JPH04196558A - Board surface foreign matter inspection device - Google Patents

Abstract

PURPOSE:To make foreign matter detecting sensitivity of an entire surface of a board uniform by providing a concave reflecting mirror for reflecting a laser light to a sectorlike reflecting light by rotary reciprocation of a movable mirror to introduce the reflecting light perpendicularly to the moving direction of the board. CONSTITUTION:A board 1 is moved in one direction at a constant speed to emit a laser light 2 to a movable mirror 3. The light 2 is reflected to a sectorlike reflecting light 4 by rotary reciprocation of the mirror 3. The light 4 is emitted to a concave reflecting mirror 5 to be reflected to a laser light 6 incident perpendicularly to the moving direction of the board 1 from the rear or front side. Since the light 6 is incident perpendicularly to the surface of the board, scattered lights 7 to be sensed by an optical sensor 8 are uniform over the entire surface of the board 1, and hence a foreign matter detecting sensitivity also becomes uniform on the entire surface of the board 1.

Description

[Detailed description of the invention] [Industrial application field] This relates to an incident optical system for blue laser light.

[Prior Art] Conventionally, when inspecting foreign substances on the surface of a substrate, an input optical system for the inspection laser beam moves the substrate 1 at a constant speed in one direction and emits the laser beam 2, as shown in FIG. is applied to the movable mirror 3, and the rotating reciprocating motion of the movable mirror 3 makes it incident on the substrate surface as a fan-shaped reflected light 4, and the scattered light 7
This optical system detects foreign matter on the surface of the substrate 1 using an optical sensor 8.

[5e Akira tries to solve Section I! ! ] However, the above-mentioned optical system shown in FIG. 2 has the problem that the foreign matter detection sensitivity is not uniform over the entire surface of the substrate because the laser beam incident on the substrate surface is fan-shaped with respect to the direction of movement of the substrate. was.

Therefore, in the present invention, in order to solve such a problem, a laser beam is applied to a movable mirror, and by the rotation and reciprocation of the movable mirror, the laser beam is turned into fan-shaped reflected light, and the reflected light is directed in the traveling direction of the substrate. The purpose of this is to make the foreign matter detection sensitivity uniform over the entire surface of the substrate.

[Means for Solving the Problems] The substrate surface foreign matter inspection device of the present invention moves a substrate in one direction at a constant speed, injects a laser beam from the front or rear of the traveling direction of the substrate, and detects the scattered light from the scattered light. In an optical system between a laser light source of a foreign matter inspection device that detects foreign matter on the surface of the substrate and the substrate, the laser light is applied to a movable mirror,
The present invention is characterized in that it includes a concave reflecting mirror that converts the laser beam into fan-shaped reflected light by rotating and reciprocating the movable mirror, and makes the reflected light incident perpendicularly to the traveling direction of the substrate.

[Example] FIG. 1 is a perspective view of an example of the present invention. A substrate 1 is moved in one direction at a constant speed, and a laser beam 2 is directed onto a movable mirror 3. The laser beam 2 becomes a fan-shaped reflected beam 4 due to the rotational reciprocating motion of the movable mirror 3. This fan-shaped reflected light 4 is applied to a concave reflecting mirror 5, and a laser beam 6 that is incident perpendicularly from the front or back with respect to the direction of movement of the substrate 1 is applied.
shall be.

Since this laser beam 6 is incident perpendicularly to the substrate surface, the scattered light 7 detected by the optical sensor 8 is uniform over the entire surface of the substrate 1, and therefore the foreign matter detection sensitivity is also uniform over the entire surface of the substrate 1. .

[Effects of the Invention] As described above, according to the present invention, a laser beam is applied to a movable mirror, and the movable mirror rotates and reciprocates to turn the laser beam into fan-shaped reflected light, and the reflected light is reflected from the substrate. By providing a concave reflecting mirror that allows the light to be incident perpendicularly to the direction of travel, it has the effect of making the foreign matter detection sensitivity uniform over the entire surface of the substrate.

[Brief explanation of the drawing]

FIG. 1 is a main perspective view of one embodiment of the present invention, and FIG. 2 is a main perspective view of a conventional example. 1 ... Substrate 2.6 ... Laser light 3 ... Movable mirror 4 ... Fan-shaped reflected light 5 ... Concave reflecting mirror 7 ... Scattered light 8 ... Optical sensor and above Applicant Seiko Epson Corporation Agent Patent Attorney Kisanbe Meiki (and 1 other person) ¥ 1 Figure '8 2 l

Claims (1)

[Claims] A laser light source of a foreign matter inspection device that moves a substrate at a constant speed in one direction, irradiates a laser beam from the front or rear of the traveling direction of the substrate, and detects foreign matter on the surface of the substrate from the scattered light, and the substrate. In the optical system between the two, the laser beam is applied to a movable mirror, and by the rotation and reciprocation of the movable mirror, the laser beam is turned into fan-shaped reflected light, and the reflected light is directed perpendicularly to the traveling direction of the substrate. A substrate surface foreign matter inspection device characterized by being equipped with a concave reflecting mirror that allows the light to enter the substrate.