JPH0444008A - Manufacturing method of liquid crystal element - Google Patents

Abstract

PURPOSE:To decrease the man-hours and improve the dimension accuracy by forming a recessed part in the organic material layer in the gap part between transparent electrode patterns by a plasma process, applying a black paint, and removing the black paint on the transparent electrodes, and forming a black stripe in the recessed part. CONSTITUTION:The organic material layer 2 is provided on a transparent base body 1 and the transparent electrodes 6 are patterned and formed on the organic material layer 2. Then the recessed part is formed in the organic material layer 2 in the gap between the patterns of the transparent electrodes 6 by the plasma process. Then the black paint 7 is applied and the black paint on the transparent electrodes 6 are removed to form the black stripe 8 in the recessed part. The need for a photolithographic process for black stripe formation is eliminated and the need for positioning with transparent electrodes is also eliminated and the man-hours are reduced and the dimension accuracy is increased.

Description

DETAILED DESCRIPTION OF THE INVENTION Industrial Field of Application The present invention 41 relates to a method of manufacturing a liquid crystal element used in a liquid crystal display device.

In conventional liquid crystal display devices (in order to increase display contrast), black stripes are provided in the gaps between transparent electrodes of the substrate used in the liquid crystal element.

An example of a method for forming black stripes in a conventional method for manufacturing a liquid crystal device will be described below with reference to the drawings.

FIG. 3 is a sectional view showing a method of forming transparent electrodes and black stripes in a conventional method of manufacturing a liquid crystal element.

As shown in FIG. 3(A), a transparent conductive film 22 is provided on a transparent substrate 21. Next, a photoresist is applied and exposed and developed using a transparent electrode photomask 24 to form a resist 23 in a predetermined pattern as shown in FIG. 3(B).

Next, as shown in FIG. 3(C), the transparent conductive film in the gap between the resists 23 is removed by etching with hydrochloric acid or the like.
By removing the resist 23 as shown in Figure (D), a transparent electrode 25 having a predetermined pattern is formed.

Next, as shown in FIG. 3(E), a dyeable photosensitive resin 26 is applied onto the transparent substrate 21.

Next, as shown in FIG. 3(F), the dyeable photosensitive resin 26 is exposed and developed using a black stripe photomask 27, thereby forming the dyeable photosensitive resin 26 in a predetermined stripe pattern.

Next, as shown in FIG. 3(G), black stripes 28 are formed by dyeing the dyeable photosensitive resin 26 in a predetermined stripe pattern with a dye dispersion or the like. However, the dimensional accuracy of the black stripes cannot be achieved with the dyeing method (the process is complicated and the cost is high; on the other hand, the printing method is low cost). In view of the above problem, the present invention provides a method for manufacturing a liquid crystal element that can form black stripes with high dimensional accuracy in a small number of steps.

Means for Solving the Problems In order to solve the above problems, the method for manufacturing a liquid crystal element of the present invention includes: providing an organic layer on a transparent substrate, patterning a transparent electrode on the organic layer; Concave portions are formed in the organic layer in the gaps between the electrode patterns, and then black paint is applied and the black paint on the transparent electrodes is removed to form black stripes in the four portions.

Gases used for plasma treatment include oxygen, nitrogen, argon, etc. (oxygen is preferably used to remove the organic layer without damaging the transparent electrode).

An organic material layer is provided on a working transparent substrate, a transparent electrode is patterned on the organic material layer, a recess is formed in the organic material layer in the gap between the transparent electrode patterns by plasma treatment, and then a black paint is applied and a transparent electrode is formed on the transparent electrode. By removing the black paint, it is possible to form black stripes in the recesses.
A photolithography process for forming black stripes is not required, the number of steps is reduced, and alignment with transparent electrodes is not required, making it possible to form black stripes with high dimensional accuracy.

Example Below, regarding a method for manufacturing a liquid crystal element according to an example of the present invention,
This will be explained with reference to the drawings.

FIG. 1 is a process explanatory diagram showing a first embodiment of the method for manufacturing a liquid crystal element of the present invention.

First, as shown in FIG. 1(A), an organic layer 2 is formed on a transparent substrate 1. In this embodiment, a sublimable ultraviolet curing resin is applied to the entire surface by a method such as a spin code, and then a transparent conductive film 3 is formed as shown in FIG. 1(B). As the transparent conductive film 3, ITO (indium tin oxide) is formed by sputtering, and then a photoresist is applied, exposed, and developed (as shown in Figure 1 (C), a resist 4 of a predetermined pattern is formed. form.

Next, as shown in FIG. 1(D), the transparent conductive film in the gap between the resists 4 is etched with hydrochloric acid or the like, and as shown in FIG. 1E, the resist 4 is removed to form transparent electrodes 6 in a predetermined pattern. Form.

Next, oxygen plasma treatment is performed in a parallel plate type dry etching apparatus to remove the organic layer in the portions not masked by the transparent electrode 5 and form recesses, as shown in FIG. 1(F). High frequency power 1kW oxygen gas pressure 20
When treated at 0 mTorr for 5 minutes, the organic layer was 1 deep.
．． After removing 6 μm, black paint 7 is applied as shown in FIG. 1(G).

A mixture of gelatin and carbon in a ratio of 3:5 was used as the black paint 7, and then the black paint 7 on the transparent electrode 5 was scraped off with a doctor blade, etc., and then placed as shown in Figure 1 (H). The upper and lower substrates shown in FIG. 1(I) on which the black stripes 8 are formed in the recessed portions are assembled with the substrates on which the black stripes shown in FIG. 1(H) are formed so as to be orthogonal to each other. After applying a polyimide film on the substrate and performing a rubbing process, a distance between the substrates was maintained using a photosensitive resin bank and liquid crystal was injected. A liquid crystal element with high display contrast was obtained. Figure 2 shows the liquid crystal element of the present invention. FIG. 3 is a configuration diagram of a liquid crystal element obtained in a second example of the manufacturing method.

In the upper substrate, the organic substance layer 2 was formed on the color filter substrate consisting of the color filter 11 formed by the printing method and the transparent substrate 1 (as shown in FIG. 2) in the same manner as in the first embodiment. A liquid crystal element with various colors can be obtained.

As described above, an organic material layer is cast on a transparent substrate, a transparent electrode is patterned on the organic material layer, a recess is formed in the organic material layer in the gap between the transparent electrode patterns by plasma treatment, and then a black paint is applied and the transparent electrode is formed on the organic material layer. By removing the black paint on the electrodes, it is possible to form black stripes with high dimensional accuracy using fewer steps than forming black stripes in the recesses.

Furthermore, since carbon black can be used, it has excellent light shielding properties and the flatness of the substrate surface, making it possible to provide a liquid crystal element with high display characteristics.

Furthermore, according to the second embodiment, a color liquid crystal element can be provided. In this case, by forming the organic layer 2, the flatness of the color filter can also be improved.

Effects of the Invention As described above, the present invention provides an organic layer on a transparent substrate,
A transparent electrode is patterned on the organic material layer, a recess is formed in the organic material layer in the gap between the transparent electrode patterns by plasma treatment, and then a black paint is applied and the black paint on the transparent electrode is removed to form the recess. It is possible to form black stripes with high dimensional accuracy in a small number of steps.

[Brief explanation of the drawing]

FIG. 1 shows process steps in a first embodiment of the method for manufacturing a liquid crystal device of the present invention. FIG. 2 is a diagram showing the configuration of a liquid crystal device obtained in a second embodiment of the present invention. FIG. 3 shows a conventional liquid crystal device. FIG. 3 is a process diagram showing a method for forming transparent electrodes and black stripes in the manufacturing method of FIG. ■...Transparent group I, *, 2...Organic layer 3...Transparent conductive wind 4...Resist, 6...Transparent electrode 7.
...Black paint 8...Name of Black Strice agent: Patent attorney Shigetaka Awano, Haka 1 person", Akira I
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Claims (1)

[Claims] An organic material layer is provided on a transparent substrate, a transparent electrode is patterned on the organic material layer, a recess is formed in the organic material layer in the gap between the transparent electrode patterns by plasma treatment, and then a black paint is applied on the transparent electrode. A method for manufacturing a liquid crystal element, comprising: forming a black stripe made of the black paint in the concave portion by removing the black paint.