JPH04110023U - piezoelectric resonator - Google Patents

Abstract

(57) [Summary] [Purpose] To make the thickness of a piezoelectric filter in which multiple resonator elements are joined together, such as a double type or triple type, extremely thin. [Structure] Three resonator elements 1, 2, and 3 having similar electrode arrangements are bonded via an adhesive layer 15. The edges of the electrode extension parts 9, 10, 13 are exposed from the adhesive layer 15 between the resonator elements 1, 2, 3 at both side surfaces and the center of the top surface of this bonded body. Side electrodes 16, 17 and a top electrode 18 are formed on the resonator element 1 by sputtering, vapor deposition, etc., and the side electrodes 16, 17 and the top electrode 18 are used to conduct each electrode extension part 9, 10, 13 to each other. Connect 2 and 3 comrades electrically. Lead terminals 19, 20, and 21 are soldered to the terminal connecting portions 11, 12, and 14 of the joined body.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention relates to a piezoelectric resonator. More specifically, the present invention uses double tie double- or triple-type trap elements, piezoelectric filters, discriminators, etc. This invention relates to a piezoelectric resonator in which a plurality of resonator elements are bonded together.

0002

[Conventional technology]

FIGS. 6(a) and 6(b) show conventional double-type trap elements. conventional double This type of trap element is manufactured as follows. Resonators 51, 52 (Fig. 3)), connect the lead terminals 56, 57, 58 to each electrode extension part 53, 54, 55. Solder the vibration space forming member ( For example, wax, etc.) is applied and dried for several hours to form individual trap elements E and F. Manufacture. After that, the trap elements E and F are stacked to form the exterior member 62 using epoxy resin. Dipped in a resin bath, then baked at 150℃, and the vibration space forming member is exteriorized. It is absorbed or vaporized into the member 62 or outside the exterior member 62, and a vibration space 6 is created inside. 1 and harden the exterior member 62. Next, each corresponding lead terminal 5 Solder comrades 6, 57, and 58.

0003

[Problem that the idea aims to solve]

However, in the double type trap element with the above structure, the thickness Check the thickness of each resonator element and the soldered area (lead terminals to electrode extensions). It is the sum of the solder thickness of the soldered part), and the thickness becomes too large. There was a drawback that In particular, in the case of a double type that supports taping, Since the thickness of the single trap element itself that supports pinging is large, the overall thickness is Become bigger. Furthermore, when it comes to triple-type trap elements, three single elements Since two trap elements are bonded together, the thickness becomes even larger, making it difficult to put it into practical use. Ta.

0004 In addition, the trap element described above uses more lead terminals than necessary. As a result, there was a lot of waste, and costs were high. In addition, multiple Since the board terminals are soldered into one, it is easy to use when mounting on a printed wiring board, etc. It was also difficult to handle the product.

[0005] This invention was made in view of the drawbacks of the conventional examples mentioned above, and its main purpose is In some cases, thin trap elements such as double or triple types are used. The purpose of the present invention is to provide a piezoelectric resonator with a high quality.

[0006]

[Means to solve the problem]

The piezoelectric resonator of this invention is a piezoelectric resonator made by bonding multiple resonator elements with adhesive. A resonator, the resonator element comprising a pair of opposing electrodes on a piezoelectric substrate. A vibrating part is formed, and the electrode extension part of the vibrating part is arranged on the outer periphery of the piezoelectric substrate. Each resonator element is covered with adhesive at least in the area excluding the vibrating part. The electrode extensions at the same position on each resonator element are bonded together. Electrically conductive film formed on the edges of multiple resonator elements combined A lead terminal is attached to each electrode extension part connected with a conductive film. It is.

[0007]

[Effect]

In the present invention, the conductive film formed on the edge of the joined body of the resonator element When forming a conductive film, the resonator The thickness of the adhesive layer between the elements is made extremely thin, and the conductive film allows the electrode extension parts to be You can ensure that your intentions are carried through.

[0008] In addition, lead terminals can be attached to multiple resonator elements bonded together. Therefore, the distance between the resonator elements may be large depending on the soldered part of the lead terminal. It never becomes.

[0009] Therefore, double type or triple type, in which multiple resonator elements are bonded together, The thickness of the piezoelectric resonator can be made extremely thin.

0010 Further, the number of lead terminals can be reduced, and the cost can be reduced. In addition, This eliminates the need for lead terminals, making it easier to handle lead terminals when mounting piezoelectric resonators, etc. It becomes easier.

[0011]

【Example】

FIG. 1 shows a triple-type trap element A according to an embodiment of the present invention, and FIG. shows a perspective view of the three resonator elements 1, 2, and 3 before they are joined. resonator electronic Ment 1, 2, and 3 are, for example, 5.5MHz, 6.0MHz, and 6.5M, respectively. Hz resonator elements, and all have similar electrode structures. sand In other words, two energies are trapped in the rectangular piezoelectric ceramic substrate 4. Shape vibrating parts 5 and 6 are provided, and each vibrating part 5 and 6 are opposed to each other on both main surfaces of the piezoelectric substrate 4. It consists of circular excitation electrodes 7 and 8. On one main surface, both sides of the piezoelectric substrate Electrode extension parts 9, 10 and terminal connection parts 11, 12 are provided on the sides, and each The pole extension parts 9 and 10 are connected to the adjacent excitation electrodes 7 and 8. In addition, on the other main surface, electrodes are drawn out at the center of the piezoelectric substrate 4 over the top and bottom. A terminal connecting portion 14 is provided at the lower end of the terminal connecting portion 13. The projecting portion 13 is connected to both excitation electrodes 7 and 8. Therefore, each electrode drawer The grooves 9, 10, and 13 are arranged so as not to overlap each other in plan view.

0012 When these resonator elements 1, 2, and 3 are stacked and bonded, as shown in Fig. 3. In this way, the outer edges of the electrode extension parts 9 and 10 on both sides are exposed from top to bottom. to expose the upper edge of the central electrode extension part 13 and the areas of the vibrating parts 5 and 6. The adhesive layer 15 allows the resonator elements 1, 2, 3 is joined into three layers. Note that, for example, the exposed width a of the electrode extension parts 9 and 10 at both ends It is sufficient to secure about 0.1 mm. In addition, the exposed dimension of the central electrode extension part 13 is The method may be approximately b=0.1 mm and c=2.0 mm. This allows common The vibrating parts 5, 6 between the pendulum elements 1, 2, 3 are surrounded by an adhesive layer 15 and sealed. .

[0013] After this, the whole surface of both sides and the center part of the top surface ( A metal material is deposited by sputtering or vapor deposition in the area d in Figure 1, and a conductive film is formed. The side electrodes 16, 17 and the top electrode 18 are thus formed. At this time, the resonator element At both sides and at the center of the upper edge of the joined body of the resonator elements 1, 2, 3, the resonator elements 1, 2 , 3, the edges of each electrode extension part 9, 10, 13 are exposed from the adhesive layer 15. Therefore, as shown in Figure 2, the deposited particles are deposited on the thin layer between resonator elements 1, 2, and 3. It penetrates into the narrow gap and is deposited on the surface of each electrode extension part 9, 10, 13. Therefore Therefore, even if the adhesive layer 15 is very thin, the side electrodes 16 and 17 and the top electrode 18 This allows the electrode extension parts 9, 10, and 13 to be electrically connected to each other reliably. At this time, the side electrodes are made of solder or conductive paste without using a conductive film such as vapor deposition. 16, 17 and the top electrode 18 can be formed, but solder or conductive paste is not used. If so, the thin gap between the resonator elements 1, 2, and 3 will be invaded by the surface tension, etc. Since it is difficult to insert the resonator into the resonator, it is necessary to increase the thickness of the adhesive layer 15. The thickness of the joined body of elements 1, 2, and 3 increases.

[0014] After this, each terminal connection exposed on the outer surface of the joined body of resonator elements 1, 2, and 3 is Solder the lead terminals 19, 20, 21 to the connecting parts 11, 12, 14, and then Exterior resin is applied and baked on the joined body of child elements 1, 2, and 3. As a result, There are only three lead terminals, which makes the triple type trap element smaller. A model is planned.

[0015] In the above example, a triple type element was explained, but a resonator element A double type element can be constructed by using two elements, and similarly four elements can be constructed. It is also easy from a structural point of view to join the above resonator elements.

[0016] 4(a)(b) and FIG. 5 show a double type trap element according to another embodiment of the present invention. It is a perspective view showing child B. In this example, each resonator element 1, 2 has a parent base Obtained by cutting a plate (not shown). In other words, on both main surfaces of the parent board. After forming the electrode pattern, this parent board is cut into individual resonator elements 1 and 2. As shown in FIG. The end face of the piezoelectric ceramic substrate 4 is exposed at the end face of the piezoelectric ceramic substrate 4. Also, both resonator Elements 1 and 2 are connected to the mother board before cutting or after being cut. The entire surface of the resonator element except for the vibrating parts 5 and 6 is bonded with adhesive, and the resonator element is bonded with adhesive. The end faces (cut surfaces) of the electrode extension parts 9, 10, etc. are exposed on the end faces of the joined body of the components 1, 2. I'm being forced to come out. Further, electrode extension parts 9 and 1 drawn out from the excitation electrode 7 0, the terminal connection parts 11 and 12 extend inward, and the electrode extension parts 9 and At the upper end of 10, electrode connecting portions 22, 23 extend inward. Also, the electrode on the back side A terminal connection section 14 is provided at the lower end of the electrode extension section 13 . An electrode connection portion 24 is provided at the upper end.

[0017] Therefore, the joined body of the resonator elements 1 and 2 is formed on the lower surface of the terminal connecting portions 11 and 12. (Cut surface) The comrades are connected by lower electrodes 25 and 26 made of conductive film, and the terminals The lower surfaces (cut surfaces) of the connecting portions 14 are connected by the lower surface electrode 27, and the electrode connection The upper surfaces (cut surfaces) of the parts 22 and 23 are connected by upper surface electrodes 28 and 29, The upper surfaces (cut surfaces) of the electrode connecting portions 24 are connected by the upper surface electrode 18. . Therefore, each conductive film is in line contact with the cut surface of each upper and lower electrode.

[0018] In the embodiment shown in FIG. 1, a conductive film is formed on the side and top surfaces of the resonator element. Therefore, when forming a conductive film by a method such as vapor deposition, two vapor deposition operations are required. However, in the embodiment shown in FIGS. 4(a) and 4(b), the upper and lower surfaces of the resonator element are the same. Since the conductive film is formed in the same direction, only one evaporation process is required, which simplifies the evaporation process. It will be done. In addition, conductive films are formed at 6 locations, and each electrode lead-out portion is connected to 2 conductive films. Therefore, since they are connected to each other, the electrical connection by the conductive film is ensured and reliable. A piezoelectric resonator with high performance can be manufactured.

[0019] This invention is applicable not only to piezoelectric traps but also to piezoelectric filters and piezoelectric discriminators. It can also be applied to other resonators such as motors.

[0020]

[Effect of the idea]

According to the present invention, even if the thickness of the adhesive layer between the resonator elements is made very thin, the The electrical film can ensure electrical conduction between the electrode lead-out parts, and the resonator Since the lead terminal is attached to the element joint, it is possible to use double type or triple type. The thickness of the piezoelectric resonator, which is made by bonding multiple resonator elements such as the resonator element, is extremely thin. can be reduced.

[0021] Furthermore, the number of lead terminals can be reduced and the cost can be reduced. Furthermore, unnecessary This eliminates the need for lead terminals, making it easier to handle lead terminals when mounting piezoelectric resonators, etc. becomes easier.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway perspective view showing a triple-type trap element according to an embodiment of the present invention.

FIG. 2 is a partially enlarged sectional view of the embodiment same as above.

FIG. 3 is a perspective view showing each resonator element before bonding in the above embodiment.

FIGS. 4(a) and 4(b) are perspective views from below and above showing another embodiment of the present invention.

FIG. 5 is a perspective view showing the state before applying the adhesive and before forming the conductive film.

FIG. 6 is (a) a partially cutaway side view and (b) a perspective view showing a double-type trap element according to a conventional example.

[Explanation of symbols]

1, 2, 3 resonator element 4 Piezoelectric substrate 5, 6 Vibration part 7,8 Excitation electrode 9, 10, 13 Electrode extension part 15 Adhesive layer 16,17 Side electrode 18 Top electrode 19, 20, 21 Lead terminal

Claims (1)

[Scope of utility model registration request] 1. A piezoelectric resonator in which a plurality of resonator elements are bonded together with an adhesive, the resonator element having a vibrating section formed of a pair of opposing electrodes on a piezoelectric substrate; The electrode extension part is arranged on the outer periphery of the piezoelectric substrate, and each resonator element is bonded with adhesive at least in the area excluding the vibrating part, and the electrode extension part at the same position in each resonator element is ,
A piezoelectric resonator in which a plurality of bonded resonator elements are electrically connected by a conductive film formed on the edges, and a lead terminal is attached to each electrode extension part connected by the conductive film.