JPH0367437U - - Google Patents
Info
- Publication number
- JPH0367437U JPH0367437U JP13008789U JP13008789U JPH0367437U JP H0367437 U JPH0367437 U JP H0367437U JP 13008789 U JP13008789 U JP 13008789U JP 13008789 U JP13008789 U JP 13008789U JP H0367437 U JPH0367437 U JP H0367437U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- microscope
- view
- confirm
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Calibration Of Command Recording Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案の一実施例におけるスキヤン
レールを有した顕微鏡を示す斜視図、第２図ａ〜
ｄは第１図の顕微鏡を用いて確認した針当て図、
第３図は従来のプローブ装置の斜視図、第４図は
従来の顕微鏡の斜視図、第５図は第４図の顕微鏡
で確認した針当て図、第６図は第５図の拡大図で
ある。図において、６……左右つまみ、７……前
後つまみ、８……上下つまみである。なお、図中
同一符号は同一、または相当部分を示す。
Fig. 1 is a perspective view showing a microscope with a scan rail according to an embodiment of this invention, and Fig. 2 a-
d is the needle rest diagram confirmed using the microscope in Fig. 1;
Figure 3 is a perspective view of a conventional probe device, Figure 4 is a perspective view of a conventional microscope, Figure 5 is a view of the needle rest confirmed with the microscope in Figure 4, and Figure 6 is an enlarged view of Figure 5. be. In the figure, 6...left and right knobs, 7...front and rear knobs, and 8...up and down knobs. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
測定端子にプローブカードの接触針が、定められ
た基準位置に設置されていることを確認するため
の顕微鏡を備えたプローブ装置。 A probe device that holds an object to be measured on a stage and is equipped with a microscope to confirm that the contact needle of the probe card is placed at a predetermined reference position at the measurement terminal of the object to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13008789U JPH0367437U (en) | 1989-11-06 | 1989-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13008789U JPH0367437U (en) | 1989-11-06 | 1989-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367437U true JPH0367437U (en) | 1991-07-01 |
Family
ID=31677682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13008789U Pending JPH0367437U (en) | 1989-11-06 | 1989-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367437U (en) |
-
1989
- 1989-11-06 JP JP13008789U patent/JPH0367437U/ja active Pending