JPH0422034U - - Google Patents
Info
- Publication number
- JPH0422034U JPH0422034U JP6070790U JP6070790U JPH0422034U JP H0422034 U JPH0422034 U JP H0422034U JP 6070790 U JP6070790 U JP 6070790U JP 6070790 U JP6070790 U JP 6070790U JP H0422034 U JPH0422034 U JP H0422034U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- low temperature
- holding device
- pipe
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Thermally Insulated Containers For Foods (AREA)
- Separation Of Gases By Adsorption (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案の第一の実施例による低温装置
用真空容器の真空保持装置３０の断面図、第２図
は本考案の第二の実施例による低温装置用真空容
器の真空保持装置４０の要部断面図、第３図は本
考案の第三の実施例による低温装置用真空容器の
真空保持装置５０の要部断面図、第４図は、本考
案の第四の実施例による低温装置用真空容器の真
空保持装置６０の概略断面図、第５図は従来のピ
ンチオフ処理による真空容器１の概略断面図、第
６図は同、ピンチオフした真空容器１の概略断面
図、第７図は従来の低温装置の真空容器１０の断
面図、第８図は時間の経過に対する真空度の変化
のグラフ、第９図は従来の真空容器２０の断面図
である。
１……真空容器、２……真空容器１の内空部、
３……金属パイプ、４……収容部、１０……真空
容器、１１……液体ヘリウム容器、１２……輻射
シールド板、１３……断熱材料、１４……真空容
器１０の内空部、１５……真空バルブ、１６……
ゲツターイオンポンプ、１７……バルブ、１８…
…活性炭、１９……ヒータ用配線、２０……真空
容器、２１……赤外線センサ、２２……真空容器
２０の内空部、２３……小型冷却器、２４……赤
外線入射用ウインドー、２５……赤外線センサ２
１のリード線、３０……低温装置用真空容器の真
空保持装置、３１……金属パイプ３の内部通路、
３２……金網、３３……カートリツジ式ヒータ、
３４……水冷パイプ、３５……空冷用冷却フイン
、４０……低温装置用真空容器の真空保持装置、
４１……空冷用のフイン、５０……低温装置用真
空容器の真空保持装置、５１……バツフル、６０
……低温装置用真空容器の真空保持装置、６１…
…金属パイプ。
FIG. 1 is a sectional view of a vacuum holding device 30 for a vacuum container for a low temperature device according to a first embodiment of the present invention, and FIG. 2 is a sectional view of a vacuum holding device 40 for a vacuum container for a low temperature device according to a second embodiment of the present invention. FIG. 3 is a sectional view of essential parts of a vacuum holding device 50 for a vacuum vessel for a low temperature apparatus according to a third embodiment of the present invention, and FIG. 5 is a schematic sectional view of the vacuum holding device 60 of the vacuum container for equipment, FIG. 5 is a schematic sectional view of the vacuum container 1 subjected to the conventional pinch-off process, FIG. 6 is a schematic sectional view of the vacuum container 1 which has been pinched off, and FIG. 8 is a sectional view of a vacuum vessel 10 of a conventional low-temperature apparatus, FIG. 8 is a graph of changes in the degree of vacuum over time, and FIG. 9 is a sectional view of a conventional vacuum vessel 20. 1... Vacuum container, 2... Inner space of vacuum container 1,
3...Metal pipe, 4...Accommodation part, 10...Vacuum container, 11...Liquid helium container, 12...Radiation shield plate, 13...Insulating material, 14...Inner space of vacuum container 10, 15 ...Vacuum valve, 16...
Getter ion pump, 17...Valve, 18...
...Activated carbon, 19... Wiring for heater, 20... Vacuum container, 21... Infrared sensor, 22... Inner space of vacuum container 20, 23... Small cooler, 24... Window for infrared incidence, 25... ...Infrared sensor 2
1 lead wire, 30... Vacuum holding device of vacuum container for low temperature equipment, 31... Internal passage of metal pipe 3,
32...wire mesh, 33...cartridge type heater,
34... Water cooling pipe, 35... Cooling fin for air cooling, 40... Vacuum holding device for vacuum container for low temperature equipment,
41...Fin for air cooling, 50...Vacuum holding device for vacuum container for low temperature equipment, 51...Batsuful, 60
...Vacuum holding device for vacuum container for low temperature equipment, 61...
...metal pipe.
Claims (1)
ンプ設ける低温装置用真空容器の真空保持装置で
あつて、 前記真空容器の内空部に連通するパイプを設け
、このパイプ部分から該内空部の初期の真空排気
およびピンチオフを可能とするとともに、 このパイプ内に前記ゲツターイオンポンプを収
納したことを特徴とする低温装置用真空容器の真
空保持装置。 (2) 前記ゲツターイオンポンプを加熱可能な加
熱手段を前記パイプの外部に設けたことを特徴と
する請求項(1)記載の低温装置用真空容器の真空
保持装置。 (3) 前記ゲツターイオンポンプと前記内空部と
の間の前記パイプ内に輻射熱防止用のバツフルを
設けたことを特徴とする請求項(1)記載の低温装
置用真空容器の真空保持装置。 (4) 前記ゲツターイオンポンプと前記内空部と
の間の前記パイプ部分に冷却手段を設けたことを
特徴とする請求項(1)記載の低温装置用真空容器
の真空保持装置。[Claims for Utility Model Registration] (1) A vacuum holding device for a vacuum container for a low temperature device in which a Getter ion pump is provided in a vacuum container for a low temperature device, the vacuum container having a pipe communicating with the inner space of the vacuum container, A vacuum holding device for a vacuum vessel for a low temperature apparatus, characterized in that initial vacuum evacuation and pinch-off of the inner space can be performed from this pipe portion, and the getter ion pump is housed in this pipe. (2) The vacuum holding device for a vacuum vessel for a low temperature apparatus according to claim (1), further comprising a heating means capable of heating the Getter ion pump provided outside the pipe. (3) The vacuum holding device for a vacuum vessel for a low temperature apparatus according to claim (1), characterized in that a buffle for preventing radiant heat is provided in the pipe between the Getter ion pump and the inner space. . (4) The vacuum holding device for a vacuum vessel for a low temperature apparatus according to claim (1), wherein a cooling means is provided in the pipe portion between the Getter ion pump and the inner space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6070790U JPH0422034U (en) | 1990-06-11 | 1990-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6070790U JPH0422034U (en) | 1990-06-11 | 1990-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0422034U true JPH0422034U (en) | 1992-02-24 |
Family
ID=31588310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6070790U Pending JPH0422034U (en) | 1990-06-11 | 1990-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0422034U (en) |
-
1990
- 1990-06-11 JP JP6070790U patent/JPH0422034U/ja active Pending
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