JPH0375268A - Production of dielectric ceramic composition for microwave - Google Patents
Production of dielectric ceramic composition for microwaveInfo
- Publication number
- JPH0375268A JPH0375268A JP1208100A JP20810089A JPH0375268A JP H0375268 A JPH0375268 A JP H0375268A JP 1208100 A JP1208100 A JP 1208100A JP 20810089 A JP20810089 A JP 20810089A JP H0375268 A JPH0375268 A JP H0375268A
- Authority
- JP
- Japan
- Prior art keywords
- additives
- main ingredients
- co3o4
- coo
- microwave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 13
- 239000000919 ceramic Substances 0.000 title claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000654 additive Substances 0.000 claims abstract description 19
- 239000002075 main ingredient Substances 0.000 abstract description 8
- 239000000843 powder Substances 0.000 abstract description 5
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 abstract 6
- UBEWDCMIDFGDOO-UHFFFAOYSA-N cobalt(II,III) oxide Inorganic materials [O-2].[O-2].[O-2].[O-2].[Co+2].[Co+3].[Co+3] UBEWDCMIDFGDOO-UHFFFAOYSA-N 0.000 abstract 4
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 2
- 238000002156 mixing Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 238000005245 sintering Methods 0.000 description 15
- 229910052573 porcelain Inorganic materials 0.000 description 6
- 230000000996 additive effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 229910004481 Ta2O3 Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Inorganic Insulating Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明はマイクロ波領域で共振器材料等に使用される誘
電体磁器組成物の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a method for producing a dielectric ceramic composition used as a resonator material in the microwave region.
（ロ）従来の技術
過早、マイクロ波領域において誘電体磁器が共振機やＭ
ＩＣ（マイクロ波集積回路）基板等の材料として広く使
用されている。(b) Conventional technology was premature, and dielectric ceramics were used as resonators and M
It is widely used as a material for IC (microwave integrated circuit) substrates, etc.
この種の誘電体磁器として、出願人は特願平１−９９５
５２号において、Ｔ ｉ Ｏ＊ −Ｚ ｒ Ｏ＊ −５
ｎＯ８を主成分とし、これに添加物としてａＣ。As this type of dielectric porcelain, the applicant has filed Japanese Patent Application No. 1-995.
In No. 52, T i O* −Z r O* −5
The main component is nO8, and aC is added to it as an additive.
Ｏ＋βＣ０Ｉ０４とＮ ｂ ＊ ＯｓまたはＴａｌｏｇ
とを含有させてなるマイクロ波用誘電体磁器組成物を提
案した。O+βC0I04 and Nb*Os or Talog
We have proposed a microwave dielectric ceramic composition containing the following.
この誘電体磁器の製造方法の一例を以下説明する。Ｔｉ
ｅ、、ＺｒＯ＊ｅ Ｓｎｏｗ、ａｃｏＯ＋βＣ０Ｉ０
４及びＮｂ＊Ｏｓ（またはＴ ａ ｇｏ ｉ）をそれぞ
れ所定量秤量し、５〜１０時間湿式混合する。An example of a method for manufacturing this dielectric ceramic will be described below. Ti
e,, ZrO*e Snow, acoO+βC0I0
Predetermined amounts of 4 and Nb*Os (or T ago i) are weighed, and wet mixed for 5 to 10 hours.
次にこれを脱水、乾燥し、得られた粉末を１０００〜１
２００℃で１〜２時間予備焼結を行なう。Next, this was dehydrated and dried, and the resulting powder was 1000 to 1
Pre-sintering is carried out at 200° C. for 1 to 2 hours.
そして、この予備焼結物に対して２０〜６０時間湿式粉
砕を行なう。次にそれを脱水、乾燥し、得られた粉末を
２０００−３０００ｋｇ／ｃｍ”の圧力をかけて直径１
０ｍｍ、厚み６ｍｍの円板に底型する。その後、この成
型物の本焼結を空気中で先の予備焼結時よりも高い温度
で数時間行なう。そして、最後にこの本焼結によって４
する焼結物の厚みが径の１八になるように両面研磨を行
ない誘電体磁器を得る。Then, this pre-sintered product is subjected to wet pulverization for 20 to 60 hours. Next, it is dehydrated and dried, and the resulting powder is applied a pressure of 2000-3000 kg/cm" to a diameter of 1
The bottom mold is made into a disc with a diameter of 0 mm and a thickness of 6 mm. Thereafter, main sintering of this molded product is performed in air for several hours at a higher temperature than during the previous preliminary sintering. Finally, by this main sintering, 4
Both sides of the sintered product are polished so that the thickness of the sintered product is 18 times the diameter to obtain dielectric porcelain.
以上のようにして得られる誘電体磁器は特性的には良好
なものとなる。The dielectric ceramic obtained in the above manner has good characteristics.
しかしながら、予備焼結時及び本焼結時に焼結性及び特
性向上に寄与するコバルトが蒸発してしまい特性がバラ
つくという問題があった。However, there is a problem in that cobalt, which contributes to improving sinterability and properties, evaporates during preliminary sintering and main sintering, resulting in variations in properties.
このことは焼結後、焼結ポート内部にコバルトの蒸発し
た跡が見られることにより確認される。This is confirmed by the fact that traces of cobalt evaporation can be seen inside the sintering port after sintering.
（ハ）発明が解決しようとする課題
本発明は上述の問題に鑑み焼結特にコバルトが蒸発する
のをできるだけ抑え得るマイクロ波用誘電体磁器組戊物
の製造方法を提供することを目的とする。(c) Problems to be Solved by the Invention In view of the above-mentioned problems, an object of the present invention is to provide a method for manufacturing a dielectric porcelain assembly for microwave use, which can suppress sintering, especially evaporation of cobalt, as much as possible. .
（ニ）課題を解決するための手段
本発明はモル分率をＸ、ｙ、ｚ （ｘ＋ｙ＋ｚ＝ｌ）と
した時組成式がｘ Ｔｉｏｘ−ｙ−ＺｒＯｔ−ｚ・Ｓｎ
Ｏ＊（但し、０．３０≦ｘ≦０．６０．０゜２５≦ｙ≦
０．６０，０．０２５≦ｚ≦０．２０）で表わされる物
質を主成分とし、これに添加物としてａｃｏｏ＋βＣｏ
５ｔ４（但し、０≦Ｃ【≦ｌ、Ｏ≦β≦１、α＋β＝１
）を５重量％以下でＮｂｔＯＳまたはＴ ａ ！ Ｏｓ
を１０重量％以下含有させてなるマイクロ波用誘電体磁
器組成物の製造方法であって、添加物のαＣｏＯ＋βＣ
ｏ３Ｏ４とＮｂ。(d) Means for Solving the Problems The present invention has a compositional formula of xTiox-y-ZrOt-z.Sn when the mole fractions are X, y, z (x+y+z=l).
O* (However, 0.30≦x≦0.60.0゜25≦y≦
0.60, 0.025≦z≦0.20) as the main component, and acoo+βCo as an additive
5t4 (However, 0≦C[≦l, O≦β≦1, α+β=1
) with 5% by weight or less of NbtOS or Ta! Os
A method for producing a microwave dielectric ceramic composition containing 10% by weight or less of additives αCoO+βC
o3O4 and Nb.
ＯｓまたはＴａ２Ｏ３を予め合成しておき、主成分に添
加することを特徴とするものである。It is characterized in that Os or Ta2O3 is synthesized in advance and added to the main component.
（ホ）作 用
上述のように添加物のａｃｏｏ＋βＣｏ５ｔｓとＮ ｂ
１０１またはＴａ１Ｏｓとを予め脅威することにより
焼結時におけるコバルトの蒸発が抑えられる。(e) Effect As mentioned above, the additive acoo+βCo5ts and Nb
101 or Ta1Os in advance, the evaporation of cobalt during sintering can be suppressed.
（へ）実施例
本発明による誘電体磁器の製造方法の一実施例を以下説
明する。(f) Example An example of the method for manufacturing dielectric ceramic according to the present invention will be described below.
マイクロ波用誘電体磁器材料として高純度のＴｉ０ｔ、
ＺｒＯｔ、ＳｎＯ，、Ｎ ｂ ｔ ０−１Ｔａ、０゜及
びαＣｏＯ＋βＣｏ２Ｏ３を使用する。まず、主成分の
ＴｉＱ、、Ｚ ｒ ０１及びＳｎＯ！と、添加物のａｃ
ｏｏ＋βＣｏ５Ｏ４，ＮｂｔｏＳまたはＴａ。High purity Ti0t as dielectric ceramic material for microwave,
ZrOt, SnO, N b t 0-1Ta, 0° and αCoO+βCo2O3 are used. First, the main components TiQ, Z r 01 and SnO! and additive ac
oo+βCo5O4, NbtoS or Ta.
Ｏ，をそれぞれ別々に秤量し、ボールミル等で５〜１０
時間湿式混合する。次にこれらを脱水、乾燥し、得られ
たそれぞれの粉末を、主成分は１゜００〜１２００℃で
１〜２時間予備焼結を行ない、添加物は８００〜１００
０ｔ：で１〜２時間予備焼結により脅威する。そして、
主成分に対し所定の割合で添加物を合成したものを加え
、２０〜６０時間湿式粉砕を行なう。次にそれを脱水、
乾燥し、得られた粉末を２０００〜ａｏｏｏｋｇ／ｃｍ
廖の圧力をかけて直径１ｏｌＩＩＩ１１、厚み６ｆｆｉ
１１の円板に底型する。その後、この成型物の本焼結を
空気中で１３５０〜１５００ ’Ｃで数時間行なう。そ
して、最後にこの本焼結によって得る焼結物の厚みが径
の１八になるように両面研磨を行いｔｌｔｌ礁体を得る
。次に、上述の如き、本発明の製造方法による磁器試料
の２０℃、７〜８．５Ｇｆｌｚにおける誘電率（ｃ）及
びＱをハジキコールマン法により測定した結果を前述の
従来の製造方法によるものと比較して説明する。Weigh each O, separately, and use a ball mill etc. to measure 5 to 10
Wet mix for an hour. Next, these are dehydrated and dried, and the obtained powders are pre-sintered for 1 to 2 hours at 1°00 to 1200°C for the main components, and 800 to 100°C for the additives.
0t: pre-sintering for 1 to 2 hours. and,
Additives synthesized at a predetermined ratio to the main ingredients are added, and wet pulverization is performed for 20 to 60 hours. Then dehydrate it,
Dry the obtained powder at 2000~aooookg/cm
Applying pressure from the liao, diameter 1olIII11, thickness 6ffi
Mold the bottom into 11 discs. Thereafter, main sintering of this molded product is performed in air at 1350 to 1500'C for several hours. Finally, both sides are polished so that the thickness of the sintered product obtained by this main sintering is 18 times the diameter to obtain a tltl reef body. Next, the dielectric constant (c) and Q at 20°C and 7 to 8.5 Gflz of the porcelain sample manufactured by the manufacturing method of the present invention as described above were measured by the Hajiki-Coleman method, and the results were compared with those obtained by the conventional manufacturing method described above. Compare and explain.
尚、作成した磁器試料の主成分子ｉＯ，，Ｚｒ０１及び
ＳｎＯ，はモル分率でこの順に０．５２：０．４２ ：
０．０６になるよろ秤量し、１１５０℃×２時間で予
備焼結を行った。また、添加物は９００℃×２時間で予
備焼結により合成した。In addition, the main component molecules iO, Zr01 and SnO of the prepared porcelain sample had a molar fraction of 0.52:0.42 in this order:
The sample was weighed to a value of 0.06, and preliminary sintering was performed at 1150° C. for 2 hours. Further, additives were synthesized by preliminary sintering at 900° C. for 2 hours.
（１）第１表は添加物としてａｃｏｏ＋βＣ。(1) Table 1 shows acoo+βC as an additive.
２Ｏ３（ただし、ａ＝０．８５、β＝０．１５とし、以
下ＣｏｘＯｘと略記する）とＮｂｘＯｓをモル分率でｌ
：ｌの割合にしたときの測定結果である。2O3 (however, a=0.85, β=0.15, hereinafter abbreviated as CoxOx) and NbxOs in molar fraction l
:1 ratio.
以下余白
第１表
申二本発明範囲外
（２）第２表は添加物として、ＣｏｘＯｘとＮｂ、０．
をモル分率で２＝１の割合にしたときの測定結果である
。Below is a blank space for Table 1. Outside the scope of the present invention (2) Table 2 contains additives such as CoxOx and Nb, 0.
These are the measurement results when the molar fraction is set to 2=1.
中：本発明範囲外
（３）第３表は添加物として、ＣｏｘＯｘとＴａ、０．
をモル分率で２：１の割合にしたときの測定結果である
。Medium: Outside the scope of the present invention (3) Table 3 shows additives such as CoxOx, Ta, 0.
These are the measurement results when the molar fraction was 2:1.
第３表
中本発明範囲外
（４）第４表は添加物とし°（、ＣｏｘＯｘとＮｂ＊Ｏ
ｓを２：ｌのモル分率で３．５重量％とした第１〜３表
かられかるように本発明の構造方法による磁器試料と従
来例によるものの測定結果とを比較すると、特性的に１
よ路間等かそれ以上の値となっている。Outside the scope of the present invention in Table 3 (4) Table 4 shows additives (, CoxOx and Nb*O
As can be seen from Tables 1 to 3, where s is 3.5% by weight at a molar fraction of 2:l, when comparing the measurement results of the porcelain sample made by the structural method of the present invention and the one made by the conventional example, it is found that the characteristics are 1
The value is at or above Yoroma.
また、添加物のＣｏｘＯｘ、Ｎｂ＊Ｏｓ及びＴａ、０．
は量的なバランスが重要であり、添加量が一定量以上に
なると特性が悪くなるが、本発明によると悪くなる程度
は小さい。In addition, the additives CoxOx, Nb*Os and Ta, 0.
Quantitative balance is important, and when the amount added exceeds a certain amount, the properties deteriorate, but according to the present invention, the degree of deterioration is small.
さらに、第４表かられかるように本発明によると同一条
件で作成した試料において、従来方法に比べて特性のば
らつきが小さくなっている。Furthermore, as can be seen from Table 4, according to the present invention, the variation in characteristics is smaller in samples prepared under the same conditions compared to the conventional method.
（ト）発明の詳細
な説明したように本発明によれば、Ｃｏの蒸発が少なく
なり、特性のばらつきを減少させることができ、また従
来方法に比べて路間等かそれ以上の特性を有するマイク
ロ波用誘電体磁器組戊物が得られる。(g) As described in detail, according to the present invention, the evaporation of Co is reduced, the variation in characteristics can be reduced, and the characteristics are better than those of the conventional method. A dielectric ceramic assembly for microwave use is obtained.
Claims (1)
時組成式がｘ・ＴｉＯ＿２−ｙ・ＺｒＯ＿２−ｚ・Ｓｎ
Ｏ＿２（但し、０．３０≦ｘ≦０．６０、０．２５≦ｙ
≦０．６０、０．０２５≦ｚ≦０．２０）で表わされる
物質を主成分とし、これに添加物としてαＣｏＯ＋βＣ
ｏ＿３Ｏ＿４（但し、０≦α≦１、０≦β≦１、α＋β
＝１）を５重量％以下でＮｂ＿２Ｏ＿３またはＴａ＿２
Ｏ＿３を１０重量％以下含有させてなるマイクロ波用誘
電体磁器組成物の製造方法であって、 前記添加物のαＣｏＯ＋βＣｏ＿３Ｏ＿４とＮｂ＿２Ｏ
＿３またはＴａ＿２Ｏ＿３とを予め合成しておき、前記
主成分に添加することを特徴とするマイクロ波用誘電体
磁器組成物の製造方法。(1) When the mole fractions are x, y, z (x+y+z=1), the composition formula is x・TiO_2-y・ZrO_2-z・Sn
O_2 (However, 0.30≦x≦0.60, 0.25≦y
≦0.60, 0.025≦z≦0.20) as the main component, and αCoO + βC as additives.
o_3O_4 (however, 0≦α≦1, 0≦β≦1, α+β
= 1) at 5% by weight or less Nb_2O_3 or Ta_2
A method for producing a microwave dielectric ceramic composition containing 10% by weight or less of O_3, the additives αCoO+βCo_3O_4 and Nb_2O
_3 or Ta_2O_3 is synthesized in advance and added to the main component. A method for producing a dielectric ceramic composition for microwave use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1208100A JP2804531B2 (en) | 1989-08-11 | 1989-08-11 | Method for producing dielectric ceramic composition for microwave |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1208100A JP2804531B2 (en) | 1989-08-11 | 1989-08-11 | Method for producing dielectric ceramic composition for microwave |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0375268A true JPH0375268A (en) | 1991-03-29 |
| JP2804531B2 JP2804531B2 (en) | 1998-09-30 |
Family
ID=16550636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1208100A Expired - Fee Related JP2804531B2 (en) | 1989-08-11 | 1989-08-11 | Method for producing dielectric ceramic composition for microwave |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2804531B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008013168A1 (en) * | 2006-07-27 | 2008-01-31 | Sharp Kabushiki Kaisha | Optical information recording medium, reproducing device for optical information recording medium, and reproducing method for optical information recording medium |
| JP2018534226A (en) * | 2015-09-28 | 2018-11-22 | コーニング インコーポレイテッド | Zirconium tin titanate composition, ceramic body containing the same, and method for producing the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5217697A (en) * | 1975-07-31 | 1977-02-09 | Murata Mfg Co Ltd | Dielectic porcelain composite to the high frequency purpose |
| JPS58217465A (en) * | 1982-06-08 | 1983-12-17 | 株式会社村田製作所 | High frequency dielectric ceramic composition |
-
1989
- 1989-08-11 JP JP1208100A patent/JP2804531B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5217697A (en) * | 1975-07-31 | 1977-02-09 | Murata Mfg Co Ltd | Dielectic porcelain composite to the high frequency purpose |
| JPS58217465A (en) * | 1982-06-08 | 1983-12-17 | 株式会社村田製作所 | High frequency dielectric ceramic composition |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008013168A1 (en) * | 2006-07-27 | 2008-01-31 | Sharp Kabushiki Kaisha | Optical information recording medium, reproducing device for optical information recording medium, and reproducing method for optical information recording medium |
| JP2018534226A (en) * | 2015-09-28 | 2018-11-22 | コーニング インコーポレイテッド | Zirconium tin titanate composition, ceramic body containing the same, and method for producing the same |
| US10882794B2 (en) | 2015-09-28 | 2021-01-05 | Corning Incorporated | Zirconium tin titanate compositions, ceramic bodies comprising same, and methods of manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2804531B2 (en) | 1998-09-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3865970B2 (en) | Porcelain composition | |
| JP4524411B2 (en) | Dielectric porcelain composition | |
| CN107805067B (en) | Low-dielectric-constant microwave dielectric ceramic with zero-frequency temperature coefficient and ultralow loss and preparation method thereof | |
| JPH08319162A (en) | Dielectric ceramic and its production | |
| JPH0375268A (en) | Production of dielectric ceramic composition for microwave | |
| JPH05211009A (en) | Dielectric porcelain composition for microwave | |
| JPH02199052A (en) | Dielectric ceramic composition for high frequency | |
| JPS5884179A (en) | Microwave dielectric ceramic composition | |
| JPH02192460A (en) | Dielectric porcelain composition for microwave | |
| JP2554478B2 (en) | Microwave dielectric porcelain composition | |
| JP3067814B2 (en) | Dielectric porcelain composition | |
| JP3067815B2 (en) | Microwave dielectric porcelain composition | |
| JPH06333429A (en) | Dielectric porcelain composition for high frequency | |
| JPH06333426A (en) | Dielectric ceramic composition for high frequency | |
| JPH04106807A (en) | Dielectric ceramic composition for microwave | |
| JPH06239663A (en) | Microwave dielectric ceramic composition and method for producing the same | |
| US5527749A (en) | Dielectric ceramic composition for high frequencies and method for preparation of the same | |
| KR970001380B1 (en) | High Frequency Dielectric Ceramics Composition | |
| JPS6227373A (en) | Dielectric ceramic | |
| JPS6054902B2 (en) | Dielectric ceramic composition for high frequency | |
| JPS60257008A (en) | Dielectric porcelain material for microwave | |
| JPS5858761B2 (en) | dielectric composition | |
| JP3550414B2 (en) | Method for producing microwave dielectric porcelain composition | |
| JPS6054904B2 (en) | Dielectric ceramic composition for high frequency | |
| JPH02123612A (en) | Porcelain dielectric composition |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |