JPH037255U - - Google Patents

Info

Publication number
JPH037255U
JPH037255U JP6742989U JP6742989U JPH037255U JP H037255 U JPH037255 U JP H037255U JP 6742989 U JP6742989 U JP 6742989U JP 6742989 U JP6742989 U JP 6742989U JP H037255 U JPH037255 U JP H037255U
Authority
JP
Japan
Prior art keywords
base plate
disposed
electron microscope
exhaust device
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6742989U
Other languages
Japanese (ja)
Other versions
JPH0624124Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6742989U priority Critical patent/JPH0624124Y2/en
Publication of JPH037255U publication Critical patent/JPH037255U/ja
Application granted granted Critical
Publication of JPH0624124Y2 publication Critical patent/JPH0624124Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例の概略図、第２図は
従来技術を説明するための図である。 １……電子銃、２……電子光学系、３……試料
室、４……電子顕微鏡カラム、５……ベースプレ
ート、６……排気装置、７……カバー、８ａ，８
ｂ……スプリングコイル、９……本体架台、１０
ａ，１０ｂ……支柱、１１……支柱貫通孔。 FIG. 1 is a schematic diagram of an embodiment of the present invention, and FIG. 2 is a diagram for explaining the prior art. DESCRIPTION OF SYMBOLS 1... Electron gun, 2... Electron optical system, 3... Sample chamber, 4... Electron microscope column, 5... Base plate, 6... Exhaust device, 7... Cover, 8a, 8
b...Spring coil, 9...Main frame, 10
a, 10b... Support column, 11... Support through hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 架台上に防振部材を介して配置されたベースプ
レートと、該ベースプレート上に配置された電子
銃、電子光学系、試料室を内臓した電子顕微鏡カ
ラムと、該電子顕微鏡カラムを排気するため前記
ベースプレート上に配置された排気装置と、該排
気装置をカバーで覆うようにした装置において、
該カバーを前記ベースプレートに接触しない状態
で前記架台に固定するように構成したことを特徴
とする走査電子顕微鏡。 A base plate disposed on a mount via a vibration isolating member, an electron microscope column disposed on the base plate containing an electron gun, an electron optical system, and a sample chamber, and a base plate disposed on the base plate for evacuating the electron microscope column. In a device including an exhaust device disposed in the area and a cover covering the exhaust device,
A scanning electron microscope characterized in that the cover is configured to be fixed to the mount without contacting the base plate.
JP6742989U 1989-06-09 1989-06-09 Scanning electron microscope Expired - Lifetime JPH0624124Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6742989U JPH0624124Y2 (en) 1989-06-09 1989-06-09 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6742989U JPH0624124Y2 (en) 1989-06-09 1989-06-09 Scanning electron microscope

Publications (2)

Publication Number Publication Date
JPH037255U true JPH037255U (en) 1991-01-24
JPH0624124Y2 JPH0624124Y2 (en) 1994-06-22

Family

ID=31600994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6742989U Expired - Lifetime JPH0624124Y2 (en) 1989-06-09 1989-06-09 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPH0624124Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118044A (en) * 1974-08-03 1976-02-13 Union Sils Van De Loo & Co TOOKURITSUPUOJUSURUSUHOOTSUSHAYOPEDARU
JPH0359291U (en) * 1989-10-13 1991-06-11
WO2011013323A1 (en) * 2009-07-30 2011-02-03 株式会社 日立ハイテクノロジーズ Scanning electron microscope

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3440967B2 (en) * 1995-11-01 2003-08-25 株式会社ブリヂストン Charged particle beam equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118044A (en) * 1974-08-03 1976-02-13 Union Sils Van De Loo & Co TOOKURITSUPUOJUSURUSUHOOTSUSHAYOPEDARU
JPH0359291U (en) * 1989-10-13 1991-06-11
WO2011013323A1 (en) * 2009-07-30 2011-02-03 株式会社 日立ハイテクノロジーズ Scanning electron microscope

Also Published As

Publication number Publication date
JPH0624124Y2 (en) 1994-06-22

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