JPH038425U - - Google Patents
Info
- Publication number
- JPH038425U JPH038425U JP6880289U JP6880289U JPH038425U JP H038425 U JPH038425 U JP H038425U JP 6880289 U JP6880289 U JP 6880289U JP 6880289 U JP6880289 U JP 6880289U JP H038425 U JPH038425 U JP H038425U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- developing device
- spinner
- attracts
- nozzles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
Description
第１図は本考案のポジ現像装置の一実施例を示
す正面図、第２図ａ，ｂは本考案で使用するノズ
ルの形状を示し、そのａは底面図、そのｂは側断
面図である。第３図は従来のポジ現像装置を示す
正面図である。
５……スピナー、６……半導体ウエーハ、７…
…ノズル、８……現像液、９……ノズルホルダ、
１３……ポジ現像装置。
Fig. 1 is a front view showing an embodiment of the positive developing device of the present invention, and Fig. 2 a and b show the shape of the nozzle used in the present invention, where a is a bottom view and b is a side sectional view. be. FIG. 3 is a front view showing a conventional positive developing device. 5...Spinner, 6...Semiconductor wafer, 7...
...Nozzle, 8...Developer, 9...Nozzle holder,
13...Positive developing device.
Claims (1)
ーと、 半導体ウエーハの上方にその面内に対応して分
散した状態で配置され、現像液を滴下する多数の
ノズルとを備えたポジ現像装置。[Claim for Utility Model Registration] A spinner that attracts a semiconductor wafer and rotates at a low speed, and a number of nozzles that are arranged above the semiconductor wafer in a distributed manner corresponding to its plane and that drop a developer solution. positive developing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6880289U JPH038425U (en) | 1989-06-12 | 1989-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6880289U JPH038425U (en) | 1989-06-12 | 1989-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH038425U true JPH038425U (en) | 1991-01-28 |
Family
ID=31603552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6880289U Pending JPH038425U (en) | 1989-06-12 | 1989-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038425U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012216798A (en) * | 2011-03-25 | 2012-11-08 | Toppan Printing Co Ltd | Development nozzle, development apparatus, and development method |
-
1989
- 1989-06-12 JP JP6880289U patent/JPH038425U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012216798A (en) * | 2011-03-25 | 2012-11-08 | Toppan Printing Co Ltd | Development nozzle, development apparatus, and development method |
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