIG. 2 is a diagram showing a specific example of the spin coating apparatus according to the present invention. DESCRIPTION OF SYMBOLS 1...Base body, 2...Rotary plate, 3...Vacuum chamber, 4...Base holder, 6...Vacuum pump, 6...
... Coating agent supply means, 7 ... Heating means, 8 ... Power supply, 9 ... Pressure fluid supply means, 10 ... Coating agent, 11 ... Coating agent supply means.
Claims (1)
が真空チヤンバ内に設けられている事を特徴とす
るスピンコート装置。 ２ 該基体上にコート剤を供給する手段が該真空
チヤンバ内に設けられている事を特徴とする請求
項１記載のスピンコート装置。 ３ 該回転板に加熱手段が設けられている事を特
徴とする請求項１記載のスピンコート装置。[Claims for Utility Model Registration] 1. A spin coater characterized in that a rotating plate for holding a substrate to be coated with a coating agent is provided in a vacuum chamber. 2. The spin coating apparatus according to claim 1, wherein means for supplying a coating agent onto the substrate is provided within the vacuum chamber. 3. The spin coating apparatus according to claim 1, wherein the rotating plate is provided with heating means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12908389U JPH0366674U (en) | 1989-11-06 | 1989-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12908389U JPH0366674U (en) | 1989-11-06 | 1989-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0366674U true JPH0366674U (en) | 1991-06-28 |
Family
ID=31676745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12908389U Pending JPH0366674U (en) | 1989-11-06 | 1989-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0366674U (en) |
-
1989
- 1989-11-06 JP JP12908389U patent/JPH0366674U/ja active Pending