JPH038425U - - Google Patents

Info

Publication number
JPH038425U
JPH038425U JP6880289U JP6880289U JPH038425U JP H038425 U JPH038425 U JP H038425U JP 6880289 U JP6880289 U JP 6880289U JP 6880289 U JP6880289 U JP 6880289U JP H038425 U JPH038425 U JP H038425U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
developing device
spinner
attracts
nozzles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6880289U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6880289U priority Critical patent/JPH038425U/ja
Publication of JPH038425U publication Critical patent/JPH038425U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案のポジ現像装置の一実施例を示
す正面図、第２図ａ，ｂは本考案で使用するノズ
ルの形状を示し、そのａは底面図、そのｂは側断
面図である。第３図は従来のポジ現像装置を示す
正面図である。 ５……スピナー、６……半導体ウエーハ、７…
…ノズル、８……現像液、９……ノズルホルダ、
１３……ポジ現像装置。

Claims (1)

  1. 【実用新案登録請求の範囲】 半導体ウエーハを吸着して低速回転するスピナ
    ーと、 半導体ウエーハの上方にその面内に対応して分
    散した状態で配置され、現像液を滴下する多数の
    ノズルとを備えたポジ現像装置。
JP6880289U 1989-06-12 1989-06-12 Pending JPH038425U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6880289U JPH038425U (ja) 1989-06-12 1989-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6880289U JPH038425U (ja) 1989-06-12 1989-06-12

Publications (1)

Publication Number Publication Date
JPH038425U true JPH038425U (ja) 1991-01-28

Family

ID=31603552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6880289U Pending JPH038425U (ja) 1989-06-12 1989-06-12

Country Status (1)

Country Link
JP (1) JPH038425U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012216798A (ja) * 2011-03-25 2012-11-08 Toppan Printing Co Ltd 現像ノズル、現像装置および現像方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012216798A (ja) * 2011-03-25 2012-11-08 Toppan Printing Co Ltd 現像ノズル、現像装置および現像方法

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