JPH0392355U - - Google Patents
Info
- Publication number
- JPH0392355U JPH0392355U JP114890U JP114890U JPH0392355U JP H0392355 U JPH0392355 U JP H0392355U JP 114890 U JP114890 U JP 114890U JP 114890 U JP114890 U JP 114890U JP H0392355 U JPH0392355 U JP H0392355U
- Authority
- JP
- Japan
- Prior art keywords
- port
- opening
- electron beam
- screen
- light shielding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002128 reflection high energy electron diffraction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Description
第１図はこの考案の実施例を組み込んだＲＨＥ
ＥＤ観察装置の断面図、第２図は同じく実施例の
遮光板の正面図である。
１……ＲＨＥＥＤ電子銃、２……基板、３……
基板加熱具、４……スクリーン、５……遮光板、
６……ポート、７……開口部。
Figure 1 shows an RHE incorporating an embodiment of this invention.
FIG. 2, which is a cross-sectional view of the ED observation device, is a front view of the light shielding plate of the embodiment. 1...RHEED electron gun, 2...board, 3...
Substrate heating tool, 4... Screen, 5... Light shielding plate,
6...port, 7...opening.
Claims (1)
リーンが、ポートの開口部に向けて設置してある
と共に、前記ポートの開口部に中央部を開口した
遮光板が設置してあることを特徴とした高速電子
線回析装置用スクリーン装置。 A screen is installed at the back of the port for receiving the diffracted electron beam, facing toward the opening of the port, and a light shielding plate with an opening in the center is installed at the opening of the port. Characteristic screen device for high-speed electron beam diffraction equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP114890U JPH0392355U (en) | 1990-01-10 | 1990-01-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP114890U JPH0392355U (en) | 1990-01-10 | 1990-01-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392355U true JPH0392355U (en) | 1991-09-19 |
Family
ID=31505067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP114890U Pending JPH0392355U (en) | 1990-01-10 | 1990-01-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392355U (en) |
-
1990
- 1990-01-10 JP JP114890U patent/JPH0392355U/ja active Pending
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