JPH0421342B2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a testing device for semiconductor devices that continuously tests the electrical characteristics of semiconductor devices and sorts them into non-defective products and defective products. The present invention relates to a sorting and shrinking apparatus for separately shrinking semiconductor devices that are sorted and shunted. [Technical Background of the Invention] For example, in the case of semiconductor devices such as ICs (semiconductor integrated circuit devices), it is necessary to conduct physical characteristic tests on each manufactured product and to sort them into good and defective products. be done. In order to continuously and automatically perform the above-described testing and sorting on a large number of products, a semiconductor device testing apparatus equipped with a so-called high-speed handler apparatus has been used. FIG. 1 is a schematic explanatory diagram showing the conventional test apparatus for semiconductor devices. In the figure, reference numeral 1 denotes a pre-test chute section for arranging continuously supplied semiconductor devices in a single row. The semiconductor devices a ₁ , a ₂ . There is. The test head section 2 tests the electrical characteristics of the shunted semiconductor devices, and the semiconductor devices determined to be good or defective are shunted to the sorting chute section 3. After the test head section 2 becomes empty, the next semiconductor device is thrown out from the pre-test shoot section 1. Note that the test of the semiconductor device described above is performed using a tester (not shown) connected to the test head section 2. On the other hand, if the semiconductor device thrown out from the test head section 2 is a non-defective product, the sorting chute section 3 receives a command from the tester (not shown) and selects a non-defective device disposed immediately downstream thereof. Shoot to the shooting section 4. In addition, if the semiconductor device that has been thrown out is a defective product, the sorting chute section 3 is rotated by 90 degrees in response to a command from the tester (not shown), and the defective product chute section arranged in the rotated direction is removed. 5, defective semiconductor devices are shunted to and,
Each of the non-defective chute section 4 and the defective chute section 5 constitutes a storage device for storing shunted semiconductor devices together with a storage container provided at the tip thereof. FIG. 2 is a plan view schematically showing the conventional storage device. In the same figure, 6 indicates good product shoot 4.
Alternatively, it is a storage container disposed at the tip of the defective product chute section 5. The storage container 6 is attached to the chute section 4 or 5.
It is supported by a support plate 7 fixed to the support plate 7, and is provided so as to be movable in the lateral direction by a driving air cylinder 8 fixed to the support plate 7. The imaginary line 6' in the figure indicates its movement range. Also,
A driving detector 9 fixed to the non-defective chute section 4 or the defective chute section 5 is provided near the upper end of the storage container 6 . 10 is the sorting chute section 3
This is a detector for detecting that a semiconductor device has been shunted. When a semiconductor device is shunted from the sorting chute section 3 to the storage device, this is detected by the detector 10, and the semiconductor device is shunted to the storage container 6 through the chute section 4 or 5. They are piled up one after another in the storage row. When the semiconductor devices are stacked up to the position of the drive detector 9 and the corresponding storage row is filled, the drive detector 9 detects this and drives the drive air cylinder 8, and the next unfilled storage row is filled with semiconductor devices. The storage container is moved so that the semiconductor devices are thrown into the storage row. In this way, similar storage operations are repeated until the entire storage container 6 is filled with semiconductor devices. [Problems in the Background Art] If the above-mentioned conventional storage device is used as a part of the semiconductor device testing equipment to separately store the semiconductor devices that are sorted into good and defective products and thrown out, the above-mentioned problem will occur. Thus, two sets must be provided, one for good products and one for defective products. Therefore, there was a problem that it was not possible to make the device more compact, and there was also a problem that the operating rate of each storage device was low and it was not efficient. On the other hand, the overall problem with conventional semiconductor device test equipment is that it is configured with a single-row chute circuit system, and that the sorting chute section 3 rotates 90 degrees as described above to sort out defective products. There is a problem in that the overall machine index becomes large due to factors such as the need for precise movements, and this becomes an obstacle to improving work efficiency and, ultimately, overall productivity. Therefore,
An efficient semiconductor device in which the entire shute circuit system is branched from the pre-test head section to form multiple parallel shute circuit systems, each including a test head section, and an efficient sorting chute section is adopted to support this system. A testing device for this purpose was desired. In the semiconductor device test equipment that realizes this basic concept,
A storage device that is efficient and compatible with this will also be required. [Object of the Invention] The first object of the present invention is to provide a compact and efficient sorting device that can separately store semiconductor devices that are sorted into non-defective and defective devices in a semiconductor device testing device. An object of the present invention is to provide a storage device. A second object of the present invention is to provide an efficient sorting and storage device that can be well adapted to a semiconductor device testing apparatus that realizes the basic concept described above. In order to realize the semiconductor device testing apparatus according to the basic concept, for example, a device for distributing semiconductor devices supplied in a single row from the pre-test chute section 1 to each branched shute circuit, and Needless to say, a sorting chute device having a mechanism completely different from that of the conventional sorting chute section 3 is required. However, since these themselves are outside the scope of the present invention, their details will be omitted, and only the sorting chute device that will be disposed immediately before the sorting and storage device of the present invention will be explained as appropriate. That's it. [Summary of the Invention] The first feature of the sorting and storage device of the present invention is that
By providing at least one non-defective chute line into which the selected non-defective semiconductor devices are thrown out and at least one defective shoot line into which the selected defective semiconductor devices are thrown out, one sorting storage can be achieved. The device can store good and defective semiconductor devices separately. The second feature of the sorting and storage device of the present invention is that
By providing a plurality of the above-mentioned good product shoot rows or defective product shoot rows as necessary, the present invention can be adapted to a semiconductor device testing apparatus that realizes the basic concept described above. [Embodiment of the Invention] FIG. 3 is a schematic plan view showing an embodiment of the sorting and storage device having the first and second features of the present invention, and FIG. 4 is a schematic sectional view taken along the - line. It is. In these figures, 11 is a sorting and storage device. As clearly shown in FIG .
4 is formed. Furthermore, two defective product shoot rows 15 ₁ and 15 ₂ having a similar configuration are provided on both sides of the non-defective product shoot row 14 . In addition, in these figures, defective product shoot columns 15 ₁ , 15 ₂
indicates only its location. A common defective product storage box 16 is arranged downstream of the defective product chute rows 15 ₁ and 15 ₂ . On the other hand, a support plate 17 fixed to the lower support frame 13 is provided at the lower end of the non-defective chute row 14, as clearly shown in FIG. The support plate 17 is connected to the good product storage container 1 disposed downstream of the good product chute row 14.
8 in a horizontally movable state. This support plate 17 has the above-mentioned good product storage container 1.
A driving air cylinder 19 is provided which is connected to 8 and moves it laterally. Note that 18' indicated by an imaginary line in the figure indicates the range of movement in the lateral direction. Further, a driving detector 20 is provided at the lower end of the good product chute row 14, and is fixed to the upper support frame 12 and suspended to the upper end position of the good product storage container 18. The drive detector 20 is connected to the non-defective chute row 1 in the non-defective product storage container 18.
It is detected that the storage row immediately below 4 is filled, and the drive air cylinder 19 is driven to move the good product storage container 18 laterally. Furthermore, a detector 21 is provided in the non-defective chute row 14 to detect semiconductor devices that have been shunted. The detector 21 is composed of an optical fiber sensor and is embedded in the lower support frame 13 that defines the chute row 14. In the figure, numeral 30 denotes a sorting chute device configured to realize the basic concept described above in a semiconductor device testing apparatus. The sorting chute device 30 is provided with two chute parts 31 ₁ and 31 ₂ in parallel, from which semiconductor devices are shunted from the front stage part. Two test head sections 40 ₁ and 40 ₂ are arranged in parallel as the front stage of the sorting chute device 30 , and the test head sections 40 ₁ and 4 are arranged in parallel.
0 ₂ is configured to alternately shoot tested semiconductor devices to the sorting/shooting device 30 . Shute portions 31 ₁ , 31 ₂ of sorting chute device 30
If the semiconductor device thrown out from the test heads 40 ₁ and 40 ₂ is a detector, it is moored, but if it is a defective device, it is allowed to pass through, and the moored good semiconductor device is moored. It is designed so that it can be thrown into the sorting storage device 11 . Further, the sorting chute device 30 is configured to be able to move in the lateral direction as a unit. The chute section 31 ₁ is in communication with the test head section 40 ₁ and the defective product chute row 15 ₁ of the sorting and storage device, and after receiving the chute of semiconductor devices from the test head section 40 ₁ , communicates with the good product chute row 14 . When the robot moves to the desired position, it will shoot out the moored non-defective semiconductor devices. In addition, the chute section 31 ₂
is a position communicating with the test head section 40 ₂ and the defective product shoot row 15 ₂ of the sorting and storage device, and after receiving the semiconductor device shoots from the test head section 40 ₂ ,
When moved to a position communicating with the non-defective chute array 14, the moored non-defective semiconductor devices are shunted. The operation of the sorting and storage device 11 according to the above embodiment is as follows. When the sorting chute device 30 is shown in FIG. 3 and the chute section 31 ₂ receives semiconductor devices from the test head section 40 ₂ , if the semiconductor device thrown out is a defective product, the defective product is transferred to the chute section. 31 ₂ , are shunted to the defective product chute row 15 ₂ of the sorting and storage device, and are stored in the defective product storage box 16 . On the other hand, if the semiconductor device thrown into the chute section 31 ₂ of the sorting chute device 30 is a non-defective product, the non-defective product is moored within the chute section 31 ₂ . When the chute to the chute section 31 ₂ is completed in this way, the sorting chute device 30 transfers the chute section 31 ₂ to the good chute row 14 of the sorting and storage device 11 .
Move to a position where it communicates with. In this position,
The chute portion 31 ₁ of the sorting chute device 30 communicates with the defective product row 15 ₁ of the sorting and storing device, and also with the test head portion 40 ₁ disposed at the front stage. When the above movement is completed, the good semiconductor devices moored to the chute section ₃₁₂ of the sorting chute device 30 are shunted to the good chute row 14 of the sorting and storage device 11 , and at the same time, the semiconductor devices moored to the chute section 312 of the sorting chute device 30 are A semiconductor device is thrown from the test head section 40 ₁ to 31 ₁ . The non-defective semiconductor devices that have been shunted to the non-defective chute line 14 are stored in the non-defective storage container 15 as they are. On the other hand,
If the semiconductor device is a defective product, the semiconductor device shunted to the chute unit 31 ₁ of the sorting and chute device 30 is directly shunted to the defective product chute column 15 ₁ and stored in the defective product storage box 16, and if it is a non-defective product, it is It is moored within the chute portion ₃₁₁ . Next, the sorting chute device 30 moves again to the position shown in _FIG . At 31 ₂ , the semiconductor device is thrown out from the test head section 40 ₂ . By repeating the above operations,
The non-defective semiconductor devices are sorted and stored in the non-defective product storage box 18, and the defective semiconductor devices are selected and stored in the defective product storage box 16. At this time, the semiconductor devices stored in the non-defective product storage container 18 are detected by the detector 20, so if the detector 20 is connected to a counter, the number of non-defective products stored in the non-defective product storage container 18 can be counted. can. Furthermore, when the portion of the storage container 18 directly below the good chute row 14 is filled with semiconductor devices, the driving detector 20 detects this, and the storage container 18 is moved to the left by one row by the driving air cylinder 19. As a result, good semiconductor devices are stored in the next full row. In this way, when the good product storage container 18 is completely filled with non-defective products, the non-defective product storage container 18 is replaced with a new one and the above-described operation is continued. As mentioned above, according to the sorting and storage device of this embodiment, good and defective semiconductor devices can be stored separately using only one storage device, so compared to the case where two sets of conventional storage devices are provided. The installation area can be small and the operating rate can be improved. In addition, by providing two test heads and a correspondingly efficient sorting chute device, it can be used as a sorting and storage device that is compatible with the semiconductor device test equipment that has the basic configuration described above. It is clear from the above explanation. Furthermore, the sorting and storage device of the above embodiment can be used as is in a semiconductor device testing device in which the two test heads 40 ₁ and 40 ₂ can each test a plurality of semiconductor devices at the same time to further reduce the machine index. Although it can be used, a detailed explanation thereof will be omitted. Note that the present invention is not limited to the above embodiments, and various modifications are possible. For example, even if either of the defective product chute rows 15 ₁ and 15 ₂ is omitted, the device can be used as a sorting and storage device in the conventional semiconductor device testing apparatus shown in FIG.
However, in this case, the defective product chute row 15 and the
It is necessary to provide a connecting chute section for connecting the defective product chute section 5 shown in the figure. Further, the number of good product chute rows 14 and defective product chute rows 15 ₁ , 15 ₂ can be increased as appropriate depending on the configuration before the sorting chute device 30 in the semiconductor device testing apparatus. Furthermore, various drive devices other than an air cylinder can be used as the drive device for moving the good product storage container 18 in the lateral direction, and the detector 20 can be a photoelectric switch, a micro switch, etc. in addition to an optical fiber sensor. It is also possible to use [Effects of the Invention] As described in detail above, according to the present invention, it is possible to separately store semiconductor devices that are sorted into non-defective products and defective products and thrown out in a test equipment for semiconductor devices, and moreover, it is possible to separately store semiconductor devices that are sorted into good products and defective products in a semiconductor device testing device. Accordingly, it is possible to provide a compact sorting/storage device with a high operating rate that is well suited to an efficient semiconductor device testing device that solves the problems of semiconductor device testing devices.

[Brief explanation of drawings]

FIG. 1 is a schematic explanatory diagram of a conventional test device for semiconductor devices, FIG. 2 is a schematic plan view of a conventional storage device, and FIG. 3 is a schematic plan view of a sorting and storage device according to an embodiment of the present invention. FIG. 4 is a schematic sectional view taken along the line of FIG. 3. 11 ... Sorting storage device, 12... Upper support frame, 13
...Lower support frame, 14...Good product chute row, 15 ₁ ,
15 ₂ ... Defective product chute row, 16... Defective product storage box, 17... Support plate, 18... Good product storage container, 19
...driving air cylinder, 20...driving detector, 3
0... Sorting chute device, 40 ₁ , 40 ₂ ... Test head section.

Claims (1)

[Scope of Claims] 1. At least one defective product chute line provided for transporting defective semiconductor devices that have been thrown out by falling under their own weight to a defective product storage box by falling under their own weight; and at least one good product chute row provided in parallel with the defective product chute row in order to send the non-defective semiconductor devices that have been shunted by falling to the corresponding good product storage container by falling under their own weight; a supporting plate that is provided immediately downstream of the row and supports the good product storage container so as to be movable in the lateral direction; and a drive device that enables the movement of the good product storage container, and the support plate is provided to correspond to the defective product chute row. Semiconductor devices are sorted into good and defective products from a test head provided upstream as a pre-stage part and then thrown out. A sorting/shooting device provided immediately downstream of the test head is used to sort out defective products. are passed directly through the sorting chute row of the sorting chute device to the defective chute row, while non-defective products are moored within the sorting chute row, and then the sorting chute row is moved in parallel onto the non-defective chute row. The sorting and storage device is configured to store good products and defective products separately by dropping moored good products onto the good product chute row, wherein the good product storage device has a large number of storage rows, A sorting/storage device characterized by being provided with a drive detector for detecting that one storage row is filled and driving the drive device. 2. The sorting and storage apparatus according to claim 1, further comprising a detector for detecting non-defective semiconductor devices that have been shunted into the non-defective chute row. 3. The sorting and storage device according to claim 2, wherein an optical fiber sensor is used as the detector. 4. The sorting and storage device according to claim 3, wherein the optical fiber sensor is embedded in a wall defining the chute row.