JPH0415521A - Adjustment device for measuring equipment - Google Patents

Adjustment device for measuring equipment

Info

Publication number
JPH0415521A
JPH0415521A JP11761290A JP11761290A JPH0415521A JP H0415521 A JPH0415521 A JP H0415521A JP 11761290 A JP11761290 A JP 11761290A JP 11761290 A JP11761290 A JP 11761290A JP H0415521 A JPH0415521 A JP H0415521A
Authority
JP
Japan
Prior art keywords
sound wave
detection means
signal
sound
measuring instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11761290A
Other languages
Japanese (ja)
Inventor
Yoshio Maeda
芳夫 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11761290A priority Critical patent/JPH0415521A/en
Publication of JPH0415521A publication Critical patent/JPH0415521A/en
Pending legal-status Critical Current

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  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Indicating Measured Values (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は計測機器に係り、特にその調整を容易にする計
測機器の調整装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to measuring instruments, and particularly to an adjusting device for measuring instruments that facilitates adjustment thereof.

〔従来の技術〕[Conventional technology]

光や電気などの物理量あるいは化学量などを計測2表示
する計測機器では、測定対象からの物理量や化学量ある
いはその変化を検知し、検知された測定量に基づいて、
必要なデータ処理などを施し、結果をアナログ量あるい
はディジタル量として、メータ、記録計、数字表示器、
プリンタ、ブラウン管などの出力手段に出力する。その
出力の態様は、表示・記録など可視的手段に依っている
Measuring devices that measure and display physical quantities or chemical quantities such as light or electricity detect physical quantities or chemical quantities or changes in them from the object to be measured, and then, based on the detected measured quantity,
Performs the necessary data processing, converts the results into analog or digital quantities, and displays them on meters, recorders, numerical displays, etc.
Output to an output means such as a printer or a cathode ray tube. The mode of output depends on visual means such as display and recording.

この種の装置として関連するものには、例えば松井他r
T−5000形日立高速膜厚測定装置による薄膜の膜厚
測定J THE HITACHI SCIENTIFI
CINSTRUMENT N聞S立工<1> 1988
  p27などがある。
Related devices of this type include, for example, Matsui et al.
Thin film thickness measurement using the T-5000 Hitachi High Speed Film Thickness Measuring System THE HITACHI SCIENTIFI
CINSTRUMENT Nmons Rikko <1> 1988
p27 etc.

近年、この種計測機器は、原理の高度化、コンピュータ
の内蔵や応用範囲の拡大による複雑化などにより、機器
自体も大形化しており、また複数のユニットより構成さ
れるものもある。計測計器が高度化、複雑化する程、よ
り必要度を増すのが、機器の調整である。例えば光学的
計測機器では、試料の配設状態や、光学系のアライメン
トなど、最適な感度で、S/N良く、精度良く計測する
ためには、測定に先立って様々なチューニングを必要と
する。試料の微小部分についての計測を行なうため顕微
鏡などを併用した計測機器では、フォーカシングや、試
料微動調整なども伴なう。このような調整は、一般に目
視に依って行なわれ、最終的には、計測機器から出力さ
れ表示される表示値をモニタし乍ら、最適微調整が行な
われる。
In recent years, this type of measuring equipment has become larger due to the sophistication of its principles, increased complexity due to built-in computers, and expansion of the range of applications, and some are made up of multiple units. As measuring instruments become more sophisticated and complex, the need for equipment adjustment increases. For example, optical measuring instruments require various tuning prior to measurement in order to measure with optimum sensitivity, good S/N, and high precision, such as the arrangement of the sample and the alignment of the optical system. Measuring equipment that uses a microscope or the like to measure minute parts of a sample also involves focusing and micro-movement adjustment of the sample. Such adjustments are generally performed visually, and finally, optimal fine adjustments are made while monitoring the displayed values output from the measuring equipment.

〔発明が解決しようとする課題〕 しかし乍ら、この様な従来装置では、機器自体が大形化
する程、調整し乍ら表示結果をモニタすることが困難に
なって来た。機器の結果表示部位と、調整部位とが、近
くに配設されているとは限らず、また、微妙な調整にお
いては、調整部位から目を離すことができないこともあ
る。前述の顕微鏡を用いた計測機器などにおいては、オ
ペレータは顕微鏡をのぞき乍ら調整する必要があり、同
時に計測機器の結果表示をモニタすることは困難である
。光学的計測機器の中には、暗室のような暗い所での作
業が必要な場合もあり、このような場合も調整と、計測
結果のモニタを同時に行なうには困難がある。
[Problems to be Solved by the Invention] However, with such conventional devices, as the device itself becomes larger, it has become difficult to monitor the display results while making adjustments. The result display part of the device and the adjustment part are not necessarily located close to each other, and when making delicate adjustments, it may be impossible to take one's eyes off the adjustment part. In the above-mentioned measuring instruments using a microscope, the operator needs to make adjustments while looking into the microscope, and it is difficult to simultaneously monitor the result display of the measuring instrument. Some optical measuring instruments require work in a dark place, such as a darkroom, and in such cases, it is difficult to make adjustments and monitor measurement results at the same time.

本発明の目的は上記したような従来技術での計測機器に
おける欠点を解決し、計測機器の調整を容易にすること
にある。
SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned drawbacks of conventional measuring instruments and to facilitate adjustment of the measuring instruments.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的のために、本発明では、計測結果を可聴音に変
換して表現し、計測結果を調整中のオペレータに音波で
知らしめる。即ち、計測機器の検知手段からの信号量に
応じて、音波を発生する音波発生手段を備え、例えば発
生する音波の高低を検知手段からの信号量の大小に応じ
て変化させる。
For the above purpose, in the present invention, the measurement results are expressed by converting them into audible sounds, and the operator making the adjustment is informed of the measurement results using sound waves. That is, the apparatus includes a sound wave generating means that generates a sound wave according to the amount of signal from the detection means of the measuring device, and changes the height of the generated sound wave, for example, depending on the amount of signal from the detection means.

〔作用〕[Effect]

オペレータはこの音を聴き乍ら、調整作業を行ない、音
ができるだけ高くなるように調整することにより、計測
結果表示を見ることなく、容易に好適状態への調整を行
なうことができる。音波の発生方法は、必ずしも検知手
段からの信号量の大小に応じて音の高低(周波数)を変
える必要はなく、音の大きさや、間欠の周期などを変え
ても良く、またはそれらの組合せでも良い。音波発生の
目的は、オペレータの調整が良い方向へ調整されつつあ
るか、悪い方向へ調整されつつあるかを判断する目安で
あるから、検知手段からの信号量と音波の変化の関係は
相対的で良く、比例精度も必要としないので、簡便に構
成できる。正確な計測結果は、計測機器の結果表示を見
れば良い。また相対値で良い為に、例えば音が高くなり
過ぎた場合などオペレータの操作によって、音の周波数
などを、ある一定値にリセットするようにしておくと、
オペレータは常に快適な周波数範囲で調整作業を続ける
ことができる。更に音が煩わしく感じる場合には、音波
の発生を停止する操作手段を設けることにより、不快感
を解消することも可能である。
The operator listens to this sound and makes adjustments to make the sound as high as possible, thereby easily adjusting to a suitable state without looking at the measurement result display. The method of generating sound waves does not necessarily have to change the pitch (frequency) of the sound depending on the magnitude of the signal from the detection means, but it is also possible to change the volume of the sound, the intermittent period, etc., or a combination thereof. good. The purpose of sound wave generation is to determine whether the operator's adjustment is being adjusted in a good direction or in a bad direction, so the relationship between the amount of signal from the detection means and the change in sound waves is relative. Since it does not require proportional accuracy, it can be easily configured. For accurate measurement results, just look at the result display on the measuring device. Also, since relative values are sufficient, for example, if the sound gets too high, the frequency of the sound can be reset to a certain value by the operator's operation.
The operator can always continue making adjustments within a comfortable frequency range. Furthermore, if the sound is bothersome, it is possible to eliminate the discomfort by providing an operating means for stopping the generation of sound waves.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図により説明する。第1
図は本発明の一実施例を示す機能系統図である。検知手
段5は、光量や電気量などの物理量あるいは化学量など
を検知する検知手段である。
An embodiment of the present invention will be described below with reference to FIG. 1st
The figure is a functional system diagram showing one embodiment of the present invention. The detection means 5 is a detection means for detecting a physical quantity such as a light quantity or an electric quantity, or a chemical quantity.

通常この検知手段の前には、例えば光源1分光器。Usually, this detection means is preceded by, for example, a light source and a spectrometer.

測定対象である試料、顕微鏡など計測機器を構成する要
素群が、計測目的に応じて配設されている。
Elements that make up the measurement equipment, such as the sample to be measured and the microscope, are arranged according to the measurement purpose.

本実施例では、計測機器の例として顕微分光光度計を示
している。光源1からの光束は顕微鏡2によって集光さ
れ、測定試料3の微小部分に照射される。測定試料3か
らの反射光は、再び顕微鏡を経て、分光器4の入射スリ
ット41上に集光される。分光器4は、入射光を波長に
従って分光し、特定の波長の光が出射スリット44を通
過して、光電子増倍管などの検知手段5にて検知される
In this embodiment, a microspectrophotometer is shown as an example of the measuring instrument. A light beam from a light source 1 is focused by a microscope 2 and irradiated onto a minute portion of a measurement sample 3. The reflected light from the measurement sample 3 passes through the microscope again and is focused onto the entrance slit 41 of the spectrometer 4. The spectrometer 4 separates the incident light according to its wavelength, and light of a specific wavelength passes through an output slit 44 and is detected by a detection means 5 such as a photomultiplier tube.

駆動装置45は、回折格子43を回転させることにより
、出射スリット44から検知手段5に到達する光の波長
を変化、即ち波長走査するために設けられている。波長
走査を停止している時は、その波長における測定試料の
分光反射率が、また波長走査すれば、分光反射スペクト
ルが計測結果として得られる。これら反射率やスペクト
ルの演算は、後述のディジタル計測機8によって行なわ
れる。検知手段5で検知した信号量は比例する電気信号
に変換されて、増幅器6で増幅され、A/D変換器7で
ディジタル量に変換された後、ディジタル計算機8に取
り込まれる。ディジタル計算機8は、取り込んだ信号量
を、計測目的に応じてデータ処理し、例えば分光反射ス
ペクトルなどの計測結果として出力し、出力データは計
測結果表示器9に表示される。機器の調整時には、計測
結果表示器9は、最終計測結果である例えば分光スペク
トル形状などばかりでなく、例えばある波長における吸
光度や反射率、その時の検知手段5が検知している信号
量そのものの値などを、ディジタル的あるいはアナログ
的に、可視的に表示する。
The drive device 45 is provided to rotate the diffraction grating 43 to change the wavelength of the light that reaches the detection means 5 from the output slit 44, that is, to perform wavelength scanning. When the wavelength scan is stopped, the spectral reflectance of the measurement sample at that wavelength is obtained as a measurement result, and when the wavelength is scanned, the spectral reflection spectrum is obtained as the measurement result. These reflectance and spectrum calculations are performed by a digital measuring device 8, which will be described later. The signal amount detected by the detection means 5 is converted into a proportional electric signal, amplified by an amplifier 6, converted into a digital amount by an A/D converter 7, and then input into a digital computer 8. The digital computer 8 processes the captured signal amount according to the purpose of measurement, outputs it as a measurement result such as a spectral reflection spectrum, and the output data is displayed on the measurement result display 9. When adjusting the equipment, the measurement result display 9 displays not only the final measurement result, such as the shape of the spectrum, but also the absorbance and reflectance at a certain wavelength, and the value of the signal amount itself detected by the detection means 5 at that time. etc., visually displayed digitally or analogously.

−力木発明では、機器の調整時には、ディジタル計算機
8は検知手段が検知した信号量に比例した電圧出力をD
/A変換器10を介して出力する。
- In the Rikiki invention, when adjusting equipment, the digital computer 8 outputs a voltage proportional to the amount of signal detected by the detection means.
/A converter 10.

この出力信号は電圧−周波数変換器11によって検知信
号に応じた周波数の信号に変換され、増幅器12で増幅
され、スピーカ13を駆動して音波を発生する。発生す
る音波の高低は、検知手段5が検知する信号量の大小に
対応しており、この為、計測機器のオペレータは、計測
結果表示器5を見ることなく、スピーカからの音の高低
を頼りとして、音が高くなるように機器を調整し、調整
作業に集中することが可能である。
This output signal is converted by a voltage-frequency converter 11 into a signal with a frequency corresponding to the detection signal, amplified by an amplifier 12, and drives a speaker 13 to generate a sound wave. The height of the generated sound wave corresponds to the amount of signal detected by the detection means 5. Therefore, the operator of the measuring device can rely on the height of the sound from the speaker without looking at the measurement result display 5. As a result, it is possible to adjust the equipment so that the sound becomes higher and concentrate on the adjustment work.

近年の計測機器は、ディジタル計算機を内蔵しているこ
とが多く、検知手段5からの信号量は、上述のようにデ
ィジタル計算機8を介して、音波発生手段10,11,
12.13などに伝えられるが、増幅器6からの出力信
号により、直接スピーカ13を駆動することも可能であ
る。
In recent years, measuring instruments often have a built-in digital computer, and the signal amount from the detection means 5 is transmitted to the sound wave generation means 10, 11,
12, 13, etc., but it is also possible to directly drive the speaker 13 with the output signal from the amplifier 6.

〔発明の効果〕〔Effect of the invention〕

以上のように、本発明によれば、計測機器の調整作業に
際して、計測結果の可視的表示手段を見ることなく、可
聴音波に基づいて調整作業を行なうことができるため、
調整作業に集中でき、調整効率の向上を図ることができ
る。また本発明の構成は、計測機器に通常備えられてい
る、操作ミスなどを音で知らせるスピーカなどの音波発
生手段を利用して、極めて簡便に構築することができる
As described above, according to the present invention, when adjusting a measuring device, it is possible to perform adjustment work based on audible sound waves without looking at the means for visually displaying measurement results.
It is possible to concentrate on adjustment work and improve adjustment efficiency. Further, the configuration of the present invention can be constructed extremely easily by using a sound wave generating means such as a speaker that is normally provided in measuring instruments and notifies operational errors etc. with sound.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す機能構成図である。 1・・・光源、2・・・顕微鏡、3・・・測定試料、4
・・・分光器、5・・・検知手段、6・・・増幅器、7
・・・A/D変換器、8・・・ディジタル計算機、9・
・・計測結果表示器、10・・・D/A変換器、11・
・・電圧−周波数変換器、12・・・増幅器、13・・
・スピーカ、21・・・レンズ、22・・・ハーフミラ
−123・・・反射鏡、41・・・入射スリット、42
・・・凹面鏡、43・・・回折格子、44・・・出射ス
リット、45・・・駆動装置。
FIG. 1 is a functional configuration diagram showing an embodiment of the present invention. 1... Light source, 2... Microscope, 3... Measurement sample, 4
... Spectrometer, 5... Detection means, 6... Amplifier, 7
... A/D converter, 8... Digital computer, 9.
...Measurement result display, 10...D/A converter, 11.
...Voltage-frequency converter, 12...Amplifier, 13...
・Speaker, 21...Lens, 22...Half mirror 123...Reflector, 41...Incidence slit, 42
... Concave mirror, 43 ... Diffraction grating, 44 ... Output slit, 45 ... Drive device.

Claims (1)

【特許請求の範囲】 1、光量や電気量などの物理量や、化学量を検知する検
知手段と、該検知手段からの信号に基づいてデータを表
示あるいは記録する出力手段とを有する計測機器におい
て、前記検知手段からの信号量に応じて音を発生する音
波発生手段を備え、該音波発生手段が発生する音波は、
その周波数、または大きさ、または間欠の周期など発生
音波の性質が、前記検知手段からの信号量に応じて変化
することを特徴とする計測機器の調整装置。 2、請求項第1項において、計測機器のオペレータが操
作する操作器を備え、該操作器が操作される都度、前記
音波発生手段から発生される音波の性質を、ある周波数
、または大きさ、または間欠の周期など基準の状態にリ
セットすることを特徴とする計測機器の調整装置。 3、請求項第1項において、前記音波発生手段の動作を
ON/OFFできることを特徴とする計測機器の調整装
置。
[Scope of Claims] 1. A measuring instrument having a detection means for detecting a physical quantity such as a quantity of light or an quantity of electricity or a chemical quantity, and an output means for displaying or recording data based on a signal from the detection means, A sound wave generating means for generating sound according to the amount of signal from the detection means is provided, and the sound wave generated by the sound wave generating means is
An adjusting device for a measuring instrument, characterized in that the characteristics of the generated sound wave, such as its frequency, magnitude, or intermittent period, change in accordance with the amount of signal from the detection means. 2. In claim 1, the measuring instrument includes an operating device operated by an operator, and each time the operating device is operated, the property of the sound wave generated from the sound wave generating means is set to a certain frequency or magnitude. Or an adjustment device for measuring instruments characterized by resetting to a reference state such as an intermittent cycle. 3. The adjusting device for a measuring instrument according to claim 1, characterized in that the operation of the sound wave generating means can be turned ON/OFF.
JP11761290A 1990-05-09 1990-05-09 Adjustment device for measuring equipment Pending JPH0415521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11761290A JPH0415521A (en) 1990-05-09 1990-05-09 Adjustment device for measuring equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11761290A JPH0415521A (en) 1990-05-09 1990-05-09 Adjustment device for measuring equipment

Publications (1)

Publication Number Publication Date
JPH0415521A true JPH0415521A (en) 1992-01-20

Family

ID=14716071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11761290A Pending JPH0415521A (en) 1990-05-09 1990-05-09 Adjustment device for measuring equipment

Country Status (1)

Country Link
JP (1) JPH0415521A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110244067A1 (en) * 2010-03-31 2011-10-06 Ykk Corporation Sizing Device
JP2019012007A (en) * 2017-06-30 2019-01-24 竹中エンジニアリング株式会社 Detection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110244067A1 (en) * 2010-03-31 2011-10-06 Ykk Corporation Sizing Device
US8651848B2 (en) * 2010-03-31 2014-02-18 Ykk Corporation Sizing device
JP2019012007A (en) * 2017-06-30 2019-01-24 竹中エンジニアリング株式会社 Detection device

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