JPH0396033U - - Google Patents

Info

Publication number
JPH0396033U
JPH0396033U JP465390U JP465390U JPH0396033U JP H0396033 U JPH0396033 U JP H0396033U JP 465390 U JP465390 U JP 465390U JP 465390 U JP465390 U JP 465390U JP H0396033 U JPH0396033 U JP H0396033U
Authority
JP
Japan
Prior art keywords
wafer
function
stage
exposure
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP465390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP465390U priority Critical patent/JPH0396033U/ja
Publication of JPH0396033U publication Critical patent/JPH0396033U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
JP465390U 1990-01-24 1990-01-24 Pending JPH0396033U (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP465390U JPH0396033U (2) 1990-01-24 1990-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP465390U JPH0396033U (2) 1990-01-24 1990-01-24

Publications (1)

Publication Number Publication Date
JPH0396033U true JPH0396033U (2) 1991-10-01

Family

ID=31508389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP465390U Pending JPH0396033U (2) 1990-01-24 1990-01-24

Country Status (1)

Country Link
JP (1) JPH0396033U (2)

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