JPH0392029U - - Google Patents

Info

Publication number
JPH0392029U
JPH0392029U JP55590U JP55590U JPH0392029U JP H0392029 U JPH0392029 U JP H0392029U JP 55590 U JP55590 U JP 55590U JP 55590 U JP55590 U JP 55590U JP H0392029 U JPH0392029 U JP H0392029U
Authority
JP
Japan
Prior art keywords
exposed object
detection
wavelength
data
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP55590U priority Critical patent/JPH0392029U/ja
Publication of JPH0392029U publication Critical patent/JPH0392029U/ja
Pending legal-status Critical Current

Links

JP55590U 1990-01-10 1990-01-10 Pending JPH0392029U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55590U JPH0392029U (cs) 1990-01-10 1990-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55590U JPH0392029U (cs) 1990-01-10 1990-01-10

Publications (1)

Publication Number Publication Date
JPH0392029U true JPH0392029U (cs) 1991-09-19

Family

ID=31504497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55590U Pending JPH0392029U (cs) 1990-01-10 1990-01-10

Country Status (1)

Country Link
JP (1) JPH0392029U (cs)

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