JPH0367436U - - Google Patents
Info
- Publication number
- JPH0367436U JPH0367436U JP12834289U JP12834289U JPH0367436U JP H0367436 U JPH0367436 U JP H0367436U JP 12834289 U JP12834289 U JP 12834289U JP 12834289 U JP12834289 U JP 12834289U JP H0367436 U JPH0367436 U JP H0367436U
- Authority
- JP
- Japan
- Prior art keywords
- data storage
- pellet
- mark
- sensor
- stores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 12
- 238000013500 data storage Methods 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例に係る検査装置の概
略概念図、第２図は同実施例における被検ペレツ
トの位置補正状態を示す平面図、第３図は同実施
例の被検ペレツトの表面検査状態を示す平面図、
第４図は基準となる半導体ペレツトの表面凹凸状
態の一波形図、第５図は被検ペレツトの表面凹凸
状態の一波形図、第６図は他の被検ペレツトの表
面凹凸状態の一波形図、第７図は従来の不良ペレ
ツトの検査装置の斜視図である。
１……位置補正部、２……センサ、３……検出
データ記憶部、４……基準データ記憶部、５……
比較判別部、１００……半導体ペレツト、Ｍ……
マーク、Ｐ……被検ペレツト。
Fig. 1 is a schematic conceptual diagram of an inspection device according to an embodiment of the present invention, Fig. 2 is a plan view showing a position correction state of a test pellet in the same embodiment, and Fig. 3 is a diagram of a test pellet in the same embodiment. A plan view showing the surface inspection state of
Fig. 4 is a waveform diagram of the surface unevenness of a reference semiconductor pellet, Fig. 5 is a waveform diagram of the surface unevenness of the test pellet, and Fig. 6 is a waveform of the surface unevenness of another test pellet. FIG. 7 is a perspective view of a conventional defective pellet inspection apparatus. 1...Position correction section, 2...Sensor, 3...Detected data storage section, 4...Reference data storage section, 5...
Comparison/discrimination section, 100...Semiconductor pellet, M...
Mark, P...Test pellet.
Claims (1)
導体ペレツトを検出する検査装置において、 被検ペレツトを所定位置に補正する位置補正部
と、 位置補正された被検ペレツト表面の所定部分を
走査して表面の凹凸状態を検出するセンサと、 上記センサの検出出力を記憶する検出データ記
憶部と、 基準となる半導体ペレツト表面状態を記憶した
基準データ記憶部と、 上記検出データ記憶部と上記基準データ記憶部
の各出力を比較してマークの有無を判別する比較
判別部とよりなることを特徴とする検査装置。[Scope of Claim for Utility Model Registration] In an inspection device for detecting a semiconductor pellet on which a mark has been formed due to an electrical defect, there is provided a position correction unit for correcting a test pellet to a predetermined position, and a test pellet whose position has been corrected. a sensor that scans a predetermined portion of the surface to detect the uneven state of the surface; a detection data storage section that stores the detection output of the sensor; a reference data storage section that stores a reference semiconductor pellet surface state; An inspection device comprising: a comparison/discrimination unit that compares each output of the data storage unit and the reference data storage unit to determine the presence or absence of a mark.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12834289U JPH0367436U (en) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12834289U JPH0367436U (en) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367436U true JPH0367436U (en) | 1991-07-01 |
Family
ID=31676054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12834289U Pending JPH0367436U (en) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367436U (en) |
-
1989
- 1989-10-31 JP JP12834289U patent/JPH0367436U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01165407U (en) | ||
| JPH01152225U (en) | ||
| JPH0367436U (en) | ||
| JPH0258874U (en) | ||
| JPH01160558U (en) | ||
| JPH02109289U (en) | ||
| JPS6128051U (en) | ultrasonic probe | |
| JPS62175091U (en) | ||
| JPS61152980U (en) | ||
| JPS58155839U (en) | Semiconductor element characteristic measurement equipment | |
| JPS62165526U (en) | ||
| JPS62134243U (en) | ||
| JPH0197933U (en) | ||
| JPS61111740U (en) | ||
| JPS61188500U (en) | ||
| JPH01151246U (en) | ||
| JPH0240549U (en) | ||
| JPH0430734U (en) | ||
| JPS62163703U (en) | ||
| JPS648735U (en) | ||
| JPH0432717A (en) | Pen type recorder | |
| JPH01151245U (en) | ||
| JPS61177447U (en) | ||
| JPH0247566U (en) | ||
| JPH01152253U (en) |