JPH0383937U - - Google Patents

Info

Publication number
JPH0383937U
JPH0383937U JP14555789U JP14555789U JPH0383937U JP H0383937 U JPH0383937 U JP H0383937U JP 14555789 U JP14555789 U JP 14555789U JP 14555789 U JP14555789 U JP 14555789U JP H0383937 U JPH0383937 U JP H0383937U
Authority
JP
Japan
Prior art keywords
triangular wave
current
wave current
wave oscillator
oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14555789U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14555789U priority Critical patent/JPH0383937U/ja
Publication of JPH0383937U publication Critical patent/JPH0383937U/ja
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の実施例を示す平面図、第２
図は同正面図、第３図は動作説明用の電流波形図
と電子線軌道とを示す図、第４図は従来例の正面
図、第５図は動作説明用の電流波形図と電子線軌
道とを示す図、第６図は動作説明用の部分平面図
である。 １…加速管、３…走査管、４…照射窓、５…走
査コイル、６…偏向コイル、７…三角波発振器、
８…方形波発振器、１１…三角波発振器、１２…
加算器。

Claims (1)

  1. 【実用新案登録請求の範囲】 三角波発振器と、前記三角波発振器からの三角
    波電流によつて励磁され、電子線を走査する走査
    コイルと、方形波発振器と、前記方形波発振器か
    らの方形波電流によつて励磁され、前記走査コイ
    ルによる走査方向に対して直交する方向に電子線
    を偏向させる偏向コイルを備え、前記走査コイル
    と偏向コイルとによつて前記電子線の走査の軌道
    を矩形状とする電子線照射装置において、 前記三角波電流のゼロ点にピーク点が重なる三
    角波電流を発生する三角波発振器と、この三角波
    発振器からの三角波電流を前記方形波電流に同期
    して加算する加算器とを設け、前記加算器からの
    電流によつて前記偏向コイルを励磁してなる電子
    線照射装置。
JP14555789U 1989-12-18 1989-12-18 Pending JPH0383937U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14555789U JPH0383937U (ja) 1989-12-18 1989-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14555789U JPH0383937U (ja) 1989-12-18 1989-12-18

Publications (1)

Publication Number Publication Date
JPH0383937U true JPH0383937U (ja) 1991-08-26

Family

ID=31692186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14555789U Pending JPH0383937U (ja) 1989-12-18 1989-12-18

Country Status (1)

Country Link
JP (1) JPH0383937U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1183706A1 (en) * 2000-04-13 2002-03-06 Ebara Corporation Method and apparatus for electron beam irradiation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1183706A1 (en) * 2000-04-13 2002-03-06 Ebara Corporation Method and apparatus for electron beam irradiation

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