JPH04162017A - Manufacture of liquid crystal element - Google Patents

Abstract

PURPOSE:To provide a liquid crystal element manufacturing process with which black stripes with high dimensional accuracy are formed with a smaller number of processes, by putting an organic substance layer on a transparent base and further thereover a transparent electroconductive layer, forming a resist over this transparent electroconductive layer, removing the organic substance layer and transparent electroconductive layer situated in voids in the resist, forming recess in the organic substance layer in transparent electrode pattern voids and the pattern itself, applying a black coating, and removing the resist. CONSTITUTION:First a transparent base 1 is coated with sublimative UV hardening resin over the whole surface, and an organic substance layer 2 is formed. As a transparent electroconductive film 3, ITO film is formed on this organic substance layer 2. Then photo-resist is coated over the transparent electroconductive film 3, followed by light exposure and development, and thus resist 4 is formed. This is subjected to ethanol gas plasma processing, and the film 3 and layer 2 in the part not masked with the resist 4 are removed. As a black dye 5, a black ink including carbon black is coated, and when this is upon drying immersed in water solution of hydrogen peroxide, the resist 4 swells with moistening and separates off together with the coating, while the remaining part forms black stripes 6. This is used as the base board, and a liquid crystal element is achieved.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a liquid crystal element used in a liquid crystal display device.

In order to enhance display contrast in conventional liquid crystal display devices, black stripes are provided in gaps between transparent electrode patterns on a substrate used in the liquid crystal element.

An example of a conventional method for manufacturing a liquid crystal element will be described below with reference to the drawings.

FIG. 3 is a process explanatory diagram showing a conventional method for forming transparent electrodes and black stripes in a liquid crystal element.

As shown in FIG. 3(A), a transparent conductive film 22 is provided on a transparent substrate 21. Next, a photoresist is coated on the conductive film 22, and a photoresist 23 is exposed using a transparent electrode photomask 24. By developing, a resist 23 having a predetermined pattern is formed as shown in FIG. 3(B).

Next, as shown in FIG. 3(C), the transparent conductive film in the gap between the resists 23 is etched with hydrochloric acid, etc., and the resist 23 is removed as shown in FIG. 3(D) to form a predetermined pattern. A transparent electrode 25 is formed.

Next, as shown in FIG. 3(E), a dyeable photosensitive resin 26 is applied onto the transparent substrate 21.

Next, as shown in FIG. 3(F), the dyeable photosensitive resin 26 is exposed and developed using a black stripe photomask 27 to form the dyeable photosensitive resin 26 in a predetermined stripe pattern. Next, as shown in FIG. 3(G), black stripes 28 are formed by dyeing the dyeable photosensitive resin 26 in a predetermined stripe pattern with a dye dispersion or the like, and directly by printing or other means. However, the dyeing method cannot achieve the dimensional accuracy of the black stripes (the process is complicated and the cost is high).4 On the other hand, the printing method has a low cost. In view of the above problems, the present invention provides a method for manufacturing a liquid crystal element that can form black stripes with high dimensional accuracy in a small number of steps. Means for Solving the above problems In the method for manufacturing a liquid crystal element of the present invention, an organic layer is provided on a transparent substrate, a transparent conductive layer is provided on the organic layer, and a predetermined layer is formed on the transparent conductive layer. forming a patterned resist and removing the transparent conductive layer and the organic layer in the gap between the resist by plasma treatment, thereby forming a transparent electrode pattern and forming a recess in the organic layer in the gap between the transparent electrode patterns; Next, black stripes are formed in the recesses by applying black paint and removing the resist.

An organic material layer is provided on a transparent substrate, a transparent conductive layer is provided on the organic material layer, a resist having a predetermined pattern is formed on the transparent conductive layer, and the transparent conductive layer in the gap between the resist and the transparent conductive layer are formed by plasma treatment. By removing the organic material layer, a transparent electrode pattern is formed and a recess is formed in the organic material layer in the gap between the transparent electrode patterns. Next, black paint is applied and the resist is removed to form a black in the recess. The challenge of forming stripes: Without the need for a photolithography process to form black stripes, the transparent conductive layer and the organic layer are successively removed, and the black paint is applied on the resist, and the black paint is applied to unnecessary areas at the same time as the resist is removed. By removing , the number of steps is reduced, and black stripes with high dimensional accuracy are formed without alignment with transparent electrodes.
This will be explained with reference to the drawings.

FIG. 1 is a process explanatory diagram showing a first embodiment of the method for manufacturing a liquid crystal element of the present invention.

First, as shown in FIG. 1(A), an organic layer 2 is formed on a transparent substrate 1. In this example, as the organic layer 2, a sublimable ultraviolet curing resin was applied to the entire surface by a method such as a spin code, and then a transparent conductive film 3 was formed on the layer 2 as shown in FIG. 1(B). As a transparent conductive film 3, ITo (indium tin oxide) was formed by sputtering, and a photoresist was coated on the conductive film 3. The photoresist was exposed and developed. A resist 4 having a predetermined pattern is formed as shown in C).

Next, when ethanol gas plasma treatment is performed using a parallel plate type dry etching device, the transparent conductive film 3 and the organic layer 2 are removed from the portions not masked by the resist 4, as shown in FIG. 1(D). However, in this example, the high frequency power is 2 kW, the ethanol gas pressure is 1
When treated at 0 mTorr for 30 minutes, the transparent conductive film 3 and the organic layer 2 were removed to a depth of 1.5 μm, and the resist 4 (resist 4 did not change at all), and the ITo was removed as an organic metal. .

Next, as shown in FIG. 1(E), black paint 5 is applied.

A black ink containing carbon black is used as the black paint 5. When the black paint 5 dries and is immersed in hydrogen peroxide, the resist 4 swells and falls off together with the black paint applied on top of it. Figure 1 (F) As shown in (Mi) After the black stripe 6 is formed in the remaining portion, the liquid crystal element shown in FIG. 1(G) is obtained by using the substrates shown in FIG. 1(F) as the upper and lower substrates. After coating the polyimide film on the substrate shown in Figure 1 (F) and performing a rubbing process, the upper and lower substrates are arranged so that their black stripes are perpendicular to each other, and the side substrates are spaced at a desired distance. Then, liquid crystal is injected between the side substrates to complete the liquid crystal element.

Characteristics of the liquid crystal element of this example obtained in this way (Table 1)
FIG. 2, which showed good contrast and high contrast, is a structural diagram of a liquid crystal element obtained in a second embodiment of the present invention.

In the upper substrate, the organic layer 2 was formed in the same manner as in the first embodiment except that an organic layer 2 was formed on a color filter substrate consisting of a color filter 10 formed by a printing method and a transparent substrate 1, as shown in FIG. A color liquid crystal element is obtained.

As described above, an organic layer is provided on a transparent substrate, a transparent conductive layer is provided on the organic layer, a resist with a predetermined pattern is formed on the transparent conductive layer, and a transparent conductive layer is formed in the gaps between the resists by plasma treatment. By removing the organic material layer, a transparent electrode pattern is formed and a recess is formed in the organic material layer in the gap between the transparent electrode patterns.Next, black paint is applied and the resist is removed to form a recess in the recess. It is possible to form a black stripe with high dimensional accuracy with a small number of steps to form a black stripe.Also, since carbon black can be used, it has excellent light shielding properties.The substrate surface has good flatness, and a liquid crystal display with high display characteristics. It is possible to provide the elements.

Further, according to the second embodiment, it is possible to provide a color liquid crystal element, but in this case, by forming the organic layer 2, the flatness of the color filter can be improved. According to the present invention, an organic layer is provided on a transparent substrate, a transparent conductive layer is provided on the organic layer, a resist with a predetermined pattern is formed on the transparent conductive layer, and the transparent conductive layer is formed in the gap between the resists by plasma treatment. By removing the organic material layer, a transparent electrode pattern is formed, and a recess is formed in the organic material layer in the gap between the transparent electrode patterns.Next, by applying black paint and removing the resist, the recess is formed. 8. Black stripes with high dimensional accuracy can be formed with a small number of steps.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of the process of the first embodiment of the method for manufacturing a liquid crystal device of the present invention. FIG. 2 is a diagram showing the configuration of a liquid crystal device obtained in the second embodiment of the present invention. FIG. FIG. 3 is a process explanatory diagram of a method for manufacturing an element. 1...Transparent group #, 2...Organic layer 3...Transparent conductive layer 4...Resist 5...Black paint 6.
...Name of Blackstrice's agent: Patent attorney Akira Okaji and 2 others l0--
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Claims (1)

[Claims] (1) An organic layer is provided on a transparent substrate, a transparent conductive layer is provided on the organic layer, a resist with a predetermined pattern is formed on the transparent conductive layer, and the transparent conductive layer is formed in the gaps between the resists by plasma treatment. By removing the organic material layer, a transparent electrode pattern is formed and a recess is formed in the organic material layer in the gap between the transparent electrode patterns, and then a black paint is applied and the resist is removed to form a recess in the recess. A method for manufacturing a liquid crystal element that forms a black stripe.