JPH0415843U - - Google Patents
Info
- Publication number
- JPH0415843U JPH0415843U JP5783090U JP5783090U JPH0415843U JP H0415843 U JPH0415843 U JP H0415843U JP 5783090 U JP5783090 U JP 5783090U JP 5783090 U JP5783090 U JP 5783090U JP H0415843 U JPH0415843 U JP H0415843U
- Authority
- JP
- Japan
- Prior art keywords
- wafer probe
- wafer
- scratch
- device section
- heating circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000005485 electric heating Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5783090U JPH0415843U (cs) | 1990-05-30 | 1990-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5783090U JPH0415843U (cs) | 1990-05-30 | 1990-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415843U true JPH0415843U (cs) | 1992-02-07 |
Family
ID=31582895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5783090U Pending JPH0415843U (cs) | 1990-05-30 | 1990-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415843U (cs) |
-
1990
- 1990-05-30 JP JP5783090U patent/JPH0415843U/ja active Pending
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