JPH0367061U - - Google Patents
Info
- Publication number
- JPH0367061U JPH0367061U JP12835289U JP12835289U JPH0367061U JP H0367061 U JPH0367061 U JP H0367061U JP 12835289 U JP12835289 U JP 12835289U JP 12835289 U JP12835289 U JP 12835289U JP H0367061 U JPH0367061 U JP H0367061U
- Authority
- JP
- Japan
- Prior art keywords
- target
- cooling plate
- electromagnet
- power supply
- transported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 230000007723 transport mechanism Effects 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12835289U JPH0367061U (mo) | 1989-11-01 | 1989-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12835289U JPH0367061U (mo) | 1989-11-01 | 1989-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367061U true JPH0367061U (mo) | 1991-06-28 |
Family
ID=31676064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12835289U Pending JPH0367061U (mo) | 1989-11-01 | 1989-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367061U (mo) |
-
1989
- 1989-11-01 JP JP12835289U patent/JPH0367061U/ja active Pending
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