JPH0370883U - - Google Patents
Info
- Publication number
- JPH0370883U JPH0370883U JP1989133244U JP13324489U JPH0370883U JP H0370883 U JPH0370883 U JP H0370883U JP 1989133244 U JP1989133244 U JP 1989133244U JP 13324489 U JP13324489 U JP 13324489U JP H0370883 U JPH0370883 U JP H0370883U
- Authority
- JP
- Japan
- Prior art keywords
- processing device
- laser processing
- fusing
- nozzle
- semiconductor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
Description
第１図は本考案の一実施例の側面図、第２図は
本考案の他の実施例の側面図である。 １……レーザー用電源、２……レーザー光源、
３……レーザー光、４……光学顕微鏡、５……半
導体素子、６……微細配線、７……ポンプ、８…
…ノズル、９……加熱器、１０……マニユピレー
タ、１１……Ｘ−Ｙステージ。
本考案の他の実施例の側面図である。 １……レーザー用電源、２……レーザー光源、
３……レーザー光、４……光学顕微鏡、５……半
導体素子、６……微細配線、７……ポンプ、８…
…ノズル、９……加熱器、１０……マニユピレー
タ、１１……Ｘ−Ｙステージ。
Claims (1)
- 半導体素子に形成された微細配線をレーザー光
のエネルギーにより溶断させるレーザー加工装置
において、溶断箇所に高圧エアーを吹き付けるノ
ズルを有することを特徴とするレーザー加工装置
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989133244U JPH0370883U (ja) | 1989-11-15 | 1989-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989133244U JPH0370883U (ja) | 1989-11-15 | 1989-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0370883U true JPH0370883U (ja) | 1991-07-17 |
Family
ID=31680654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989133244U Pending JPH0370883U (ja) | 1989-11-15 | 1989-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0370883U (ja) |
-
1989
- 1989-11-15 JP JP1989133244U patent/JPH0370883U/ja active Pending