JPH04110707A - Device for measuring three-dimensional shape - Google Patents

Abstract

PURPOSE:To measure a three-dimensional shape at high speed by simultaneously using a plurality of measuring light having wave length different from each other, and taking the deflection angle information and the light receiving position information of a material to be measured, and composition-analyzing a three-dimensional form. CONSTITUTION:The slit light 201, 202 respectively having a different wave length is emitted from measuring light irradiating parts 32, 34 toward a material Q to be measured simultaneously, and the reflected light 211, 212 scattered and reflected on the surface of the material Q enter an incident lens 52 of a photographing device 30. In the photographing device 30, the light 211, 212 are selected by an optical filter 54 per a wave length, and enter a two-dimensional arrangement photo sensor part 56. In the sensor part 56, the trigger signal to be caused by the light receiving is output from a plurality of photo sensors, and is output to a deflection angle information memorizing unit 58. theta1, theta2 information are supplied in parallel with each other from generating units 36, 38 to theta1, theta2 information memorizing units 60, 62 of the deflection angle information memorizing unit 58. Each deflection angle information theta1, theta2 stored in the memorizing units 60, 62 are read out in response to the respective stored position, and three-dimensional form of the material Q is analyzed by a three- dimensional form composing and analyzing circuit 39.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a three-dimensional shape measuring device that optically measures the three-dimensional shape of an object to be measured in a non-contact manner.

[Prior Art] Non-contact shape measuring devices are known that measure the shape of an object by irradiating measurement light onto the object and capturing the measurement light reflected from the surface of the object. Its application is expected in various fields.

FIG. 6 shows the principle of the shape measuring device that optically measures the shape of the object to be measured.

Note that two-dimensional shape measurement will be described here for the sake of simplicity.

In FIG. 6, measurement light 100 is irradiated at a predetermined angle θa with respect to the X-axis from a measurement light irradiation means P such as a laser light source.
is scattered by the measurement point R of the object to be measured Q, and among the scattered light, the reflected measurement light 110 at a specific angle reaches the measurement origin 0 at an angle θb.

Therefore, as can be understood from the geometrical composition shown in FIG. It is possible to analyze using the angle θa and the incident angle θb of the reflected measurement light.

In order to determine the incident angle θb of the reflected measurement light 110, an imaging device such as a CCD in which light-receiving elements are arranged in a matrix is provided on the opposite side of the measured object Q with respect to the measurement origin O, so that the reflected measurement light 110 can be The angle θb can be determined from the light receiving position S of the measurement light 110.

That is, the distance from the center C of the image sensor 10 to the light receiving point S is defined as X, and the center C of the image sensor 10 and the measurement origin O
Letting y be the distance to the point R, it is possible to calculate the angle θb from these X and y using trigonometric functions, and it is also possible to determine the coordinates of the measurement point R.

Note that in an actual shape measuring device, a light converging lens is provided at the measurement origin 0 position, and the reflected measurement light 11 is
0 is focused and projected onto the image sensor 10, but in this case as well, it is possible to determine the coordinates of the measurement point R from the light receiving position S on the image sensor 10, as described above.

Here, although FIG. 6 shows the principle of measuring the two-dimensional shape of the object to be measured Q, the same applies to three-dimensional shape measurement. That is, it is possible to measure the three-dimensional shape of the object to be measured Q by deflecting and scanning the measurement light 100 in the Z direction or by using slit light that spreads in two directions.

In the conventional shape measuring device using the above principle, since the image sensor 10 is composed of, for example, a CCD, scanning of all the light receiving elements is required to determine the position of the light receiving point S. There is a problem in that shape measurement cannot be performed at high speed depending on the scanning time, for example, and the shape of a moving object cannot be measured. Therefore, Japanese Patent Application Laid-Open No. 62-228106 proposes a shape measuring device capable of measuring the shape of an object to be measured at high speed.

FIG. 5 shows the concept of the configuration of the shape measuring device.

In FIG. 5, the irradiation angle (deflection angle) θ of the measurement light (slit light) 100 is detected by the θ signal generator 12,
Furthermore, a θ signal is output from the θ signal generator 12.

On the other hand, the reflected measurement light (reflected slit light) 110 reflected by the object to be measured Q is incident on the imaging device 14 and reaches the two-dimensional array type photosensor section 16 provided in the imaging device 14 .

The two-dimensionally arrayed photosensor section 16 has independent photosensors arranged in a two-dimensional matrix, and each photosensor outputs an independent trigger signal.

Each of the trigger signals is sent out in correspondence to each storage element constituting the θ information storage section 18, and each storage element stores the θ information upon input of the trigger signal.

Therefore, the measurement light is not cut at each irradiation angle and irradiated while being deflected and scanned continuously, and at the same time, the irradiation angle θ is made to correspond to the light receiving point S to provide three-dimensional shape information of the object to be measured Q. It is our strength to incorporate the following.

Then, the θ information stored in each storage element of the θ information storage unit 18 is read out, and a three-dimensional shape analysis circuit calculates the θ information from the address of each storage element and the θ information. The coordinates (x, y, z>) of each point on the measurement line R at the button of the object to be measured are determined.

Note that other devices that can perform three-dimensional shape measurement at high speed without optical cutting include devices proposed in Japanese Patent Application No. 2-46946 and No. 2-46947. .

[Problem to be solved by the invention] By the way, when measuring the shape of an object to be measured using the conventional shape measuring device described above, the measurement light may not be irradiated due to the shape of the object to be measured, making it difficult to perform shape measurement. If there is a so-called blind spot area (there is one problem).

Therefore, in order to eliminate such a blind spot area, the following two methods have been adopted in the past.

The first method is to measure the shape of the object to be measured from one angle and then from another angle, or to fix the shape measurement device and rotate the object itself to shape the object. This is a method of making measurements. Then, two pieces of information with different relative angles obtained through such measurements are combined to cover the blind spot area.

The second method is the above-mentioned patent application No. 62-22810.
This is the method described in Publication No. 6, and in this method, the target
] two light sources of measurement light are arranged at positions separated by a predetermined distance with an imaging device that receives measurement light reflected from a fixed object interposed therebetween;
This is a method in which shape measurement is performed using one light source, and then shape measurement is performed using the other light source. Also in this case, the two pieces of shape information obtained are combined to eliminate blind areas.

However, in both the first method and the second method, it is necessary to perform the shape measurement two or more times, and for this reason, there is a problem that the shape measurement cannot be performed at high speed.

In particular, when measuring the shape of a moving object,
The above two methods have a problem in that the two obtained shape information only have a positional shift related to the movement of the object to be measured, making it impossible to perform accurate shape measurement.

The present invention has been made in view of the above-mentioned conventional problems,
The purpose is to provide a three-dimensional shape measuring device that can eliminate blind areas and perform shape measurement at high speed by using a plurality of measurement lights with different wavelengths.

[Means for Solving the Problems] In order to achieve the above object, the present invention irradiates a plurality of measurement lights having mutually different wavelengths toward an object to be measured from different positions without deflecting and scanning them at the same time. multiple measurement light irradiation means; deflection angle information output means provided for each of the plurality of measurement lights and configured to detect the deflection angle of the measurement light and output deflection angle information; a light sorting means that simultaneously accepts a plurality of measurement lights and separates them into wavelengths; and a light selection means provided for each of the measurement lights divided into wavelengths, which receives the divided measurement lights and obtains the deflection angle information of the measurement lights. A plurality of shape data importing means are stored in association with light reception positions, and the stored deflection angle information is read out from the plurality of shape data reception means together with the light reception position information, and the three-dimensional shape of the object to be measured is synthesized and analyzed. A shape synthesis analysis means.

[Operation] According to the above configuration, a plurality of measurement lights having mutually different wavelengths are irradiated onto the object to be measured by the multi-measurement light irradiation means,
The plurality of p1 constant lights reflected from the surface of the object to be measured are separated by wavelength by the light sorting means, and then reach the plurality of shape data acquisition means.

Here, since the shape data importing means receives the measurement light and stores the deflection angle information of the measurement light in association with the light reception position, it is possible to sufficiently track even if all the fixed projections are performed continuously. , it is possible to import shape data at high speed.

Then, the shape data captured by the plurality of shape data capture means (trowel), that is, the deflection angle information and the light receiving position information, are read out from each other and the dimensional shape of the upper ball is analyzed.

Therefore, since the measuring light beams are irradiated toward the constant object II from different positions, it is possible to eliminate or reduce the blind area, and since the plurality of W+ constant beams have different wavelengths, each of them has a different wavelength. Since it is possible to perform light selection at each time, it is possible to simultaneously irradiate multiple different positional forces.As a result, it is possible to perform high-speed 3D shape analysis of moving objects, for example. Become.

[Example] A preferred embodiment of the present invention will be described below with reference to the drawings (A). Fig. 1 shows the configuration of a three-dimensional (2)-2-shaped measuring device according to the present invention.

In FIG. 1, the three-dimensional JI double-shaped meter M1 device of this embodiment includes an imaging device 30 that receives reflected measurement light from an object to be measured Q, and a predetermined distance apart from this imaging device 30 by one. two measurement light irradiation devices 32 and 34 arranged;
Deflection angle information generators 36 and 38 are provided for each of these measurement light irradiation devices 32 and 34 and output the deflection angle information of the measurement light, and the three-dimensional shape data from the imaging device 30 is inputted to form the object to be measured Q. The three-dimensional shape synthesis analysis circuit 39 analyzes the three-dimensional shape.

First, the configuration of the measurement light irradiation device 32 will be explained below. Note that the measurement light irradiation device 34 is similar to the measurement light irradiation device 32.
Since it has the same configuration as , a detailed explanation thereof will be omitted.

The measurement light irradiation device 32 includes a laser light source 40 that generates a laser light with a wavelength λ1, and a slit light forming lens 42 that forms the laser beam from the laser light source 40 into a slit light.
and a polygon mirror 44 which is a light deflecting means that reflects the slit light emitted from the slit light forming lens 42 to perform deflection scanning.

Here, the polygon mirror 44 constantly rotates at a constant angular velocity ω, and can irradiate the object to be measured Q with the slit light 201 while deflecting and scanning it.

On the other hand, the measurement light irradiation device 34 is composed of a laser light source 46, a slit light forming lens 48, and a polygon mirror 50 as a light deflecting means, as described above. However, in this measurement light irradiation device 34, the laser light source 46
A laser beam having a wavelength different from that of the slit light 201, that is, a wavelength λ2, is generated, and the slit light 202 having a different wavelength from the slit light 201 is deflected and irradiated onto the object Q to be measured.

The imaging device 30 receives two slit lights 211 and 212 reflected by the object to be measured Q, and captures three-dimensional shape information of the object to be measured Q based on the light receiving position.

That is, this imaging device 30 includes an optical filter 54 which is a light selection means for sorting incident light guided from an entrance lens 52 provided on the front surface of the device based on the wavelength of the light, a two-dimensional array photosensor unit 56 that receives incident light divided into wavelengths, respectively;
It has a deflection angle information storage section 58 which is made up of a plurality of storage elements provided corresponding to each photosensor of this two-dimensional array photosensor section 56.

The deflection angle information storage unit 58 is composed of a θ1 information storage unit 60 for shape measurement using measurement light of wavelength λ2, and a θ22 information storage unit 62 for shape measurement using measurement light of wavelength λ2. .

A predetermined deflection angle signal θ 2 or θ 2 is supplied to each storage unit from the deflection angle information generator 36 or 38 .

■Here, the deflection angle information generators 36 and 38 manually generate photodetection signals from photodiodes for initial angle detection placed near the polygon mirrors 44 and 45, and based on these photodetection signals, Deflection angle θ and θ of each slit light
2 information is output.

Note that the optical filter 54 in this embodiment has a wavelength λ
It is formed by arranging in a two-dimensional matrix a part that transmits light of wavelength λ2 and a part that transmits light of wavelength λ2. The photosensors of the two-dimensional array photosensor section 56 are arranged in accordance with this matrix arrangement.

Next, the light selection means (light filter 5
Another example of 4) will be described.

FIG. 2 shows a second embodiment of the optical selection means.

In FIG. 2, in this embodiment, the light selection means includes an optical filter 64 that transmits only light with a wavelength λ1, and an optical filter that transmits only light with a wavelength λ2 disposed on the light transmission side of the optical filter 64. 66, and furthermore, on the light transmission side of the optical filter 66, a plurality of light beams bundled in a matrix is arranged in order to guide the transmitted light transmitted through the optical filter to the two-dimensional array photosensor section 56 shown in FIG. A fiber cable 68 is arranged.

The optical filter 64 has a plurality of optical holes 64a, which are formed every other optical hole in the vertical and horizontal directions. A plurality of light passing holes 66a are formed so as to alternate with the light passing holes 64a.

The plurality of optical fiber cables 68 each have an end surface that is connected to the light transmission holes 64a and 68.
6a when viewed from the light incident direction.

Therefore, the incident slit light 211 with the wavelength λl is not affected by the optical filter 64 and is not affected by the optical filter 64.
The light is blocked by a portion other than the light transmitting hole 66a.

The slit light 211 that has passed through the transmitted light 66a of the optical filter 66 reaches the optical fiber cable 68. Further, the slit light 212 with wavelength λ2 is transmitted through the optical filter 6
The light transmitting hole 64a is blocked by a portion other than the light transmitting hole 64a of the
The slit light 212 that has passed through 4a reaches the optical fiber cable 68 without being obstructed by the optical filter 66.

In this manner, by arranging optical filters that transmit different wavelength regions, it is possible to selectively transmit only light of specific wavelengths λ 1 and λ 2 from among the incident light.

In the light selection method of this embodiment, since the amount of incident light can be effectively received while substantially maintaining the amount of light, it has the advantage of being able to perform highly sensitive measurements compared to other embodiments described later.

In addition, in FIG. 2, the same effect can be obtained even if the optical fiber cable 68 is placed on the light transmission side of the optical filters 64 and 66, or if the two-dimensional array photosensor section 56 shown in FIG. 1 is placed. It is possible to obtain. In this embodiment, by using the optical fiber cable 68, the imaging device 30
An advantage is that the arrangement position of the two-dimensional array photosensor section 56 can be selected regardless of the optical path of the slit light.

FIG. 3 shows a third embodiment of the optical selection means.

In this embodiment, the incident light is branched into two systems by a light branching prism 70, and then reaches optical filters 72 and 74, respectively.

Here, the optical filter 72, like the optical filter 64 described above, transmits only the light having the wavelength λ1. Further, the optical filter 74 has a wavelength λ, similar to the optical filter 66 described above.
It allows only the second light to pass through.

Note that in this embodiment, the optical filters 72 and 74
The end face portions of optical fiber cables 76 and 78 are arranged behind the optical fiber cables 76 and 78, respectively, and it is possible to guide the light that has passed through each optical filter to the two-dimensionally arrayed photosensor section 56.

Therefore, according to the above configuration, the slit lights 211 and 212 that have passed through the input lens 52 both pass through the prism 7.
The light is split into two systems at 0, and one of the branched lights is
The light reaches the optical filter 72, and only the light having the wavelength λl is transmitted.

On the other hand, in the other branched light, only the light having the wavelength λ2 is transmitted through the optical filter 74 and reaches the optical fiber cable 78, as described above.

As described above, in this third embodiment, the reflected measurement light is split into two systems and then transmitted through the optical filter and received, so the amount of light is halved, but compared to the embodiment shown in FIG. This method has the advantage of eliminating the need to alternately arrange and form optical fibers or photosensors depending on the wavelength.

FIG. 4 shows a fourth embodiment of the optical selection means.

In this embodiment, the prism 70 shown in the third embodiment is replaced with a beam splitter 80 composed of a half mirror or the like.

An optical filter 82 that transmits the wavelength λl is arranged on the side of the beam splitter 80 that is the light reflection side, while an optical filter 82 that transmits only the light of the wavelength λ2 is arranged on the rear side that is the light transmission side of the beam splitter 80. A filter 84 is arranged. Note that in this embodiment as well, each filter 82 and 8
On the light transmission side of 4, optical fiber cables 86 and 88 are arranged.

Similar to the third embodiment, this fourth embodiment also has the advantage that the light transmitted through the input lens 52 is branched into two systems, thereby eliminating the trouble of arranging and forming optical fibers or photosensors alternately depending on the wavelength. has.

In each of the above embodiments, an optical filter member was placed in front of the two-dimensional array photosensor section 56 to perform light selection based on the wavelength of light. It is also possible to have a structure that is sensitive only to a specific wavelength, and the same effect as described above can be obtained.

Next, referring to FIG. 1 again, the operation of this embodiment will be explained.

First, the two measurement light irradiators 32 and 34 simultaneously irradiate the slit lights 201 and 202 toward the object to be measured Q. Here, the irradiation angle θ is detected by deflection angle information generators 36 and 38, respectively, and a θ1 signal and a θ2 signal indicating the detected deflection angle are output.

Slit lights 201 and 202 irradiated onto the object to be measured Q
are scattered and reflected on the surface of the object to be measured Q almost simultaneously, and only the reflected lights 211 and 212 at specific angles are incident on the incident lens 52 of the imaging device 30.

Slit lights 211 and 212 incident on the imaging device 30
is the above-mentioned light selection means (the optical filter 54 in FIG. 1).
The light is selectively transmitted for each wavelength and reaches a two-dimensional array photosensor section 56 arranged behind the light selection means.

As described above, this two-dimensional array photosensor section 56 has a plurality of photosensors arranged in a two-dimensional matrix corresponding to the light transmitting section of the light sorting means, and from each photosensor, Trigger signals are output independently.

A trigger signal generated by light reception is outputted to each storage element of the deflection angle information storage section, corresponding to the photosensor that received the light.

Here, the 01 information storage section 60 of the deflection angle information storage section 58
, θ1 information is supplied from the deflection angle information generator 36 to each storage element in parallel, and θ22 information is supplied in parallel to each storage element.
The information storage 62 stores information from the deflection angle information generator 38.
Two pieces of information are supplied to each storage element in parallel.

Therefore, the trigger signal from each photosensor in the two-dimensional array photosensor section 56 is transmitted to the deflection angle information storage section 58.
The deflection angle information (θ or θ2) is input to the corresponding storage element in , and the deflection angle information (θ or θ2) is stored in the storage element along with this input.

Therefore, by continuously deflecting the slit lights 201 and 202, the two-dimensional array photosensor section 56
The photosensors that receive the light sequentially generate trigger signals, and in response to the trigger signals, each storage element of the deflection angle information storage section 62 sequentially stores deflection angle information.

As already mentioned, by storing the deflection angle information in association with such light receiving positions, it is possible to capture three-dimensional shape information of the object to be measured Q in real time.

Then, the 01 information storage section 60 of the deflection angle information storage section 58
and each deflection angle information θ stored in the θ22 information storage 62
, θ2 are read out in correspondence with their storage positions (addresses), and the three-dimensional shape synthesis analysis circuit 39 reads them as follows:
The three-dimensional shape of the object to be measured Q will be analyzed.

Here, the three-dimensional shape information from the θ1 information storage unit 6o,
Since the two-dimensional shape information from the θ22 information storage 62 is combined, the blind spot area in the object to be measured Q described above can be eliminated or reduced.

In addition, in the three-dimensional shape synthesis analysis circuit 39, the three-dimensional shape information from the θ1 information storage unit 6o and the θ22 information storage 6
For areas where the two pieces of three-dimensional shape information do not match, correction processing is performed by, for example, averaging or interpolation.

In the above explanation, the three-dimensional shape of the object to be measured Q was measured using two measurement beams, but this is not limited to this, for example, and three or more measurement beams may be used at different wavelengths and from different positions. The shape data may be taken in by irradiating and sorting the reflected measurement light from the constant object Q for each wavelength.

In this case, it is possible to further eliminate or reduce the blind spot area, and there is an effect that the same rapid three-dimensional shape measurement as described above can be performed.

[Effects of the Invention] As explained above, according to the three-dimensional shape measuring device according to the present invention, three-dimensional shape data of an object to be measured is acquired by simultaneously using a plurality of measurement lights having mutually different wavelengths. Therefore, it is possible to eliminate or reduce a blind area in a fixed object, and it is possible to perform three-dimensional shape measurement at high speed.

[Brief explanation of drawings]

FIG. 1 is a conceptual diagram showing the configuration of a three-dimensional shape measuring device according to the present invention, FIGS. 2 to 4 are explanatory diagrams showing an embodiment of the optical selection means, and FIG. 5 is a conventional three-dimensional shape measuring device Fig. 6 is a conceptual diagram showing the concept of shape measurement. 30... Imaging device 3234... Measurement light irradiation device 3638... Deflection angle information generator 39...
Three-dimensional shape synthesis analysis circuit 54 ... 56 ... 58 ... 60 ... 62 ... 201° 202° Optical filter (light selection means) Two-dimensional array photosensor section Deflection angle information storage section θ1 information Storage section θ22 information storage 211...Slit light 212 with wavelength λ1...
Slit light measuring object with wavelength λ2 Applicant: Cadix Co., Ltd.

Claims (1)

[Scope of Claims] Multi-measurement light irradiation means for simultaneously irradiating a plurality of measurement lights having different wavelengths toward an object to be measured from different positions while deflecting and scanning the object; , a deflection angle information output means that detects the deflection angle of the measurement light and outputs deflection angle information; and a light selection means that simultaneously receives the plurality of measurement lights reflected on the surface of the object to be measured and separates them into wavelengths. and,
a plurality of shape data importing means provided for each of the measurement lights divided for each wavelength, receiving the divided measurement lights and storing the deflection angle information of the measurement lights in association with the light reception position; shape synthesis analysis means for reading out the stored deflection angle information together with the light receiving position information from the shape data acquisition means of the object, and synthetically analyzing the three-dimensional shape of the object to be measured. Device.